Abstract
Thermochemical treatments with N2-H2 and CH4 plasmas have led to nitrided and carburized layers1,2 on metal surfaces connected as a cathode of glow discharges at low gas pressures (1-10 Torr). The metal surface is surrounding by a cathode fall where plasma ions are accelerated to impinge cathode surfaces. Then positive ions as in N2 plasmas act to heat and partly to nitride the sample surface. To separate the two heating and nitriding processes, post-discharge treatments have been recently performed3 where active species are produced in flowing discharges and work pieces are settled downstream inside a separated heating device. First in this lecture spectroscopic emission of active species in Ar — N2 and Ar — CH4 flowing discharges is analysed. Emphasis is given on quantitative measurements using a titration method with NO for N and C atom densities in flowing post-discharges. Then correlations are given between active specie densities in the plasma flow and chemical composition and thickness of nitrided layers on steel surfaces. The effect of H2 molecules in N2 plasmas is specially discussed.
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References
J. P. Lebrun, H. Michel and M. Gantois, Mem. Sci. Rev. Métallurgie 69 727 (1972).
H. Michel, M. Foos and M. Gantois, Int. Conf. Ion Nitriding 117 (Cleveland 1986).
A. Ricard, A. Pilorget, H. Michel and M. Gantois, French Patent Appl. 87 10638 (1987). Europe Patent Appl. 88 4019 506 (1988).
A. Ricard, A. Besner, J. Hubert and M. Moisan et al., J. Phys. B21 L579 (1988).
H. Malvos, C. Chave, A. Ricard, H. Michel and M. Gantois., 2nd Int. Ion Nitriding/ Carburizing (Cincinnati 1989).
A. Ricard, M. Touzeau and M. Moisan, J. Physique 38 669 (1977).
A. Ricard, J. Tetreault and J. Hubert, J. Phys. B24 1115 (1991).
I. M. Campbell and B. A. Thrush, Proc. Roy. soc. A296 201 (1967).
H. Malvos, A. Ricard, M. Moisan and J. Hubert j. Physique 18 C5–C313 (1990).
L. G. Piper, J. Chem. Phys. 91 864 (1989).
L. G. Piper, J. Chem. Phys. 88 6911 (1988).
G. Marston, J. Phys. Chem. 93 5769 (1989).
J. Messing, Chem. Phys. 74 3874 (1981).
F. Mestley, NSRDS-NBS 67 (1980).
M. E. Fraser, D. A. Fee and R. S. Sheinson, Plasma Chem. and Plasma Process 5 163 (1985).
M. W. Slack, J. Chem. Phys. 64 228 (1975).
A. Ricard J. Oseguera, L. Falk, H. Michel., I. E. E. E. Trans. Plasma Sc. 18 940 (1990).
J. Loureiro. Xth ESCAMPIG, 30 (Orléans 1990)
H. Michel, M. Foos and M. Gantois, Proc. Int. Conf. Ion Nitriding 117 (Cleveland 1986).
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© 1992 Springer Science+Business Media New York
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Richard, A., Hubert, J., Michel, H. (1992). Correlations Between Active Plasma Species and Steel Surface Nitriding in Microwave Post-Discharge Reactors. In: Capitelli, M., Gorse, C. (eds) Plasma Technology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3400-6_9
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DOI: https://doi.org/10.1007/978-1-4615-3400-6_9
Publisher Name: Springer, Boston, MA
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