Abstract
The reaction mechanism for the pyrolysis of tertiarybutylphosphine (TBP) has been studied in an atmospheric pressure flow tube reactor using a time-of-flight mass spectrometer to analyze the gaseous products. D2 was used as the carrier gas in order to label the reaction products. The temperature and time dependence of TBP pyrolysis were investigated above a silica surface, which was found to have no effect on TBP decomposition. However, the pyrolysis rate and products are strongly dependent on the input TBP concentration, suggesting the TBP pyrolysis involves second order reactions. A simple free radical mechanism model is proposed which includes 4 major reactions:
C4H9PH2 = C4H9 + PH2
C4H9 + C4H9PH2 = C4H10 + C4H10 + C4H9PH
C4H9PH = C4H9 + PH
C4H9 = C4H8 + H.
Arrhenius parameters for these reactions are reported.
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Li, S.H., Larsen, C.A., Buchan, N.I. et al. Pyrolysis of tertiarybutylphosphine. J. Electron. Mater. 18, 457–464 (1989). https://doi.org/10.1007/BF02657995
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DOI: https://doi.org/10.1007/BF02657995