Abstract
The work function of 13 polycrystalline transition metal silicides was measured by photoemission in uhv. Their values are discussed in relationship to their Schottky barrier heights on n-Si. While there appears to be a weak correlation for a certain group of transition metal silicides, the values of the 5d-noble metal silicides including some of the lattice matched Ni silicides appear to be completely uncorrelated. Experimental values of work functions are compared to the values proposed previously by Freeouf.
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References
P.E. Schmid: Helv. Phys. Acta58, 371 (1985)
S. Krawczyk, P. Viktorovitch: Thin Solid Films111, 1 (1984)
R.H. Williams: Contemp. Phys.23, 329 (1982)
M. Schlüter: Thin Solid Films93, 3 (1982)
P.S. Ho: J. Vac. Sci. Technol. A1, 745 (1983)
J.M. Andrews, J.C. Phillips: Phys. Rev. Lett.35, 56 (1975)
For a review see: S.M. Sze:Physics of Semiconductor Devices, 2nd ed. (Wiley, New York 1981), Pt. III, Chap. 5
S.P. Murarka: J. Vac. Sci. Technol.17, 775 (1980)
S.P. Murarka: Mat. Lett.1, 26 (1982)
G. Ottaviani: J. Vac. Sci. Technol.16, 1112 (1979)
G. Ottaviani, K.N. Tu, J.W. Mayer: Phys. Rev. Lett.44, 284 (1980)
C.H.P. Lupis:Chemical Thermodynamics of Materials (Elsevier, Amsterdam 1983) Chap. VIII
A.R. Miedema: J. Less.-Common Met.46, 67 (1976)
A.R. Miedema, R. Boom, F.R. de Boer: J. Less-Common Met.41, 283 (1975)
A.M. Cowley, S.M. Sze: J. Appl. Phys.36, 3212 (1965)
B. Studer: Solid State Electron.23, 1181 (1980)
R.T. Tung: Phys. Rev. Lett.52, 461 (1984)
M. Liehr, P.E. Schmid, F.K. LeGoues, P.S. Ho: Phys. Rev. Lett.54, 2139 (1985)
R.T. Tung, J.M. Gibson: J. Vac. Sci. Technol. A3, 987 (1985)
J.S. Best, J.O. McCaldin: J. Vac. Sci. Technol.16, 1130 (1979)
S. Schulz: Diplomarbeit, Universität Konstanz (Februar 1984)
P. Munz, R. Schultheiss: Helv. Phys. Acta57, 769 (1984)
E. Bucher, P. Munz, M.Ch. Lux-Steiner, I. Frankowski: 1st Prog. Rept. to BMFT project 03E-8453A Universität Konstanz (Januar 1985) (unpublished)
E. Bucher, P. Munz, J. Hönigschmid, H.U. Finzel, U. Elrod, F. Greuter:Statusbericht, Sonnenenergie II (VDI-Verlag, Düsseldorf 1980) p. 1077
C.S. Petersson, J.E.E. Baglin, J.J. Dempsey, F.M. d'Heurle, S.J. La Placa: J. Appl. Phys.53, 4866 (1982)
T. Siegrist, F. Hulliger, G. Travaglini: J. Less-Common Met.92, 119 (1983)
H.B. Michaelson: J. Appl. Phys.48, 4729 (1977)
R.H. Fowler: Phys. Rev.38, 45 (1931)
J.L. Freeouf, G.W. Rubloff, P.S. Ho, T.S. Kuan: Phys. Rev. Lett.43, 1836 (1979)
J.L. Freeouf: Solid State Commun.33, 1059 (1980)
F. Herman, F. Casula, R.V. Kasowski: Physica B117/118, 837 (1983)
P.A. Tove: Surf. Sci.132, 336 (1983)
D. Donoval, L. Stolt, H. Norde, J. de Sousa Pires, P.A. Tove, C.S. Petersson: J. Appl. Phys.53, 5352 (1982)
D.V. Morgan, J. Frey: J. Appl. Phys.52, 5702 (1981)
C.H. Champness, A. Chan: J. Appl. Phys.57, 4823 (1985)
H.B. Michaelson: IBM J. Res. Devel.22, 72 (1978)
R.D. Thompson, K.N. Tu: Thin Solid Films93, 265 (1982)
M. Eizenberg, K.N. Tu: J. Appl. Phys.53, 6885 (1982)
P.S. Ho: J. Vac. Sci. Technol. A1, 745 (1983)
K.N. Tu, R.D. Thomson, B.Y. Tsaur: Appl. Phys. Lett.38, 626 (1981)
P.A. Psaras, R.D. Thomson, S.R. Herd, K.N. Tu: J. Appl. Phys.55, 3536 (1984)
G. Ottaviani, K.N. Tu, J.W. Mayer: Phys. Rev. B24, 3354 (1981)
H. Norde, J. de Sousa Pires, F. d'Heurle, F. Pesavento, S. Petersson, P.A. Tove: Appl. Phys. Lett.38, 865 (1981)
C.Y. Wei, W. Tantraporn, W. Katz, G. Smith: Thin Solid Films93, 407 (1982)
A.W. Searcy, L.N. Finnie: J. Am. Ceram. Soc.45, 268 (1962)
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Bucher, E., Schulz, S., Lux-Steiner, M.C. et al. Work function and barrier heights of transition metal silicides. Appl. Phys. A 40, 71–77 (1986). https://doi.org/10.1007/BF00616480
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DOI: https://doi.org/10.1007/BF00616480