Summary
For ellipsometry in the infrared range the advantages of Fourier-transform spectroscopy can be exploited when the experimental procedure is based on photometry. The measured intensities are interpretable in terms of the so-called ellipsometric parameters which describe the polarization state of the radiation after having been reflected from the sample. These parameters in turn are correlated with the optical constants of the sample such as the dielectric function or the complex refractive index as well as with its geometrical structure. The potential of spectroscopic infrared ellipsometry for the characterization of surfaces and surface films is demonstrated by examples including compounds with spectral intervals of strong absorption and assemblies of semiconductor films.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Born M, Wolf E (1964) Principles of Optics. Pergamon, New York
Azzam RMA, Bashara NM (1977) Ellipsometry and polarized light. North-Holland, Amsterdam New York Oxford
Röseler A (1990) Infrared spectroscopic ellipsometry. Akademie-Verlag, Berlin
Korte EH, Jordanov B, Kolev D, Tsankov D (1988) Appl Spectrosc 42:1394
Röseler A (1992) J Opt Soc Am A 9:1124
Berreman DW (1963) Phys Rev 130:2193
Weidner M, Röseler A (1992) Phys Stat Sol 130:115
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Röseler, A. Surface characterization by spectroscopic infrared ellipsometry. Fresenius J Anal Chem 346, 358–361 (1993). https://doi.org/10.1007/BF00321450
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF00321450