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Received: 6 January 1997/Accepted: 1 April 1997
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Varel, H., Ashkenasi, D., Rosenfeld, A. et al. Micromachining of quartz with ultrashort laser pulses . Appl Phys A 65, 367–373 (1997). https://doi.org/10.1007/s003390050593
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DOI: https://doi.org/10.1007/s003390050593