Abstract
High-angled structured surfaces such as micropyramidal arrays, V-grooves and lenslet arrays are widely used in industries. However, there is currently no effective way to inspect these microstructures, resulting in very high scrap rates. This paper presents a proof-of-principle demonstration of an optical system capable of measuring V-groove structures in a single measurement acquisition. The dual-probe wavelength scanning interferometry (DPWSI) system comprises dual probes, with orthogonal measurement planes. The calibration of the DPSWI system is the key to registering the relative locations of the dual measurement planes and allowing the surface topography to be correctly reconstructed. In order to achieve this, a custom calibration artefact was manufactured comprising focused ion beam etched features on two faces of a precision cube. The procedures for the characterisation of the artefact to generate reference topography, and the subsequent calibration of the DPWSI are described in full. A measurement example from a metallised saw tooth sample featuring near-right-angles grooves having a peak-to-valley height of 32 μm and nominal pitch of 25 μm is presented and compared with a result obtained using stylus profilometry. DPWSI is shown to obtain an areal dataset in a single acquisition and is able to better resolve peak/valley points compared with the stylus, which is limited by a 2-μm tip radius. Some lateral scale error is apparent in the final DPWSI results and a discussion of this in terms of the limitations surrounding the current calibration artefact is presented.
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References
Jiang X, Whitehouse DJ (2012) Technological shifts in surface metrology. CIRP Ann Manuf Technol 61(2):815–836
Zou H, Ding Y, Zhang J, Cai A, Zhang X, Zhou Y (2017) Precise geometric error model based on z-axis motion platform of micro v-groove machine tools. Int J Adv Manuf Technol:1–6
Zhang X, Jiang L, Zeng Z, Fang F, Liu X (2015) High angular accuracy manufacture method of micro v-grooves based on tool alignment by on-machine measurement. Opt Express 23(21):27819–27828
Lin T, Lin M, Chao C (2017) A novel and rapid fabrication method for a high fill factor hexagonal microlens array using thermal reflow and repeating spin coating. Int J Adv Manuf Technol 92(1–8):3329–3336
Evans CJ, Bryan JB (1999) “Structured”, “textured” or “engineered” surfaces. CIRP Ann Manuf Technol 48(2):541–556
Purcell D, Suratkar A, Davies A, Farahi F, Ottevaere H, Thienpont H (2010) Interferometric technique for faceted microstructure metrology using an index matching liquid. Appl Opt 49(4):732–738
Li D, Cheung CF, Ren M, Zhou L, Zhao X (2014) Autostereoscopy-based three-dimensional on-machine measuring system for micro-structured surfaces. Opt Express 22(21):25635–25650
Li D, Cheung CF, Ren M, Whitehouse D, Zhao X (2015) Disparity pattern-based autostereoscopic 3D metrology system for in situ measurement of microstructured surfaces. Opt Lett 40(22):5271–5274
Gao F, Coupland J, Petzing J (2006) V-groove measurements using white light interferometry, in Photon06, Manchester, pp. 4–7
Singleton L, Leach R, Lewis A, Cui Z (2002) Report on the analysis of the MEMSTAND survey on Standardisation of MicroSystems Technology, MEMSTAND Project IST-2001-37682
Ju B, Chen Y, Zhang W, Fang F (2012) Rapid measurement of a high step microstructure with 90° steep sidewall. Rev Sci Inst 83(1):013706
Malacara D (2007) Optical shop testing Wiley
Tafti AP, Kirkpatrick AB, Alavi Z, Owen HA, Yu Z (2015) Recent advances in 3D SEM surface reconstruction. Micron 78:54–66
Jiang X, Wang K, Gao F, Muhamedsalih H (2010) Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise. Appl Opt 49(15):2903–2909
Muhamedsalih H, Gao F, Jiang X (2012) Comparison study of algorithms and accuracy in the wavelength scanning interferometry. Appl Opt 51(36):8854–8862
Takeda M, Yamamoto H (1994) Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large heights steps and/or spatially isolated surfaces. Appl Opt 33(34):7829–7837
Moschetti G, Forbes A, Leach RK, Jiang X, O’Connor D (2016) Phase and fringe order determination in wavelength scanning interferometry. Opt exp 24:8997–9012
Zhang T, Gao F, Muhamedsalih H, Lou S, Martin H, Jiang X (2018) Improvement of the fringe analysis algorithm for wavelength scanning interferometry based on filter parameter optimization. Appl Opt 57:2227–2234
MacAulay GD, Senin N, Giusca CL, Leach RK (2016) Study of manufacturing and measurement reproducibility on a laser textured structured surface. Meas 94:942–948
MacAulay GD, Senin N, Giusca CL, Leach RK (2014) Comparison of segmentation techniques to determine the geometric parameters of structured surfaces. Surf Topog: Metro Prop 2(4):044004
Fitzgibbon AW (2003) Robust registration of 2D and 3D point sets. Imag and Vis Comp 21(13–14):1145–1153
Funding
The study was funded by the UK’s Engineering and Physical Sciences Research Council (EPSRC) of the Center for Innovative Manufacturing in Advanced Metrology (EP/I033424/1) and the EPSRC Future Advanced Metrology Hub (EP/P006930/1).
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Zhang, T., Gao, F., Martin, H. et al. A method for inspecting near-right-angle V-groove surfaces based on dual-probe wavelength scanning interferometry. Int J Adv Manuf Technol 104, 1–7 (2019). https://doi.org/10.1007/s00170-018-2331-0
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DOI: https://doi.org/10.1007/s00170-018-2331-0