Abstract
Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtosecond laser. The continuous scanning ablation increases the processing speed up to 50 μm/s. Not only may microchambers or microtrenches be obtained at high speed and in one step, but also combined structures consisting of cascaded microchambers and microtrenches may be fabricated. The inner-wall morphology of the microchambers is analyzed by a scanning electron microscope.
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87.80.Mj; 52.38.Mf; 82.50.Pt; 42.62.-b; 42.70.Ce
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An, R., Li, Y., Dou, Y. et al. Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses. Appl. Phys. A 83, 27–29 (2006). https://doi.org/10.1007/s00339-005-3456-1
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DOI: https://doi.org/10.1007/s00339-005-3456-1