Abstract.
Laser-deposited metallic alloys and multilayers were studied in detail by a combination of high-resolution ex situ and time-resolved in situ experiments. The purpose of these experiments is to better understand the special properties of laser-deposited metallic films in comparison with conventionally prepared thin films. During deposition, thickness, resistance, and electron diffraction (THEED) experiments show that the film surface is resputtered, local mixing at the interfaces of multilayers on a nanometre scale occurs, and metastable phases up to large film thicknesses are formed. After deposition, a compressive stress of 1–2 GPa was measured using four-circle diffractometry, and growth defects were observed on an atomic scale by electron microscopy (HRTEM) and field ion microscopy (FIM). The obtained structural details of the metallic films can be explained by an implantation model for the laser deposition process.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
Author information
Authors and Affiliations
Additional information
Received: 21 July 1999 / Accepted: 11 September 1999 / Published online: 22 December 1999
Rights and permissions
About this article
Cite this article
Störmer, M., Sturm, K., Fähler, S. et al. Study of laser-deposited metallic thin films by a combination of high-resolution ex situ and time-resolved in situ experiments . Appl Phys A 69 (Suppl 1), S455–S457 (1999). https://doi.org/10.1007/s003390051437
Issue Date:
DOI: https://doi.org/10.1007/s003390051437