Abstract
Transport is stuff in motion. The stuff might be the molecules of a gas or liquid, or something carried by the gas molecules, such as energy or momentum. Transport of the stuff always involves the motion of something — usually molecules but sometimes photons or phonons.
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Further Reading
Useful Texts
Transport Phenomena, 2nd Edition, R. Byron Bird, Edwin N. Lightfoot, Warren E. Stewart, Wiley 2001 (ISBN 0-47-141077-2) (A classic, though a very different approach from that we have taken)
The Phenomena of Fluid Motions, Robert Brodkey, Dover 1995 (ISBN 0-486-68605-1)
Fundamentals of Statistical and Thermal Physics, F. Reif, McGraw-Hill 1965 (ISBN 07-051800-9)
Reactor Design
“Single Wafer Processing in Stagnation Point Flow CVD Reactor” Prospects, Constraints and Reactor Design” P. Gadgil, J. Elect. Mater. 22 171 (1993)
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© 2003 Springer Science+Business Media Dordrecht
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Dobkin, D.M., Zuraw, M.K. (2003). Mass Transport. In: Principles of Chemical Vapor Deposition. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-0369-7_3
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DOI: https://doi.org/10.1007/978-94-017-0369-7_3
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-6277-2
Online ISBN: 978-94-017-0369-7
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