Abstract
Pulsed excimer lasers are the by far strongest and most efficient laser sources in the ultraviolet spectral region. On account of the unique lateral resolution of 1 μm, which is achievable with excimer-laser based processing systems as well as of the large field size covered within each laser shot, excimer lasers are indispensable laser sources in pulsed-laser deposition, high-precision marking, low-temperature surface annealing and large-area micropatterning.
The innovative potential of excimer lasers and related beam delivery technology for large-area processing applications is reviewed.
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Delmdahl, R., Fechner, B. Large-area microprocessing with excimer lasers. Appl. Phys. A 101, 283–286 (2010). https://doi.org/10.1007/s00339-010-5818-6
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DOI: https://doi.org/10.1007/s00339-010-5818-6