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Received: 25 July 1997/Accepted: 1 October 1997
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Avouris, P., Martel, R., Hertel, T. et al. AFM-tip-induced and current-induced local oxidation of silicon and metals . Appl Phys A 66 (Suppl 1), S659–S667 (1998). https://doi.org/10.1007/s003390051218
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DOI: https://doi.org/10.1007/s003390051218