Abstract
This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN⋅m in torque have been actually developed.
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Uchino, K., Cagatay, S., Koc, B. et al. Micro Piezoelectric Ultrasonic Motors. J Electroceram 13, 393–401 (2004). https://doi.org/10.1007/s10832-004-5131-x
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DOI: https://doi.org/10.1007/s10832-004-5131-x