Abstract
The photosensitivity in UV-range of some glasses can be used for micro structuring. The irradiated areas crystallize after a thermal treatment. Microstructures are achieved by wet-chemical etching of the crystallized areas. Interactions between UV-laser radiation of different wavelength and the photosensitive glass are investigated. The relationship between process parameters and geometry of microstructures is examined.
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Received: 10 August 2001/Accepted: 24 September 2001
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Brokmann, U., Jacquorie, M., Talkenberg, M. et al. Exposure of photosensitive glasses with pulsed UV-laser radiation. Microsystem Technologies 8, 102–104 (2002). https://doi.org/10.1007/s00542-001-0134-x
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DOI: https://doi.org/10.1007/s00542-001-0134-x