Abstract
This paper reports the synthesis and characterization of fluorine-doped tin oxide (FTO) thin films via intermittent spray pyrolysis utilizing a solution mixture of tin chloride pentahydrate and ammonia fluoride. Utilizing the same solution, nanorod arrays were fabricated via template-based growth. Uniform and crack-free FTO films over 20×20 mm with a thickness up to 900 nm have been routinely achieved; such FTO films demonstrate electrical resistivity as low as 2.2×10-4 Ω cm as well as good optical transparency ranging from 75 to 85%. In addition, FTO nanorods were fabricated using template-filling methods at a temperature of 440 °C. The nanorods have a diameter of ∼160–250 nm, appear to be comprised of small nanoparticles 5–10 nm in size, and have a resistivity value of 4×10-1 Ω cm.
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References
T. Fukano, T. Motohiro, Sol. Energ. Mater. Sol. Cells 82, 567 (2004)
N.R. Lynam, in Proceedings of the Symposium on Electrochromic Materials, vol. 90–92, ed. by M.K. Carpenter, D.A. Corrigan. (The Electrochemical Society, Pennington, 1990), p. 201
Q. Qiao, J. Beck, R. Lumpkin, J. Pretko, J.T. Mcleskey Jr., Sol. Energ. Mater. Sol. Cells 90, 1034 (2006)
A.N. Banerjee, S. Kundoo, P. Saha, K.K. Chattopadhyay, J. Sol-Gel Sci. Technol. 28, 105 (2003)
H. Fujiwara, S. Otsuka-Yao-Matsuo, N. Ono, Appl. Phys. A 71, 609 (2000)
S. Ngamsinlapasathiana, T. Sreethawongb, Y. Suzukia, S. Yoshikawa, Sol. Energ. Mater. Sol. Cells 90, 2129 (2006)
G.R.A. Kumara, S. Kaneko, A. Konno, M. Okuya, K. Murakami, B. Onwona-Agyeman, K. Tennakone, Prog. Photovoltaics Res. Appl. 14, 643 (2006)
T. Fukano, T. Motohiro, T. Ida, H. Hashizume, J. Appl. Phys. 97, 084314 (2005)
S.N. Luo, A. Kono, N. Nouchi, F. Shoji, J. Appl. Phys. 100, 113701 (2006)
T. Kawashima, H. Matsui, N. Tanabe, Thin Solid Films 445, 241 (2003)
G.C. Morris, A.E. McElnea, Appl. Surf. Sci. 92, 167 (1996)
C. Agashe, S.S. Major, J. Mater. Sci. 31, 2965 (1996)
P. Shao, G. Ji, P. Chen, J. Membr. Sci. 255, 1 (2005)
Y.J. Kim, H. Shang, G.Z. Cao, J. Sol-Gel Sci. Technol. 38, 79 (2006)
W. Wang, C. Xu, X. Wang, Y. Liu, Y. Zhan, C. Zheng, F. Songa, G. Wanga, J. Mater. Chem. 12, 1922 (2002)
S.J. Limmer, S.V. Cruz, G.Z. Cao, Appl. Phys. A 49, 421 (2004)
J.K. Kim, J.Q. Xi, H. Luo, J. Cho, C. Sone, Y. Park, E.F. Schubert, Proc. SPIE 5941, 91 (2005)
H. Hui, O.K. Tan, Y.C. Lee, T.D. Tran, M.S. Tse, X. Yao, Appl. Phys. Lett. 87, 163123 (2005)
Y. Wang, J. Yang Lee, J. Phys. Chem. B 108, 17832 (2004)
Y. Cui, Q. Wei, H. Park, C.M. Lieber, Science 293, 1289 (2001)
M.H. Huang, S. Mao, H. Feick, H. Yan, Y. Wu, H. Kind, E. Weber, R. Russo, P. Yang, Science 292, 1897 (2001)
J. Wang, M.S. Gudiksen, X. Duan, Y. Cui, C.M. Lieber, Science 293, 1455 (2001)
W.I. Park, J.S. Kim, G.C. Yi, H.J. Lee, Adv. Mater. 17, 1393 (2005)
M. Law, L.E. Greene, J.C. Johnson, R. Saykally, P. Yang, Nature Mater. 4, 455 (2005)
P. Charoensirithavorn, S. Yoshikawa, Mater. Res. Soc. Symp. Proc. 974, CC07, (2007)
E. Elangovan, K. Ramamurthi, Appl. Surf. Sci. 249, 183 (2005)
S. Shanthi, C. Subramanian, P. Ramasamy, Mater. Sci. Eng. B 57, 127 (1999)
E. Shanthi, A. Banerjee, V. Dutta, K.L. Chopra, J. Appl. Phys. 53, 1615 (1982)
K. Takahashi, Y. Wang, K. Lee, G.Z. Cao, Appl. Phys. A 82, 27 (2006)
A. Gupta, D.K. Pandya, S.C. Kashyap, Japan. J. Appl. Phys. 43, L1592 (2004)
S. Shanthia, H. Anurathab, C. Subramaniana, P. Ramasamy, J. Cryst. Growth 194, 369 (1998)
J.A. Thornton, Ann. Rev. Mater. Sci. 7, 239 (1977)
R. Chandrasekhar, K.L. Choy, J. Cryst. Growth 231, 215 (2001)
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81.07.-b; 73.61.-r; 81.16.Be
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Russo, B., Cao, G. Fabrication and characterization of fluorine-doped thin oxide thin films and nanorod arrays via spray pyrolysis. Appl. Phys. A 90, 311–315 (2008). https://doi.org/10.1007/s00339-007-4274-4
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DOI: https://doi.org/10.1007/s00339-007-4274-4