Abstract
This paper proposes a novel fabrication process based on femtosecond laser cutting and micro-electric resistance slip welding to address the bottleneck presented by ultraviolet–Lithographie, Galvanoformung, Abformung combined with micro-electroforming, in which micro-molds are usually fabricated with vertical wall structures. At first, 10-μm thick 0Cr18Ni9 stainless steel foils were cut by femtosecond laser to obtain several single-layer graphics which were then joined by micro-electric resistance slip welding. The slip welding process formed a 3D micro-structure and the weld zone of micro-structure was tested by the X-ray diffraction (XRD). The XRD results show that the phases of weld zone remain unchanged, but that the phase content slightly changes. Finally, a 3D metal micro-structure mold was processed under 110 mW femtosecond laser power, 0.1 mm/s cutting speed, 0.21 V welding voltage, 10 ms welding time, 0.2 MPa welding pressure, 0.5 mm bar electrode diameter, 160 time’s slip welding discharge, which proves that the forming process could be a useful method for the production of 3D micro-molds.
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Hirata Y (2003) LIGA process-micromachining technique using synchrotron radiation lithography and some industrial applications. Nucl Inst Methods Phys Res 208:21–26
Lermer F, Urban A (2003) Challenges, developments and applications of silicon deep reactive ion etching. Microelectron Eng 67–68:349–355
Wenmin Qu (1999) 3D-UV micro-forming: principles and application. Eng Sci Educ J 2:13–19
Lee D, Mekaru H, Hiroshima H (2010) 3D UV-microreplication using cylindrical PDMS mold. Microsyst Technol 16:1399–1411
Thian S, Tang Y, Fuh JYH, Wong YS, Loh HT, Lu L, Tee DZS (2006) Formation of micro-moulds via UV lithography of SU8 photoresist and nickel electrodeposition. J Eng Manufact 220:329–333
Guo Y, Liu G, Zhu X, Tian Y (2007) Analysis of the demolding forces during hot embossing. Microsyst Technol 13:411–415
Attia UM, Marson S, Alcock JR (2009) Micro-injection moulding of polymer microfluidic devices. Microfluid Nanofluid 7:1–28
Shiu PP, Knopf GK, Ostojic M (2010) Fabrication of metallic micro-molds by laser and electro-discharge micromachining. Microsyst Technol 16:477–485
Wang M-W (2010) Microceramic injection molding of a multilayer micropatterned micropart. Int J Adv Manuf Technol 51:145–153
Yan X-X, Liu J-Q, Shen X-C, Yang C-S (2012) Hollow metallic microneedles fabricated by combining bulk silicon micromachining and UV–LIGA technology. Microsyst Technol 18:37–42
Shyu RF, Yang H (2008) A promising thermal pressing used in fabricating microlens array. Int J Adv Manuf Technol 36:53–59
Chen RH, Chang CC, Cheng CM (2005) Fabricating a micromould insert using a novel process. Int J Adv Manuf Technol 25:678–684
Shiu P-P, George K, Knopf MO, Nikumb S (2012) Non-lithographic fabrication of metallic micromold masters by laser machining and welding. Int J Adv Manuf Technol 59:157–167
Chryssolouris G, Stavropoulos P, Tsoukantas G, Salonitis K, Stournaras A (2004) Nanomanufacturing processes: a critical review. Int J Mater Prod Technol 21(4):331–348
Shibata T, Takahashi Y, Kawashima T, Kubota T, Mita M, Mineta T, Makino E (2008) Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology. Microsyst Technol 14:1359–1365
Yoon YK, Park JH, Allen MG (2006) Multidirectional UV lithography for complex 3-D MEMS structures. J Microelectromech Syst 15(5):1121–1130
Li-qun D, Shun-pei M, Yu-sheng Z, Chong L (2010) Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology. Opt Precis Eng 18(2):363–368
Bin Xu, Xiaoyu Wu, Luo F, Chenlin Du, Sun X (2011) Research on the forming mechanism of micro-moulds based on laminated slip-welding of ultrathin stainless steel foils. Adv Mater Res 314–316:1818–1822
Bin Xu, Xiaoyu Wu, Ling S, Yi K, Luo F, Chenlin Du, Sun X (2011) Research on the micro-cutting of 0Cr18Ni9 stainless steel films by femtosecond laser. Appl Mech Mater 120:349–353
Anisimov SI, Kapeliovich BL, Perelman TL (1974) Electron emission from metal surfaces exposed to ultra-shortlaser pulses. Sov Phys JETP 39:375–377
Von Der Linde D, Sokolowski-Tinten K, Bialkowski J (1997) Laser-solid interaction in the femtosecond time regime. Appl Surf Sci 109–110:1–10
Rethfeld B, Von Der Sokolowski-Tinten K, Linde D, Anisimov SI (2004) Timescales in the response of materials to femtosecond laser excitation. Appl Phys A 79:767–769
Stavropoulos P, Stournaras A, Salonitis K, Chryssolouris G (2010) Experimental and theoretical investigation of the ablation mechanisms during femtosecond laser machining. Int J Nanomanufacturing 6:55–65
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Xu, B., Wu, Xy., Ling, Sq. et al. Fabrication of 3D metal micro-mold based on femtosecond laser cutting and micro-electric resistance slip welding. Int J Adv Manuf Technol 66, 601–609 (2013). https://doi.org/10.1007/s00170-012-4351-5
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DOI: https://doi.org/10.1007/s00170-012-4351-5