Abstract
In the present work, the influence of substituted Si-alkoxides on the structural and optical properties of films obtained in the SiO2-TiO2 system was studied. Methyltriethoxysilane (MTEOS) and 3-(tri-methoxysilyl)propyl methacrylate (TSPM) were used as SiO2 sources and Ti(OBu)4 was used as TiO2 source. Acetylacetone was added to the Ti(OBu)4 as chelating agent and the synthesis was carried out in acid medium. The films were deposited on oxidized Si-wafers by spin-coating. The films were characterized by XRD, spectro-ellipsometry (SE), and atomic force microscopy (AFM). The results obtained have shown that in the case of hybrid films the desired thickness could be obtained in a single deposition step. The thickness of the films and the optical properties are controlled by the bulkiness of the organic substitute bounded to Si. Among other optical applications, the potential use of such films as optical waveguides is proposed.
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Zaharescu, M., Crisan, M., Predoana, L. et al. Hybrid Inorganic-Organic Sol–Gel Coatings in the SiO2-TiO2 System. J Sol-Gel Sci Technol 32, 173–177 (2004). https://doi.org/10.1007/s10971-004-5784-6
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DOI: https://doi.org/10.1007/s10971-004-5784-6