Abstract
Arrays of silicon micromachined sensors for scanning force microscopy have been fabricated. Each single structure consists of a cantilever with an adjacent counter-electrode allowing a capacitive detection of the cantilever displacement. The cantilevers can also be individually actuated by applying controlled voltages. Electrostatic actuation in both static and dynamic modes are presented. In the static mode a cantilever displacement of typically 1 μm is obtained by applying a few tens of Volts. In the dynamic mode the cantilever resonant frequency is observed to decrease with increasing applied voltages. This corresponds to a lowering of the effective cantilever spring constant and demonstrates the possibility of a fine tuning of the cantilever/system compliance.
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© 1995 Springer Science+Business Media Dordrecht
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Blanc, N., Brugger, J., De Rooij, N.F. (1995). Electrostatically Actuated Silicon Micromachined Sensors for Scanning Force Microscopy. In: Güntherodt, H.J., Anselmetti, D., Meyer, E. (eds) Forces in Scanning Probe Methods. NATO ASI Series, vol 286. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0049-6_6
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DOI: https://doi.org/10.1007/978-94-011-0049-6_6
Publisher Name: Springer, Dordrecht
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