Abstract
Beat-like signal modulations in sputter depth profiles of multilayer structures are shown to enable an estimation and the optimization of the homogeneity of the sputter erosion process. Using W-Si multilayer structures of 69 doublelayers with a thickness of 40 Å, it is shown that the high-frequency mode (HFM) of electron-gas SNMS (e−-gas SNMS) for the analysis of insulators provides the same high depth resolution as the conventional direct-bombardment mode (DBM) of this technique.
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Bock, W., Kopnarski, M. & Oechsner, H. High resolution depth profiling of non-conducting samples with SNMS. Fresenius J Anal Chem 353, 510–513 (1995). https://doi.org/10.1007/BF00321312
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DOI: https://doi.org/10.1007/BF00321312