Abstract
Parallel nanostructuring of a GeSbTe film may significantly improve the recording performance in data storage. In this paper, a method that permits direct and massively parallel nanopatterning of the substrate surface by laser irradiation is investigated. Polystyrene spherical particles were deposited on the surface in a monolayer array by self-assembly. The array was then irradiated with a 248-nm KrF laser. A sub-micron nanodent array can be obtained after single-pulse irradiation. These nanodents change their shapes at different laser energies. The optical near-field distribution around the particles was calculated according to the exact solution of the light-scattering problem. The influence of the presence of the substrate on the optical near field was also studied. The mechanisms for the generation of the nanodent structures are discussed.
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References
M. Ohtsu, H. Hori: Near-field Nano-optics (Kluwer Academic, New York 1999)
E. Betzig, J.K. Trautman, R. Wolfe, E.M. Gyorgy, P.L. Finn, M.H. Kryder, C.-H. Change: Appl. Phys. Lett. 61, 142 (1992)
S. Patane, A. Arena, M. Allegrini, L. Amdereozzi, M. Faetti, M. Giordano: Opt. Commun. 210, 37 (2002)
H.-J. Münzer, M. Mosbacher, M. Bertsch, O. Dubbers, F. Burmeister, A. Pack, R. Wannemacher, B.-U. Runge, D. Bäuerle, J. Boneberg, P. Leiderer: Proc. SPIE 4426, 180 (2001)
O. Watanabe, T. Ikawa, M. Hasegawa, M. Tsuchimori, Y. Kawata: Appl. Phys. Lett. 79, 1366 (2001)
K. Piglmayer, R. Denk, D. Bäuerle: Appl. Phys. Lett. 80, 4693 (2002)
B.S. Luk‘yanchuk, Y.W. Zheng, Y.F. Lu: Proc. SPIE 4065, 576 (2000)
M. Born, E. Wolf: Principles of Optics, 7th edn. (Cambridge University Press, Cambridge 1999)
P.A. Bobbert, J. Vlieger: Physica A 137, 243 (1986)
B.S. Luk‘yanchuk, N. Arnold, S.M. Huang, Z.B. Wang, M.H. Hong: Appl. Phys. A 77, 209 (2003)
Y. Lu, S.C. Chen: Nanotechnology 14, 505 (2003)
D. Bäuerle: Laser Processing and Chemistry (Springer, Singapore 2000)
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81.16.Mk; 61.80.Ba; 81.16.Rf; 81.65.Cf
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Wang, Z., Hong, M., Luk‘yanchuk, B. et al. Parallel nanostructuring of GeSbTe film with particle mask. Appl. Phys. A 79, 1603–1606 (2004). https://doi.org/10.1007/s00339-004-2860-2
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DOI: https://doi.org/10.1007/s00339-004-2860-2