Abstract
We have grown 1 wt.%, 5 wt.%, and 10 wt.% Li-doped tungsten oxide thin films on glass substrate using the spray pyrolysis technique and investigated their morphological, structural, optical, and electrical properties. In addition to formation of nanograin coverage, we found that the doped films grew with polycrystalline monoclinic structure having preferred orientation along (200) plane instead of the amorphous undoped structure. The 10 wt.%-doped sample showed the highest visible transmittance (∼95%) and lowest resistivity (∼7.5 Ω cm), together with relatively high ultraviolet (UV) photoluminescence emission at room temperature.
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Asghari, Z., Eshghi, H. Achieving Low-Electrical-Resistance WO3:Li Nanostructured Thin Films Using Spray Pyrolysis Technique. J. Electron. Mater. 46, 1439–1443 (2017). https://doi.org/10.1007/s11664-016-5173-2
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DOI: https://doi.org/10.1007/s11664-016-5173-2