Abstract
The problem of modification of rubbing surfaces in micrometer size microdevices (micro-electro-mechanical systems – MEMS) to control adhesion, friction and wear as well as mechanical properties is discussed. Several solutions are reviewed and examples of investigation results are given.
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Received: 30 June 1998 / Accepted: 14 December 1998
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Rymuza, Z. Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review. Microsystem Technologies 5, 173–180 (1999). https://doi.org/10.1007/s005420050160
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DOI: https://doi.org/10.1007/s005420050160