Abstract
Synchrotron monochromatic-beam x-ray topography observation has been performed on high-quality ammonothermal gallium nitride single crystal to evaluate threading dislocations (TD) in a nondestructive manner. Asymmetric diffractions with six equivalent g-vectors of 11–26, in addition to a symmetric diffraction with g = 0008, were applied to determine the Burgers vectors (b) of dislocations. It was found that pure edge-type TDs with \( {\varvec b} = \left\langle {11 - 20} \right\rangle /3 \) did not exist in the sample. A dominant proportion of TDs were of mixed type with \( {\varvec b} = \left\langle {11 - 20} \right\rangle /3 + \left\langle {0001} \right\rangle \), i.e., so-called c + a dislocations. Pure 1c screw dislocations with \( {\varvec b} = \left\langle {0001} \right\rangle \) and TDs with c-component larger than 1c were also observed.
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Yao, Y., Ishikawa, Y., Sugawara, Y. et al. Observation of Threading Dislocations in Ammonothermal Gallium Nitride Single Crystal Using Synchrotron X-ray Topography. J. Electron. Mater. 47, 5007–5012 (2018). https://doi.org/10.1007/s11664-018-6252-3
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DOI: https://doi.org/10.1007/s11664-018-6252-3