Abstract
In this work, elastic emission machining (EEM), which is a precise surface-preparation technique using chemical reactions between the surfaces of work and fine powder particles, is applied to the flattening 4H-SiC (0001) surface. Prepared surfaces are observed and characterized by optical interferometry, atomic force microscopy (AFM), and low-energy electron diffraction (LEED). The obtained images show that the processed surface has atomic-level flatness, and the subsurface damage and surface scratches of the preprocessed surface are almost entirely removed.
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Kubota, A., Mimura, H., Inagaki, K. et al. Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining. J. Electron. Mater. 34, 439–443 (2005). https://doi.org/10.1007/s11664-005-0124-3
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DOI: https://doi.org/10.1007/s11664-005-0124-3