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Book Title: The Physics of Microfabrication
Authors: Ivor Brodie, Julius J. Muray
DOI: https://doi.org/10.1007/978-1-4899-2160-4
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1982
Hardcover ISBN: 978-0-306-40863-2Published: 31 May 1982
Softcover ISBN: 978-1-4899-2162-8Published: 26 June 2013
eBook ISBN: 978-1-4899-2160-4Published: 11 November 2013
Edition Number: 1
Number of Pages: XX, 504
Topics: Electrical Engineering, Optical and Electronic Materials