Abstract
DLC (Diamond-like carbon films) were prepared by pulsed laser ablation of a liquid target at substrate temperatures from 18 to 600°C using 248 nm KrF excimer laser. The sp3 hybridization state carbon formation was additionally promoted by gaseous H2O2 flow through the reaction chamber and substrate excitation by the same laser beam.
Deposited DLC films were characterised by Raman scattering spectroscopy and atomic force microscopy (AFM). Comparative AFM and Raman study shows that the increase in the content of sp3 type bonding in DLC is in correlation with the increase of the surface roughness of the samples prepared.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
D.R. McKenzie, D. Muller, B.A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1990)
A.A. Voevodin, M.S. Donley, J.S. Zabinsky, J.E. Bultman, Surf. Coat. Technol. 77, 534 (1995)
M.P. Siegal, D.R. Tallant, P.N. Provencio, D.L. Overmyer, R.L. Simpson, Appl. Phys. Let. 76, 3052 (2000)
A. Grill, V. Patel, Diamond Relat. Mater. 2, 597 (1993)
A. Matthews, S.S. Eskildsen, Diamond Relat. Mater. 3, 902 (1994)
A.A. Voevodin, M.S. Donley, Surf. Coat. Technol. 82, 199 (1996)
J. Robertson, Mater. Sci. Eng. R Rep. 37, 129 (2002)
A.M. Wu, J. Sun, X.K. Shen, N. Xu, Z.F. Ying, Z.B. Dong, J.D. Wu, Diamond Relat. Mater. 15, 1235 (2006)
J. Robertson, Prog. Solid State Chem. 21, 199 (1991)
Y. Lifshitz, Diamond Relat. Mater. 5, 388 (1996)
A. Hu, I. Alkhesho, H. Zhou, W.W. Duley, Diamond Relat. Mater. 16, 149 (2007)
M.L. Morrison, R.A. Buchanan, P.K. Liaw, C.J. Berry, R.L. Brigmon, L. Riester, H. Abernathy, C. Jin, R.J. Narayan, Diamond Relat. Mater. 15, 138 (2006)
S.M. Mominuzzaman, T. Soga, T. Jimbo, M. Umeno, Thin Solid Films 376, 1 (2000)
N. Benchikh, F. Garrelie, C. Donnet, K. Wolski, R.Y. Fillit, F. Rogemond, J.L. Subtil, J.N. Rouzaud, J.Y. Laval, Surf. Coat. Technol. 200, 6272 (2006)
J.M. Lackner, C. Stotter, W. Waldhauser, R. Ebner, W. Lenz, M. Beutl, Surf. Coat. Technol. 174–175, 402 (2003)
P.M. Ossi, C.E. Bottani, A. Miotello, Thin Solid Films 482, 2 (2005)
Edwards: Vacuum products catalogue (1996–1997), p. 239 (1995)
R.-F. Xiao, Appl. Phys. Lett. 67(7), 1022 (1995)
R.-F. Xiao, Appl. Phys. Lett. 67(21), 3117 (1995)
J. Eskusson, R. Jaaniso, T. Avarmaa, T. Jantson, E. Lust, SPIE Proc. 6591, 65910L/1 (2007)
D.S. Knigth, W.B. White, J. Mater. Res. 4(2), 358 (1989)
R. Diamant, E. Jimenez, E. Haro-Poniatowski, L. Ponce, M. Fernandez-Guasti, J.C. Alonso, Diamond Relat. Mater. 8, 1277 (1999)
V.N. Apakina, A.L. Karuzskii, M.S. Kogan, A.V. Kvit, N.N. Melnik, Yu.A. Mityagin, V.N. Murzin, A.A. Orlikovsky, A.V. Perestoronin, S.D. Tkachenko, N.A. Volchkov, Diamond Relat. Mater. 6, 564 (1997)
D.R. Tallant, J.E. Parmeter, M.P. Siegal, R.L. Simpson, Diamond Relat. Mater. 4, 191 (1995)
D.T. Peeler, P.T. Murray, Diamond Relat. Mater. 3, 1124 (1994) (1994)
J.D. Carey, S.R.P. Silva, Phys. Rev. B 70, 235417 (2004)
A.C. Ferrari, J. Robertson, Phys. Rev. B 61(20), 14095 (2000)
M.L. Terranova, V. Sessa, S. Piccirillo, Appl. Phys. Lett. 75(3), 379 (1999)
S. Leppävuori, J. Levoska, J. Vaara, O. Kusmartseva, Mater. Res. Soc. Symp. Proc. 285, 557 (1993)
S.E. Johnson, M.N.R. Ashfold, M.P. Knapper, R.J. Lade, K.N. Rosser, N.A. Fox, W.N. Wang, Diamond Relat. Mater. 6, 569 (1997)
M. Chhowalla, A.C. Ferrari, J. Robertson, G.A.J. Amaratunga, Appl. Phys. Lett. 76(11), 1419 (2000)
Y. Lifshitz, G.D. Lempert, E. Grossman, I. Avigal, C. Uzan Saguy, R. Kalish, J. Kulik, D. Marton, J.W. Rabalais, Diamond Relat. Mater. 4, 318 (1995)
E. Cappelli, C. Scilletta, S. Orlando, R. Flammini, S. Iacobucci, P. Ascarelli, Thin Solid Films 482, 305 (2005)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Eskusson, J., Jaaniso, R. & Lust, E. Synthesis of DLC films by PLD from liquid target and dependence of film properties on the synthesis conditions. Appl. Phys. A 93, 745–749 (2008). https://doi.org/10.1007/s00339-008-4706-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-008-4706-9