Abstract
Zinc oxide (ZnO) is a promising material for emerging electronic and photonic applications due to its wide direct band gap and large exciton binding energy. Despite on-going developments, the control of the conductivity type in ZnO films continues to be a challenge. Stable p-type ZnO is required in order to fabricate standalone ZnO-based devices. Nitrogen is considered as a promising candidate to produce a shallow acceptor level in ZnO, since it has similar radii and electrical structure to oxygen. In this experiment, we utilize the low cost sol–gel spin coating technique to fabricate nitrogen-doped ZnO (ZnO:N) films. All films show great optical transmittance above 80% in the visible region. ZnO:N film at 15 at.% doping concentration shows strong UV emission and exhibits low resistivity. A p–n homojunction device based on ZnO:N shows characteristic of a typical rectifying diode, with a turn-on voltage of approximately 1.2 V.
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H. Zhou, D. Yi, Z. Yu, L. Xiao, and J. Li, Thin Solid Films 515, 6909 (2007).
E. Fortunato, L. Raniero, L. Siva, A. Gonçalves, A. Pimentel, P. Barquinha, H. Águas, L. Pereira, G. Gonçalves, I. Ferreira, E. Elangovan, and R. Martins, Sol. Energy Mater. Sol. Cells 92, 1605 (2008).
Y.S. Choi, J.W. Kang, D.K. Hwang, S.J. Park, and I.E.E.E. Trans, Electron Devices 57, 26 (2010).
M. Kashif, M.E. Ali, S.M.U. Ali, and U. Hashim, Ceram. Int. 39, 6461 (2013).
C.F. Lin, M.S. Lin, C.C. Chen, P.H. Tsai, and F.H. Wang, Surf. Coatings Technol. 231, 161 (2013).
R. Mariappan, V. Ponnuswamy, and P. Suresh, Superlattices Microstruct. 52, 500 (2012).
H. Kumarakuru, D. Cherns, and G.M. Fuge, Surf. Coatings Technol. 205, 5083 (2011).
H.X. Chen, J.J. Ding, X.G. Zhao, and S.Y. Ma, Phys. B Condens. Matter 405, 1339 (2010).
D. Kim, I. Yun, and H. Kim, Curr. Appl. Phys. 10, S459 (2010).
T. Prasada Rao and M.C. Santhosh Kumar, J. Alloys Compd. 506, 788 (2010).
S. Kuprenaite, T. Murauskas, A. Abrutis, V. Kubilius, Z. Saltyte, and V. Plausinaitiene, Surf. Coatings Technol. 271, 156 (2015).
R. Vettumperumal, S. Kalyanaraman, and R. Thangavel, J. Mol. Struct. 1059, 61 (2014).
Z.N. Ng, K.Y. Chan, C.Y. Low, S.A. Kamaruddin, and M.Z. Sahdan, Ceram. Int. 41, S254 (2015).
R. Ebrahimifard, M.R. Golobostanfard, and H. Abdizadeh, Appl. Surf. Sci. 290, 252 (2014).
V. Avrutin, D.J. Silversmith, and H. Morkoç, Proc. IEEE 98, 1269 (2010).
L.-W. Weng, W.-Y. Uen, S.-M. Lan, S.-M. Liao, T.-N. Yang, C.-H. Wu, H.-F. Hong, W.-Y. Ma, and C.-C. Shen, Appl. Surf. Sci. 277, 1 (2013).
F.X. Xiu, Z. Yang, L.J. Mandalapu, J.L. Liu, and W.P. Beyermann, Appl. Phys. Lett. 88, 1 (2006).
S.S. Lin, J.G. Lu, Z.Z. Ye, H.P. He, X.Q. Gu, L.X. Chen, J.Y. Huang, and B.H. Zhao, Solid State Commun. 148, 25 (2008).
M.Y. Tan, C.B. Yao, X.Y. Yan, J. Li, S.Y. Qu, J.Y. Hu, W.J. Sun, Q.H. Li, and S. Bin Yang, Opt. Mater. (Amst). 51, 133 (2016).
W. Jun and Y. Yintang, Mater. Lett. 62, 1899 (2008).
W.W. Liu, Z.Z. Zhang, B. Yao, D.Z. Shen, and C.L. Liu, Opt. Mater. (Amst). 35, 2486 (2013).
S. Dhara and P.K. Giri, Thin Solid Films 520, 5000 (2012).
S. Nagar and S. Chakrabarti, Superlattices Microstruct. 75, 9 (2014).
S. Golshahi, S.M. Rozati, A.M. Botelho do Rego, J. Wang, E. Elangovan, R. Martins, and E. Fortunato, Mater. Sci. Eng. B 178, 103 (2013).
T.K. Pathak, V. Kumar, H.C. Swart, and L.P. Purohit, Phys. B Condens. Matter 480, 31 (2016).
S.S. Shinde, C.H. Bhosale, and K.Y. Rajpure, J. Photochem. Photobiol. B Biol. 113, 70 (2012).
Q. Li, X. Li, and J. Zhang, J. Alloys Compd. 572, 175 (2013).
Z.-N. Ng, K.-Y. Chan, Y.-K. Sin, F.-K. Yam, and D. Knipp, J. Nanosci. Nanotechnol. 17, 348 (2017).
Z.Q. Xu, H. Deng, Y. Li, Q.H. Guo, and Y.R. Li, Mater. Res. Bull. 41, 354 (2006).
K. Shtereva, V. Tvarozek, I. Novotny, J. Kovac, P. Sutta, and A. Vincze, in 2006 25th International Conference Microelectronics MIEL 2006 - Proceedings (IEEE, 2006), pp. 357–360.
L. Duan, W. Zhang, X. Yu, Z. Jiang, L. Luan, Y. Chen, and D. Li, Appl. Surf. Sci. 258, 10064 (2012).
M. Chen, Z.L. Pei, X. Wang, C. Sun, and L.S. Wen, J Vac Sci Technol A Vacuum Surfaces Film 19, 963 (2001).
X.-W. Zhao, X.-Y. Gao, X.-M. Chen, C. Chen, and M.-K. Zhao, Chin. Phys. B 22, 024202 (2013).
B. Houng, C.-L. Huang, and S.-Y. Tsai, J. Cryst. Growth 307, 328 (2007).
S. Al-Khawaja, B. Abdallah, S. Abou Shaker, and M. Kakhia, Interfaces 22, 221 (2015).
S. Khosravi-Gandomani, R. Yousefi, F. Jamali-Sheini, and N.M. Huang, Ceram. Int. 40, 7957 (2014).
K. Chongsri, S. Boonruang, W. Techitdheera, and W. Pecharapa, Mater. Lett. 65, 1842 (2011).
A. Valour, F. Cheviré, F. Tessier, F. Grasset, B. Dierre, T. Jiang, E. Faulques, L. Cario, and S. Jobic, Solid State Science (Amsterdam: Elsevier Masson, 2016), pp. 30–36.
H.T. Chang and G.J. Chen, Thin Solid Films 618, 84 (2016).
G. Yuan, Z. Ye, L. Zhu, Y. Zeng, J. Huang, Q. Qian, and J. Lu, Mater. Lett. 58, 3741 (2004).
R. Swapna and M.C. Santhosh Kumar, Mater. Sci. Eng. B Solid-State Mater. Adv. Technol. 178, 1032 (2013).
L. Duan, W. Zhang, X. Yu, P. Wang, Z. Jiang, L. Luan, Y. Chen, and D. Li, Solid State Commun. 157, 45 (2013).
I.S. Kim, E.K. Jeong, D.Y. Kim, M. Kumar, and S.Y. Choi, Appl. Surf. Sci. 255, 4011 (2009).
Y.G. Wang, S.P. Lau, X.H. Zhang, H.W. Lee, H.H. Hng, and B.K. Tay, J. Cryst. Growth 252, 265 (2003).
L. Xu, X. Li, and J. Yuan, Superlattices Microstruct. 44, 276 (2008).
X.B. Wang, C. Song, K.W. Geng, F. Zeng, and F. Pan, Appl. Surf. Sci. 253, 6905 (2007).
T.K. Pathak, V. Kumar, H.C. Swart, and L.P. Purohit, Phys. E Low-Dimensional Syst. Nanostructures 77, 1 (2016).
A. Sáaedi, R. Yousefi, F. Jamali-Sheini, M. Cheraghizade, and A. Khorsand, Zak, and N. M. Huang. Superlattices Microstruct. 61, 91 (2013).
Z. Ye, T. Wang, S. Wu, X. Ji, and Q. Zhang, J. Alloys Compd. 690, 189 (2017).
L.W. Wang, F. Wu, D.X. Tian, W.J. Li, L. Fang, C.Y. Kong, and M. Zhou, J. Alloys Compd. 623, 367 (2015).
M.B. Islam, M.M. Rahman, M.K.R. Khan, M.A. Halim, M.A. Sattar, D.K. Saha, and M.A. Hakim, Thin Solid Films 534, 137 (2013).
J. Millman and A. Grabel, Microelectronics (New York: McGraw-Hill, 1987).
J.G. Lu, Y.Z. Zhang, Z.Z. Ye, L.P. Zhu, L. Wang, B.H. Zhao, and Q.L. Liang, Appl. Phys. Lett. 88, 222114 (2006).
J.-L. Zhao, X.-M. Li, J.-M. Bian, W.-D. Yu, and C.-Y. Zhang, J. Cryst. Growth 280, 495 (2005).
H. Nian, S.H. Hahn, K.K. Koo, E.W. Shin, and E.J. Kim, Sol-Gel Derived N-Doped ZnO Thin Films. Mater. Lett. 63, 2246 (2009).
S. Kalyanaraman, R. Thangavel, and R. Vettumperumal, J. Phys. Chem. Solids 74, 504 (2013).
C. Park, S. Kim, and S. Lim, Solid State Commun. 167, 18 (2013).
D. Wang, J. Zhou, and G. Liu, J. Alloys Compd. 481, 802 (2009).
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Ng, ZN., Chan, KY., Muslimin, S. et al. P-Type Characteristic of Nitrogen-Doped ZnO Films. J. Electron. Mater. 47, 5607–5613 (2018). https://doi.org/10.1007/s11664-018-6468-2
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DOI: https://doi.org/10.1007/s11664-018-6468-2