Skip to main content
SpringerLink
Log in

Reactions with Silicon

  • Chapter
W Tungsten

Part of the book series: Gmelin Handbook of Inorganic and Organometallic Chemistry - 8th Edition ((1058,volume W / A-B / A / 5 / b))

  • 254 Accesses

Abstract

The most recent, experimentally determined version of the phase diagram for the W-Si system is shown in Fig. 126. It is based on differential thermal analysis (DTA), X-ray, and microscopic studies as well as hardness measurements on W-Si alloy samples prepared by arc melting single-crystal Si with metal-ceramic (99.6% pure) or electron-beam-melted W [1]. However, the data points in the W rich region are consistently lower than the results of earlier investigations [2 to 9]. These results are the main basis of the assessed phase diagram in Fig. 127 from the recent review [10]. For previously reported phase diagrams and reviews see [11 to 22]. Thermochemical data and lattice stability values of the pure elements were coupled to compute a phase diagram for, and an analytical description of, the W-Si system [23]. A thermodynamic evaluation of the W-Si system was carried out using a one-lattice substitutional model to describe the Gibbs energy of the solution phases in the system. It was found that the phase diagram according to [1] could be represented by simple thermodynamic models and seemed to be consistent with the existing thermodynamic properties of the compounds, while the other set of phase diagram data presented great difficulties in this respect [24]; see also the table on p. 156. Second-order polynomial equations for the solidus and liquidus at the W-rich end of the phase diagram were derived from existing phase diagram data and measured equilibrium distribution coefficients [25].

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Kocherzhinskii, Yu. A.; Kulik, O. G.; Shishkin, E. A.; Yupko, L. M. (Dokl. Akad. Nauk SSSR, 212 [1973] 642–43;]

    CAS  Google Scholar 

  2. Kocherzhinskii, Yu. A.; Kulik, O. G.; Shishkin, E. A.; Yupko, L. M. Doklady Chem. [Engl. Transi.] 212 [1973] 782–4).

    Google Scholar 

  3. Brewer, L; Searcy, A. W.; Templeton, D. H.; Dauben, C. H. (J. Am. Ceram. Soc. 33 [1950] 291–4).

    Article  CAS  Google Scholar 

  4. Kieffer, R.; Benesovsky, F.; Gallistl, E. (Z. Metallk. 43 [1952] 284–91).

    CAS  Google Scholar 

  5. Blanchard, R.; Cueilleron, J. (C. R. Hebd. Seances Acad. Sci. 244 [1957] 1782–85).

    CAS  Google Scholar 

  6. Matyushenko, N. N.; Efimenko, L. N.; Solopikhin, D. P. (Fiz. Metal. Metalloved. 8 [1959] 878–80;

    CAS  Google Scholar 

  7. Matyushenko, N. N.; Efimenko, L. N.; Solopikhin, D. P. Phys. Met. Metallogr. [Engl. Transi.] 8 No. 6 [1959] 67–9).

    Google Scholar 

  8. Obrowski, W. (J. Inst. Metals 89 [1960–61] 79–80).

    Google Scholar 

  9. Efimenko, L. N.; Verkhorobin, L. F.; Matyushenko, N. N. (Izv. Akad. Nauk SSSR, Met. 1965 No. 4, 163–7; Russ. Metall. [Engl. Transi.] 1965 No. 4, 113–8).

    Google Scholar 

  10. Maksimov, V. A.; Shamrai, F. I. (Izv. Akad. Nauk SSSR, Neorg. Mater. 5 [1969] 1136–7;

    CAS  Google Scholar 

  11. Maksimov, V. A.; Shamrai, F. I. Inorg. Mater. [Engl. Transi.] 5 [1969] 965–6).

    Google Scholar 

  12. Zotov, Yu. P.; Kroshkina, N. N.; Bukharin, V. E. (Izv. Akad, Nauk SSSR, Neorg. Mater. 16 [1980] 842–5;

    CAS  Google Scholar 

  13. Zotov, Yu. P.; Kroshkina, N. N.; Bukharin, V. E. Inorg. Mater. [Engl. Transi.] 16 [1980] 584–7).

    Google Scholar 

  14. Naidu, S. V. N.; Sriramamurthy, A. M.; Rao, P. R. (J. Alloy Phase Diagrams 5 No. 3 [1989] 149–58).

    CAS  Google Scholar 

  15. Samsonov, V. G.; Umanskii, Ya. S. (Tverd. Soedin. Tugoplavkikh Metallov, Metallurgiz- dat, Moscow 1957, pp. 354–6).

    Google Scholar 

  16. Hansen, M.; Anderko, K. (Constitution of Binary Alloys, McGraw-Hill, New York 1958, pp. 1203–4).

    Google Scholar 

  17. Samsonov, G. V. (Silicides and Their Technical Uses, Izdat. Akad. Nauk Ukr. SSR, Kiev 1959, pp. 92–5).

    Google Scholar 

  18. Vol, A. E. (Structure and Properties of Binary Metal Systems, Fizmatgiz, Moscow 1962, pp. 409–14).

    Google Scholar 

  19. Elliott, R. P. (Constitution of Binary Alloys, 1st Suppl., McGraw-Hill, New York 1965, pp. 821–2).

    Google Scholar 

  20. Shunk, F. A. (Constitution of Binary Alloys, 2nd Suppl., McGraw-Hill, New York 1969, pp. 684–5).

    Google Scholar 

  21. Metals Handbook (Metallography, Structures, and Phase Diagrams, 8th Ed., Vol. 8, American Society for Metals, Metals Park, Ohio, 1973, pp. 335, 375).

    Google Scholar 

  22. Chart, T. G. (Met. Sci. 9 [1975] 504–9).

    Article  CAS  Google Scholar 

  23. Samsonov, G. I.; Vinitskii, I. M. (Handbook of Refractory Compounds, Plenum, New York 1980, 555 pp.).

    Book  Google Scholar 

  24. Raynor, G. V.; Rivlin, V. G. (Int. Met. Rev. 26 [1981] 213–49; C.A. 95 [1981] No. 193096).

    Article  CAS  Google Scholar 

  25. Murarka, S. P. (Silicides for VLSI Applications, Academic, New York 1983, 200 pp.).

    Google Scholar 

  26. Massalski, T. B. (Binary Alloy Phase Diagrams, American Society for Metals, Metals Park, Ohio, 1986, pp. 2062–3).

    Google Scholar 

  27. Kaufman, L. (CALPHAD: Comput. Coupling Phase Diagrams Thermochem. 3 No. 1 [1979] pp. 45–76, 45–6, 73–6).

    Article  Google Scholar 

  28. Vahlas, C; Chevalier, P. Y.; Blanquet, E. (CALPHAD: Comput. Coupling Phase Diagrams Thermochem. 13 [1989] 273–92).

    Article  CAS  Google Scholar 

  29. Drapala, J.; Kuchár, L. (Sb. Ved. Pr. Vys. Sk. Banské Ostrave, Rada Hutn. 29 [1983] 1–9; C.A. 101 [1984] No. 175933).

    CAS  Google Scholar 

  30. Gong, S. F.; Hentzell, H. T. G. (J. Appl. Phys. 68 [1990] 4542–9).

    Article  CAS  Google Scholar 

  31. Blokha, V. B.; Gladkikh, N. T.; Glushko, P. I.; Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S. (Izv. Akad. Nauk SSSR, Neorg. Mater. 18 [1982] 805–8;

    CAS  Google Scholar 

  32. Blokha, V. B.; Gladkikh, N. T.; Glushko, P. I.; Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S. Inorg. Mater. [Engl. Transi.] 18 [1982] 677–80).

    Google Scholar 

  33. Kocherzhinskii, Yu. A.; Kulik, O. G.; Shishkin, E. A.; Yupko, I. M. (Therm. Anal. Proc. 4th Int. Conf., Budapest 1974 [1975], Vol. 1, pp. 425–32; C.A. 87 [1977] No. 29813).

    Google Scholar 

  34. Grinthal, R. D. (J. Electrochem. Soc. 107 [1960] 59–61).

    Article  Google Scholar 

  35. Beaver, W.; Stonehouse, A. J.; Paine, R. M. (Plansee Proc. 5th Seminar, Reutte–Tyrol 1964 [1965], pp. 682–700).

    Google Scholar 

  36. Parthé, E.; Schachner, H.; Nowotny, H. (Monatsh. Chem. 86 [1955] 182–5).

    Article  Google Scholar 

  37. Aronsson, B. (Acta Chem. Scand. 9 [1955] 137–40).

    Article  CAS  Google Scholar 

  38. Lahav, A.; Wu, C. S.; Baiocchi, F. A.; Sheng, T. T. (Semicond.-Based Heterostruct.: Interfacial Struct. Stab., Proc. Northeast Reg. Meet. Metall. Soc. 1986 147–54; C.A. 107 [1987] No. 68423).

    Google Scholar 

  39. Thomas, R. E.; Perepezko, J. H.; Wiley, J. D. (Appl. Surf. Sci. 26 [1986] 534–41).

    Article  CAS  Google Scholar 

  40. Ottaviani, G.; Tu, K. N.; Mayer, J. W. (Phys. Rev. Lett. 44 [1980] 284–7).

    Article  CAS  Google Scholar 

  41. Verkhorobin, L. F.; Ivanov, V. E.; Matyushenko, N. N.; Nechiporenko, E. P.; Pagachev, N. S.; Somov, A. I. (Fiz. Metal. Metalloved. 13 [1962] 77–81;

    CAS  Google Scholar 

  42. Verkhorobin, L. F.; Ivanov, V. E.; Matyushenko, N. N.; Nechiporenko, E. P.; Pagachev, N. S.; Somov, A. I. Phys. Met. Metallogr. [Engl. Transi.] 13 [1962] 67–71).

    Google Scholar 

  43. Murarka, S. P.; Read, M. H.; Doherty, C. J.; Fraser, D. B. (J. Electrochem. Soc. 129 [1982] 293–301).

    Article  CAS  Google Scholar 

  44. Nowotny, H.; Brukl, C; Benesovsky, F. (Monatsh. Chem. 92 [1961] 116–27).

    Article  Google Scholar 

  45. Bayerl, P.; Eichinger, P. (RS 03–75, Institut f. Festkörpertechnologie, München 1975).

    Google Scholar 

  46. Eichinger, P.; Sauermann, H.; Wahl, M. (Ion Beam Surf. Layer Anal. [Proc. Int. Conf.] 1975 [1976], Vol. 1, pp. 353–62; C.A. 86 [1977] No. 181578).

    Google Scholar 

  47. Kornilov, L.L.; Matveeva, N. M.; Pryakhina, D. I.; Polyakova, R. S. (Metallokhim. Svoistva Elementov Period. Systemy (Metal-chemical Properties of the Elements of the Periodic System) Izd. Nauk, Moscow 1966; C.A. 68 [1968] No. 16365).

    Google Scholar 

  48. Zibuts, Yu. A.; Paritskii, L. G.; Ryvkin, S. M. (Fiz. Tverd. Tela 5 [1964] 3301–4;

    Google Scholar 

  49. Zibuts, Yu. A.; Paritskii, L. G.; Ryvkin, S. M. Soviet Phys. Solid State 5 [1964] 2416–9).

    Google Scholar 

  50. Wada, T.; Takeda, M. (Nagoya Kogyo Daigaku Gakuho 36 [1985] 113–25; C.A. 104 [1986] No. 160090).

    Google Scholar 

  51. Fistul, V. I.; Shmugurov, V. A. (Fiz. Tekh. Poluprovodn. [Leningrad] 23 [1989] 688–92; C.A. 111 [1989] No. 84826).

    CAS  Google Scholar 

  52. Borders, J. A.; Sweet, J. N. (Appl. Ion Beams Met. Int. Conf., Albuquerque 1973 [1974], pp. 179–91; C.A. 82 [1975] No. 103761).

    Book  Google Scholar 

  53. Gelain, C; Cassuto, A.; LeGoff, P. (Bull Soc. Fr. Ceram. 80 [1968] 23–7).

    Google Scholar 

  54. Efimov, Yu. V.; Frolova, T. M.; Bodak, O. I.; Kharchenko, O. I. (Izv. Akad. Nauk SSSR, Neorg. Mater. 20 [1984] 1593–5;

    CAS  Google Scholar 

  55. Efimov, Yu. V.; Frolova, T. M.; Bodak, O. I.; Kharchenko, O. I. Inorg. Mater. [Engl. Transi.] 20 [1984] 1374–6).

    Google Scholar 

  56. Neverov, V. V.; Burov, V. N. (Izv. Sib. Otd. Akad. Náuk SSSR Ser. Khim. Nauk 1979 No. 4, pp. 3–8; C.A. 91 [1979] No. 203612).

    Google Scholar 

  57. Zmii, V. I.; Seryugina, A. S. (Zashch. Pokrytiya Met. No. 2 [1968] 195–201 ; Prot. Coat. Met. [Engl. Transi.] No. 2 [1970] 158–63).

    Google Scholar 

  58. Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S.; Semenov, N. A. (Izv. Akad. Nauk SSSR Neorg. Mater. 17 [1981] 916–7;

    CAS  Google Scholar 

  59. Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S.; Semenov, N. A. Inorg. Mater. [Engl. Transi.] 17 [1981] 654–5).

    Google Scholar 

  60. Bogdanov, E. I.; Larikov, L. N.; Maksimenko, E. A. (Metallofizika Akad. Nauk Ukr. SSR Otd. Fiz. Astron. 10 No. 2 [1988] 116–8; C.A. 109 [1988] No. 41996).

    CAS  Google Scholar 

  61. Popov, V. S.; Khoklov, V. P.; Alimov, S. A.; Titukh, Yu. I.; Noga, N. A.; Romanovskii, V. F. (Zharostoikie Pokrytiya Zashch. Konstr. Mater. Tr. 7th Soveshch., Kalinin 1975 [1977], pp. 184–8; C.A. 88 [1978] No. 175345).

    Google Scholar 

  62. Zmii, V. I. (Zashch. Pokrytiya Met. No. 11 [1977] 14–8; C.A. 88 [1978] No. 10746).

    Google Scholar 

  63. Bartlett, R. W.; Gage, P. R. (ASD-TDR-63–753 — Pt. II [1964] 136 pp., 5–48,124–7; N.S.A. 19 [1965] No. 7848).

    Google Scholar 

  64. Gage, P. R.; Bartlett, R. W. (Trans. Met. Soc. AIME 233 [1965] 832–4).

    CAS  Google Scholar 

  65. Baglin, J.; Dempsey, J.; Hammer, W.; D’Heurle, F.; Petersson, S.; Serrano, C. (J. Electron. Mater. 8 [1979] 641–61).

    Article  CAS  Google Scholar 

  66. Verkhorobin, L. F.; Ivanov, V. E.; Matyushenko, N. N.; Nechiporenko, E. P.; Pagachev, N. S.; Somov, A. I. (Fiz. Met. Metalloved. 13 [1962] 77–81;

    CAS  Google Scholar 

  67. Verkhorobin, L. F.; Ivanov, V. E.; Matyushenko, N. N.; Nechiporenko, E. P.; Pagachev, N. S.; Somov, A. I. Phys. Met. Metallogr. [Engl. Transi.] 13 [1962] 67–71).

    Google Scholar 

  68. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. (Izv. Akad. Náuk SSSR Neorg. Mater. 17 [1981] 644–6;

    CAS  Google Scholar 

  69. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. Inorg. Mater. [Engl. Transi.] 17 [1981] 427–9).

    Google Scholar 

  70. Zmii, V. I.; Efimenko, L. N.; Poltavtsev, N. S.; Snezhko, I. A. (Zashch. Met. 20 No. 1 [1984] 141–3;

    CAS  Google Scholar 

  71. Zmii, V. I.; Efimenko, L. N.; Poltavtsev, N. S.; Snezhko, I. A. Prot. Met. [Engl. Transi.] 20 [1984] 123–4).

    Google Scholar 

  72. Poltavtsev, N. S.; Zmii, V. L; Snezhko, I. A. (Izv. Akad. Nauk SSSR Neorg. Mater. 16 [1980] 674–7;

    CAS  Google Scholar 

  73. Poltavtsev, N. S.; Zmii, V. L; Snezhko, I. A. Inorg. Mater. [Engl. Transi.] 16 [1980] 464–6).

    Google Scholar 

  74. Goetzel, C. G.; Landler, P. (WADD-TR-60–825; AD-258574 [1960] 1–42; N.S.A. 15 [1961] No. 23986).

    Google Scholar 

  75. Nolting, H. I.; Jeffreys, R. A. (N 63–21802; ASD-TDR-63–459 [1963] 1–140, 23,121; C. A. 60 [1964] 6560).

    Google Scholar 

  76. Zotov, Yu. P.; Davydova, A. D.; Kroshkina, N. N.; Gorlov, V. I.; Ablogin, M. I. (Izv. Akad. Náuk SSSR Neorg. Mater. 14 [1978] 879–83;

    CAS  Google Scholar 

  77. Zotov, Yu. P.; Davydova, A. D.; Kroshkina, N. N.; Gorlov, V. I.; Ablogin, M. I. Inorg. Mater. [Engl. Transi.] 14 [1978] 688–92).

    Google Scholar 

  78. Goetzel, C. G.; Landler, P. (Planseeber. Pulvermet. 9 [1961] 36–8).

    CAS  Google Scholar 

  79. Burykina, A. L.; Dyadykevich, Yu. V.; Sosnovskii, L. A.; Epik, A. P.; Gorskii, V. V. (Izv. Akad. Náuk SSSR Met. 1975 No. 1, pp. 153–7; Russ. Metall. [Engl. Transi.] 1975 No. 1, pp. 126–9).

    Google Scholar 

  80. Samsonov, G. V.; Solonnikova, L. A. (Fiz. Met. Metalloved. 5 [1957] 565–6;

    CAS  Google Scholar 

  81. Samsonov, G. V.; Solonnikova, L. A. Phys. Met. Metallogr. [Engl. Transi.] 5 No. 3 [1957] 177; C.A. 1958 19804).

    Google Scholar 

  82. Bartlett, R. W.; Gage, P. R.; Larssen, P. A. (Trans. Metall. Soc. AIME 230 [1964] 1528–34).

    CAS  Google Scholar 

  83. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. (Izv. Akad. Nauk SSSR Neorg. Mater. 13 [1977] 1896–7;

    CAS  Google Scholar 

  84. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. Inorg. Mater. [Engl. Transi.] 13 [1977] 1525–6).

    Google Scholar 

  85. Nicki, J. J.; Koukoussas, J. D. (J. Less-Common Met. 23 [1971] 73–81).

    Article  Google Scholar 

  86. Sosnovskii, L. A.; Saplina, G. S. (Zashch. Pokrytiya Met. No. 19 [1985] 3–5; C.A. 104 [1986] No. 134172).

    Google Scholar 

  87. Dzyadykevich, Yu. V. (Izv. Akad. Nauk SSSR Met. 1977 No. 3, pp. 182–7; Russ. Metali. [Engl. Transi.] 1977 No. 3, pp. 156–60).

    Google Scholar 

  88. Maas, J. H.; Rieck, G. D. (High Temp. High Pressures 10 No. 3 [1978] 297–304).

    CAS  Google Scholar 

  89. Zmii, V. I. (Fiz. Khim. Obrab. Mater. 1986 No. 3, pp. 96–101 ; C.A. 105 [1986] No. 83544).

    Google Scholar 

  90. Matteazzi, P. (Ceramurgia 20 No. 6 [1990] 227–33; C.A. 115 [1991] No. 55173).

    CAS  Google Scholar 

  91. Matteazzi, P.; LeCaer, G.; Bauer-Grosse, E. (Mater. Sci. Monogr. B 66 [1991] 793–802; C.A. 115 [1991] No. 261793).

    Google Scholar 

  92. Kyono, L; Sugano, M.; Nagase, R.; Hosaka, K.; Kato, A. (Jpn. Kokai Tokkyo Koho 62–171911 [87–171911] [1986–1987] 5 pp.; C.A. 107 [1987] No. 157691).

    Google Scholar 

  93. Sasahara, T.; Someno, M.; Nagasaki, H. (Nippon Kinzoku Gakkaishi 23 [1959] 30–4; C.A. 60 [1964] 3711).

    CAS  Google Scholar 

  94. Samsonov, G. V.; Kovalchenko, M. S.; Verkhoglyadova, T. S. (Zh. Neorg. Khim. 4 [1959] 2759–65;

    CAS  Google Scholar 

  95. Samsonov, G. V.; Kovalchenko, M. S.; Verkhoglyadova, T. S. Russ. J. Inorg. Chem. [Engl. Transi.] 4 [1959] 1276–9).

    Google Scholar 

  96. Sawada, S.; Kuroki, M.; Kanano, O. (Jpn. Kokai Tokkyo Koho 63–179028 [88–179028] [1987–88] 5 pp.; C.A. 109 [1988] No. 214764).

    Google Scholar 

  97. Kostikov, V. I.; Levin, N. P.; Levin, V. Ya. (Izv. Akad. Nauk SSSR Neorg. Mater. 5 [1969] 152–4;

    CAS  Google Scholar 

  98. Kostikov, V. I.; Levin, N. P.; Levin, V. Ya. Inorg. Mater. [Engl. Transi.] 5 [1969] 123–6).

    Google Scholar 

  99. Ilyushchenko, N. G.; Anfinogenov, A. I.; Belyaeva, G. I.; Plotnikova, A. F.; Kornilov, N. I. (Zharostoikie Teplostoikie Pokrytiya Tr. 4th Vses. Soveshch., Leningrad 1968 [1969], pp. 105–20; C.A. 72 [1970] No. 103156).

    Google Scholar 

  100. Belyaeva, G. I.; Anfinogenov, A. I.; Plotnikova, A. F.; Ilyushchenko, N. G. (Tr. Inst. Elektrokhim. Ural. Nauchn. Tsentr Akad. Nauk SSSR No. 26 [1978] 40–2; C.A. 92 [1980] No. 133460).

    Google Scholar 

  101. Cook, N. C (U.S. 3024177 [1959–62]; C.A. 56 [1962] 15292).

    Google Scholar 

  102. Dzyadykevich, Yu. V.; Medyukh, R. M.; Gorskii, V. V.; Iofan, A. A.; Starodubtsev, Yu. Ya.; Reznikov, V. S. (Izv. Akad. Nauk SSSR Met. 1980 No. 4, pp. 203–6; C.A. 93 [1980] No. 136291).

    Google Scholar 

  103. Obukhov, A. P.; Gurin, V. N.; Kozlova, I. R.; Terent’eva, Z. P.; Mazina, T. I. (Izv. Akad. Nauk SSSR Neorg. Mater. 4 [1968] 527–31 ;

    CAS  Google Scholar 

  104. Obukhov, A. P.; Gurin, V. N.; Kozlova, I. R.; Terent’eva, Z. P.; Mazina, T. I. Inorg. Mater. [Engl. Transi.] 4 [1968] 452–5).

    Google Scholar 

  105. Anfinogenov, A. I.; Ilyushchenko, N. G.; Belyaeva, G. I.; Finkelshtein, S. D. (Tr. Inst. Elektrokhim. Ural. Fil. Akad. Nauk SSSR 1968 No. 11, pp. 67–71; Electrochem. Molten Solid Electrolytes 8 [1970] 51–5).

    Google Scholar 

  106. Zmii, V. I.; Kovtun, N. V.; Matyukhina, L. G. (Poverkhnost 1989 No. 8, pp. 148–53; C.A. 111 [1989] No. 199747).

    Google Scholar 

  107. Tsirlin, M. S.; Bakhtina, I. P. (Izv. Akad. Nauk SSSR Met. 1989 No. 2, pp. 141–5; C.A. 110 [1989] No. 217367).

    Google Scholar 

  108. Ivanov, V. E.; Nechiporenko, E. P.; Krivoruchko, V. M.; Mitrofanov, A. S. (Fiz. Met. Metalloved. 17 [1964] 862–5;

    CAS  Google Scholar 

  109. Ivanov, V. E.; Nechiporenko, E. P.; Krivoruchko, V. M.; Mitrofanov, A. S. Phys. Met. Metallogr. [Engl. Transi.] 17 No. 6 [1964] 62–5).

    Google Scholar 

  110. Ivanov, V. E.; Nechiporenko, E. P.; Zmii, V. I.; Krivoruchko, V. M. (in: Samsonov, G. V.; Diffusion Cladding of Metals, Naukova Dumka, Kiev 1965, pp. 29–35).

    Google Scholar 

  111. Prokoshkin, D. A.; Arzamosov, B. N.; Ryabchenko, E. V. (in: Samsonov, G. V.; Diffusion Cladding of Metals, Naukova Dumka, Kiev 1965, pp. 25–8).

    Google Scholar 

  112. Kuznetsov, G. M.; Latysheva, Z. R. (Izv. Vyssh. Uchebn. Zaved. Tsvetn. Metall. 1968 No. 5, pp. 92–5; C.A. 70 [1969] No. 31269).

    Google Scholar 

  113. Fenochka, B. V.; Gordienko, S. P.; Sosnovskii, L. A. (Zashch. Pokrytiya Met. No. 24 [1990] 11–4; C.A. 114 [1991] No. 211923).

    Google Scholar 

  114. Tsirlin, M. S.; Zakharova, L. I. (Zashch. Pokrytiya Met. No. 15 [1981] 3–6; C.A. 96 [1982] No. 221 757).

    Google Scholar 

  115. Weng, S. L. (Phys. Rev. B Condens. Matter 29 [1984] 2363–5).

    Article  CAS  Google Scholar 

  116. Goetzel, C. G.; Venkatesan, P. S.; Bunshah, R. F. (WADC-TR-59–405 [1960] 57 pp.; N.S.A. 14 [1960] No. 15024).

    Google Scholar 

  117. Cabrera, A. L.; Kirner, J. F.; Miller, R. A.; Pierantozzi, R.; Armor, J. N. (U.S. 4822642 [1985–89] 15 pp.; C.A. 111 [1989] No. 158757).

    Google Scholar 

  118. Bomchil, G.; Goeltz, G.; Torres, J. (Thin Solid Films 140 [1986] 59–70).

    Article  CAS  Google Scholar 

  119. Bevolo, A. J.; Schmidt, F. A.; Shanks, H. R.; Campisi, G. J. (J. Vac. Sci. Technol. 16 [1979] 13–9).

    Article  CAS  Google Scholar 

  120. Campisi, G. J.; Bevolo, A. J.; Shanks, H. R.; Schmidt, F. A. (J. Appl. Phys. 53 [1982] 1714–9).

    Article  CAS  Google Scholar 

  121. Racette, G. W.; Frost, R. T. (J. Cryst. Growth 47 [1979] 384–8).

    Article  CAS  Google Scholar 

  122. Boiko, B. A.; Gorodetskii, D. A.; Yas’ko, A. A. (Fiz. Tverd. Tela [Leningrad] 15 [1973] 3145–53;

    CAS  Google Scholar 

  123. Boiko, B. A.; Gorodetskii, D. A.; Yas’ko, A. A. Sov. Phys. Solid State [Engl. Transi.] 15 [1974] 2101–6).

    Google Scholar 

  124. Swenson, O. F.; Sinha, M. K. (J. Vac. Sci. Technol. 9 [1972] 942–6).

    Article  CAS  Google Scholar 

  125. Janssen, A. P.; Jones, J. P. (Surf. Sci. 41 [1974] 257–76).

    Article  CAS  Google Scholar 

  126. Janssen, A. P.; Jones, J. P. (Thin Solid Films 28 [1975] L25–L28).

    Article  CAS  Google Scholar 

  127. Nishikawa, O.; Tsunashima, Y.; Nomura, E.; Hone, S.; Wada, M.; Shibata, M.; Yoshimura, T.; Uemori, R. (J. Vac. Sci. Technol. B 1 [1983] 6–9).

    Article  CAS  Google Scholar 

  128. Nishikawa, O.; Tsunashima, Y.; Nomura, E.; Wada, M.; Horie, S.; Shibata, M.; Yoshimura, T.; Uemori, R. (Surf. Sci. 126 [1983] 529–33).

    Article  CAS  Google Scholar 

  129. Tsong, T. T.; Wang, S. C; Liu, F. H.; Cheng, H.; Ahmad, M. (J. Vac. Sci. Technol. B 1 [1983] 915–22).

    Article  CAS  Google Scholar 

  130. Tsong, T. T. (Nucl. Instrum. Methods Phys. Res. 218 [1983] 383–90).

    Article  CAS  Google Scholar 

  131. Tsong, T. T. (Mater. Res. Soc. Symp. Proc. 25 [1984] 363–74; C.A. 101 [1984] No. 101342).

    Article  CAS  Google Scholar 

  132. Wrigley, J. D.; Ehrlich, G. (Mater. Res. Soc. Symp. Proc. 48 [1985] 47–53; C.A. 104 [1986] No. 24710).

    Article  CAS  Google Scholar 

  133. Ageev, V. N.; Afanas’eva, E. Yu.; Gali, N. R.; Mikhailov, S. N.; Rutkov, E. V.; Tontegode, A. (Pis’ma Zh. Tekh. Fiz. 12 No. 9 [1986] 565–70; C.A. 105 [1986] No. 30609).

    CAS  Google Scholar 

  134. Ageev, V. N.; Afanas’eva, E. Yu.; Gali, N. R.; Mikhailov, S. N.; Rutkov, E. V.; Tontegode, A. Ya. (Poverkhnost 1987 No. 5, pp. 7–14; C.A. 107 [1987] No. 13357).

    Google Scholar 

  135. Ageev, V. N.; Afanas’eva, E. Yu. (Poverkhnost 1987 No. 7, pp. 30–7; C.A. 107 [1987] No. 103418).

    Google Scholar 

  136. Ageev, V. N.; Gomoyunova, M. V.; Pronin, L I.; Khoruzhii, S. V. (Poverkhnost 1988 No. 5, pp. 57–63; C.A. 109 [1988] No. 80304).

    Google Scholar 

  137. Ageev, V. N.; Gomoyunova, M. V.; Grigor’ev, A. K.; Pronin, I. I.; Rodnyanskii, A. E. (Poverkhnost 1990 No. 8, pp. 88–93; C.A. 113 [1990] No. 139404).

    Google Scholar 

  138. Deneuville, A. (Ann. Chim. [Paris] [15] 11 [1986] 603–13).

    Google Scholar 

  139. Murarka, S. P. (Ann. Rev. Mater. Sci. 13 [1983] 117–37; C.A. 99 [1983] No. 114117).

    Article  CAS  Google Scholar 

  140. Pauleau, Y. (Thin Solid Films 122 [1984] 243–58).

    Article  CAS  Google Scholar 

  141. Eichinger, P.; Sauermann, H.; Wahl, M. (Ion Beam Surf. Layer Anal. Proc. Int. Conf., Karlsruhe, FRG, 1975 [1976], Vol. 1, pp. 353–62; C.A. 86 [1977] No. 181578).

    Google Scholar 

  142. Sauermann, H.; Wahl, M. (Valvo Ber. 20 No. 2 [1977] 62–80).

    Google Scholar 

  143. Kamins, T. I.; Laderman, S. S.; Coulman, D. J.; Turner, J. E. (J. Electrochem. Soc. 133 [1986] 1438–42).

    Article  CAS  Google Scholar 

  144. Janssen, A. P.; Jones, J. P. (Thin Solid Films 28 [1975] L25–L28).

    Article  CAS  Google Scholar 

  145. Green, M. L.; Levy, R. A. (J. Electrochem. Soc. 132 [1985] 1243–50).

    Article  CAS  Google Scholar 

  146. Pauleau, Y.; Lami, P.; Tissier, A.; Pantel, R.; Oberlin, J. C (Thin Solid Films 143 [1986] 259–67).

    Article  CAS  Google Scholar 

  147. Pauleau, Y.; Dassapa, F. C; Lami, P.; Oberlin, J. C; Romagna, F. (J. Vac. Sci. Technol. B 6 [1988] 817–24; C.A. 109 [1988] No. 120521).

    Article  CAS  Google Scholar 

  148. Pauleau, Y.; Dassapa, F. C; Lami, P.; Oberlin, J. C; Romagna, F. (J. Mater. Res. 4 [1989] 156–62).

    Article  CAS  Google Scholar 

  149. Zhang, S. L.; Buchta, R.; Oestling, M. (Mater. Res. Soc. Symp. Proc. 168 [1990] 173–8; C.A. 113 [1990] No. 101775).

    Article  CAS  Google Scholar 

  150. Oertel, B. (Wiss. Z.-Tech. Hochsch. Ilmenau 25 No. 6 [1979] 151–6; C.A. 91 [1979] No. 150120).

    CAS  Google Scholar 

  151. Oertel, B.; Sperling, R. (Thin Solid Films 37 [1976] 185–94).

    Article  CAS  Google Scholar 

  152. Oertel, B.; Kurze, H. J.; Haueisen, H. (Thin Solid Films 52 [1978] 129–35).

    Article  CAS  Google Scholar 

  153. Smith, P. M.; Thompson, M. O. (Tungsten Other Adv. Met. VLSI–ULSI Appl. 5, Proc. 6th Workshop, San Mateo, Calif, and Tokyo 1989 [1990], pp. 311–6; C.A. 113 [1990] No. 156755).

    Google Scholar 

  154. Lajzerowicz, J. (ENST-86E017 [1986], ETN-87–90290 [1987] 165 pp.; C.A. 108 [1988] No. 196501).

    Google Scholar 

  155. Cros, A.; Pierrisnard, R.; Pierre, F.; Layet, J. M.; Meyer, F. (Appl. Surf. Sci. 38 [1989] 148–55).

    Article  CAS  Google Scholar 

  156. Cros, A.; Pierrisnard, R.; Pierre, F.; Layet, J. M.; Meyer, F. (Appl. Phys. Lett. 55 [1989] 226–8).

    Article  CAS  Google Scholar 

  157. Azizan, M.; Nguyen Tan, T. A.; Cinti, R.; Baptist, R.; Chauvet, G. (Surf. Sci. 178 [1986] 17–26).

    Article  CAS  Google Scholar 

  158. Locker, L. D.; Capio, C. D. (J. Appl. Phys. 44 [1973] 4366–9).

    Article  CAS  Google Scholar 

  159. Murarka, S. P.; Read, M. H.; Doherty, C. J.; Fraser, D. B. (J. Electrochem. Soc. 129 [1982] 293–301).

    Article  CAS  Google Scholar 

  160. Santiago-Aviles, J. J. (ARO-22681.8-MS-H [1988] 10 pp.; C. A. 111 [1989] No. 200426).

    Google Scholar 

  161. Siegal, M. P.; Santiago, J. J. (J. Appl. Phys. 63 [1988] 525–9).

    Article  CAS  Google Scholar 

  162. Siegal, M.; Santiago, J. J.; Van der Spiegel, J.; Graham, W. R.; Setton, M. (Mater. Res. Soc. Symp. Proc. 74 [1987] 673–8; C.A. 107 [1987] No. 166535).

    Article  CAS  Google Scholar 

  163. Ting, C. Y.; Davari, B. (Appl. Surf. Sci. 38 [1989] 416–28).

    Article  CAS  Google Scholar 

  164. Torres, J.; Pelissier, A.; Perio, A.; Oberlin, J. C; Bomchil, G. (Vide Couches Minces 42 No. 236 [1987] 91–3).

    CAS  Google Scholar 

  165. Martin, T. L.; Malhotra, V.; Mahan, J. E. (J. Electron. Mater. 13 [1984] 309–25; C.A. 100 [1984] No. 149074).

    Article  CAS  Google Scholar 

  166. Meyer, F.; Schwebel, C; Pellet, C; Gautherin, G. (Appl. Surf. Sci. 36 [1989] 231–9; C.A. 110 [1989] No. 125839).

    Article  Google Scholar 

  167. Khaidar, M.; Essafti, A.; Bennouna, A.; Ameziane, E. L.; Brunei, M. (J. Appl. Phys. 65 [1989] 3248–52).

    Article  CAS  Google Scholar 

  168. Siegal, M. P.; Santiago, J. J. (J. Appl. Phys. 65 [1989] 760–6).

    Article  CAS  Google Scholar 

  169. Paine, D. C; Bravman, J. C; Saraswat, K. (Tungsten Other Refract. Met. VLSI Appl. Proc. Workshop, Albuquerque 1984–1985 [1986], pp. 117–23; C.A. 106 [1987] No. 144664).

    Google Scholar 

  170. Shioya, Y.; Ikegami, K.; Maeda, M.; Yanagida, K. (J. Appl. Phys. 61 [1987] 561–6).

    Article  CAS  Google Scholar 

  171. Delfino, M.; Lehrer, W. I. (J. Electrochem. Soc. 128 [1981] 1071–4).

    Article  CAS  Google Scholar 

  172. Whitlow, H. J.; Eriksson, T.; Ötling, M.; Petersson, C. S.; Keinonen, J.; Anttila, A. (Appl. Phys. Lett. 50 [1987] 1497–9).

    Article  CAS  Google Scholar 

  173. Shenai, K.; Lewis, N.; Smith, G. A.; McConnell, M. D.; Burrell, M. (Tungsten Other Adv. Met. VLSI–ULSI Appl. 5 Proc. 6th Workshop, San Mateo, Calif, and Tokyo 1989 [1990], pp. 317–24; C.A. 113 [1990] No. 156756).

    Google Scholar 

  174. Carlisle, J. A.; Chopra, D. R.; Dillingham, T. R.; Gnade, B.; Smith, G. (J. Appl. Phys. 65 [1989] 2313–20).

    Article  CAS  Google Scholar 

  175. Zhang, S. L; Buchta, R.; Oestling, M. (J. Mater. Res. 6 [1991] 1886–91).

    Article  CAS  Google Scholar 

  176. Zhang, S. L; Smith, U.; Buchta, R.; Oestling, M. (J. Appl. Phys. 69 [1991] 213–9).

    Article  CAS  Google Scholar 

  177. Thomas, O.; Charai, A.; D’Heurle, F. M.; Finstad, T. G.; Joshi, R. V. (Thin Solid Films 171 [1989] 343–57).

    Article  CAS  Google Scholar 

  178. Suguro, K.; Nakasaki, Y.; Shima, S.; Yoshi, T.; Moriya, T.; Tango, H. (J. Appl. Phys. 62 [1987] 1265–73).

    Article  CAS  Google Scholar 

  179. Eriksson, T.; Carlsson, J. O.; Keinonen, J.; Petersson, C. S. (J. Appl. Phys. 64 [1988] 3229–32).

    Article  CAS  Google Scholar 

  180. Schmitz, J. E. J.; Buiting, M. J.; Ellwanger, R. C. (Tungsten Other Refract. Met. VLSI Appl. 4 Proc. Workshop, Albuquerque 1988 [1989], pp. 27–33; C.A. 111 [1989] No. 199720).

    Google Scholar 

  181. Morosanu, C.-E.; Soltuz, V. (Thin Solid Films 52 [1978] 181–94).

    Article  CAS  Google Scholar 

  182. Van der Jeugd, C. A.; Janssen, G. C. A. M.; Radelaar, S.; Buiting, M. J.; Wolters, R. A. M. (Tungsten Other Adv. Met. ULSI Appl. 1990 Proc. 7th Workshop, Dallas 1990 [1991], pp. 137–41; C.A. 115 [1991] No. 140465).

    Google Scholar 

  183. Ma, E.; Alvi, N. S.; Hamdi, A. H.; Nicolet, M. A. (Mater. Res. Soc. Symp. Proc. 122 [1988] 579–84; C.A. 110 [1989] No. 126555).

    Article  CAS  Google Scholar 

  184. Siegal, M. P.; Graham, W. R.; Santiago, J. J. (J. Appl. Phys. 66 [1989] 6073–6).

    Article  CAS  Google Scholar 

  185. Von Allmen, M.; Lau, S. S.; Sheng, T. T.; Wittmers, M. (Laser Electron Beam Process. Mater. Proc. Symp., Cambridge, Mass., 1979 [1980], pp. 524–9; C.A. 93 [1980] No. 159996).

    Google Scholar 

  186. Shibata, T.; Sigmon, T. W.; Gibbons, J. F. (Proc. Electrochem. Soc. 80–2 [1980] 533 pp., 458–68).

    Google Scholar 

  187. Shibata, T.; Sigmon, T. W.; Regolini, J. L.; Gibbons, J. F. (J. Electrochem. Soc. 128 [1981] 637–44).

    Article  CAS  Google Scholar 

  188. Wakita, A. S.; Sigmon, T. W.; Gibbons, J. F. (Mater. Res. Soc. Symp. Proc. 13 [1983] 721–6).

    Article  CAS  Google Scholar 

  189. Shibata, T.; Wakita, A.; Sigmon, T. W.; Gibbons, J. F. (Semicond. Semimet. 17 [1984] 341–95).

    Article  CAS  Google Scholar 

  190. Lee, H. S.; Wolga, G. J. (J. Electrochem. Soc. 137 [1990] 684–90).

    Article  CAS  Google Scholar 

  191. Lee, H. S.; Wolga, G. J. (J. Electrochem. Soc. 137 [1990] 2618–23).

    Article  CAS  Google Scholar 

  192. Majni, G.; Nava, F.; Ottaviani, G.; Luches, A.; Nassisi, V.; Celotti, G. (Vacuum 32 [1982] 11–8).

    Article  CAS  Google Scholar 

  193. Wada, T.; Takeda, M. (Nagoya Kogyo Daigaku Gakuho 36 [1985] 113–25; C.A. 104 [1986] No. 160090).

    Google Scholar 

  194. Baglin, J. E. E.; Hodgson, R. T.; Chu, W. K.; Neri, J. M.; Hammer, D. A.; Chen, L. J. (Nucí. Instrum. Methods Phys. Res. 191 [1981] 169–76; C.A. 96 [1982] No. 95843).

    Article  CAS  Google Scholar 

  195. Bomchil, G.; Goeltz, G.; Torres, J. (Thin Solid Films 140 [1986] 59–70).

    Article  CAS  Google Scholar 

  196. Haarsta, A.; Carlsson, J. O. (Thin Solid Films 176 [1989] 263–76).

    Article  CAS  Google Scholar 

  197. Siegal, M. P.; Santiago, J. J. (Mater. Res. Soc. Symp. Proc. 100 [1988] 701–6; C.A. 109 [1988] No. 140180).

    Article  CAS  Google Scholar 

  198. Silversmith, D. J.; Rathman, D. D.; Mountain, R. W. (Thin Solid Films 93 [1982] 413–9).

    Article  CAS  Google Scholar 

  199. Deneuville, A.; Kádri, M.; Burnel, M. (Vide Couches Minces 42 No. 236 [1987] 33–5; C.A. 107 [1987] No. 87802).

    CAS  Google Scholar 

  200. Goltz, G.; Torres, J.; Lajzerowicz, J. Jr.; Bomchil, G. (Thin Solid Films 124 [1985] 19–26).

    Article  CAS  Google Scholar 

  201. Pauleau, Y.; Lami, P.; Dassapa, F.; Romagna, F.; Oberlin, J. C. (Vide Couches Minces 42 No. 236 [1987] 163–5; C.A. 107 [1987] No. 166563).

    CAS  Google Scholar 

  202. Blewer, R. S.; Tracy, M. E. (Tungsten Other Refract. Met. VLSI Appl. Proc. Workshop, Albuquerque 1984–1985 [1986], pp. 53–62; C.A. 106 [1987] No. 166969).

    Google Scholar 

  203. Silversmith, D. J.; Rathman, D. D.; Mountain, R. W. (Mater. Res. Soc. Symp. Proc. 10 [1982] 425–31; C.A. 98 [1983] No. 208290).

    Article  CAS  Google Scholar 

  204. Vasilev, S. V.; Gerasimenko, N. N. (Poverkhnost 1986 No. 7, pp. 57–62; C.A. 105 [1986] No. 144865).

    Google Scholar 

  205. Arena, C; Papapietro, M. (Tungsten Other Refract. Met. VLSI Appl. Proc. Worhshop, Albuquerque 1984–1985 [1986], pp. 483–95; C.A. 106 [1987] No. 147647).

    Google Scholar 

  206. Gerasimenko, N. N.; Vasilev, S. V.; Kalinin, V. V. (Nucl. Instrum. Methods Phys. Res. B 39 [1989] 259–67; C.A. 111 [1989] No. 32197).

    Article  Google Scholar 

  207. Torres, J.; Oberlin, J. C; Bomchil, G.; Perio, A.; Levy, D.; Saulnier, A.; Ponpon, J. P.; Stuck, R. (in: Soncini, G.; Calzolari, P. U.; Solid State Devices, Elsevier, North Holland, 1988, pp. 357–61).

    Google Scholar 

  208. Torres, J.; Oberlin, J. C; Stuck, R.; Bourhila, N.; Palleau, J.; Goltz, G.; Bomchil, G. (Appl. Surf. Sci. 38 [1989] 186–94).

    Article  CAS  Google Scholar 

  209. Maex, K.; Van den Hove, L.; DeKeersmaecker, R. F. (Thin Solid Films 140 [1986] 149–61).

    Article  CAS  Google Scholar 

  210. Hara, T.; Chen, S. C; Ando, H. (J. Electrochem. Soc. 134 [1987] 3139–42).

    Article  CAS  Google Scholar 

  211. Agamy, S. A.; Khalil, M. Y.; Badawi, A. A. (Isotopenpraxis 26 No. 6 [1990] 265–8; C.A. 113 [1990] No. 143127).

    Article  CAS  Google Scholar 

  212. D’Heurle, F. M.; Petersson, C. S.; Tsai, M. Y. (J. Appl. Phys. 51 [1980] 5976–80).

    Article  Google Scholar 

  213. Tsai, M. Y.; Petersson, C. S.; D’Heurle, F. M.; Maniscalco, V. (Appl. Phys. Lett. 37 [1980] 295–8).

    Article  CAS  Google Scholar 

  214. D’Heurle, F. M.; Tsai, M. Y.; Petersson, C. S.; Stritzler, B. (J. Appl. Phys. 53 [1982] 3067–9).

    Article  Google Scholar 

  215. Kwong, D. L; Meyers, D. C; Alvi, N. S.; Li, L. W.; Norbeck, E. (Appl. Phys. Lett. 47 [1985] 688–91).

    Article  CAS  Google Scholar 

  216. Saraswat, K. C; Swirhun, S.; McVittie, J. P. (Proc. Electrochem. Soc. 84–7 [1984] 409–19; C.A. 101 [1984] No. 121173).

    Google Scholar 

  217. Mimura, H.; Inada, T. (Rep. Res. Cent. Ion Beam Technol. Hosei Univ. Suppl. No. 8 [1990] 97–102; C.A. 113 [1990] No. 32573).

    Google Scholar 

  218. Beale, M. I. J.; Deshmukh, W. G. L; Chew, N. G.; Cullis, A. G. (Physica B129 [1985] 210–4).

    Article  CAS  Google Scholar 

  219. Kurup, M. B.; Bhagawat, A.; Prasad, K. G. (Nucl. Instrum. Methods Phys. Res. B 13 [1986] 473–8; C.A. 105 [1986] No. 47222).

    Article  Google Scholar 

  220. Ma, E.; Lim, B. S.; Nicolet, M. A.; Alvi, N. S.; Hamdi, A. H. (J. Electron. Mater. 17 No. 3 [1988] 207–11; C.A. 109 [1988] No. 102597).

    Article  CAS  Google Scholar 

  221. Zuhr, R. A.; Pennycook, S. J.; Haynes, T. E.; Holland, O. W. (Mater. Res. Soc. Symp. Proc. 128 [1989] 47–53; C.A. 111 [1989] No. 107063).

    Article  CAS  Google Scholar 

  222. Deneuville, A.; Benyahya, M.; Brunei, M.; Canut, B. (J. Phys. Colloq. [Paris] 49 [1988] C4–499–C4–502; C.A. 110 [1989] No. 16787).

    Google Scholar 

  223. Deneuville, A.; Benyahya, M.; Brunei, M.; Oberlin, J. C; Torres, J.; Bourhila, N.; Paleau, J.; Canut, B. (Appl. Surf. Sci. 38 [1989] 139–47).

    Article  CAS  Google Scholar 

  224. Torres, J.; Palleau, J.; Bourhila, N.; Oberlin, J. C; Deneuville, A.; Benyahya, M. (J. Phys. Colloq. [Paris] 49 [1988] C4–183–C4–186; C.A. 109 [1988] No. 241887).

    Google Scholar 

  225. Broadbent, E. K.; Morgan, A. E.; Flanner, J. M.; Coulman, B.; Sadana, D. K.; Burrow, B. J.; Ellwanger, R. C. (J. Appl. Phys. 64 [1988] 6721–6).

    Article  CAS  Google Scholar 

  226. Broadbent, E. K.; Morgan, A. E.; Ellwanger, R. C; Flanner, J. M.; Coulman, B.; Sadana, D. K.; Burrow, B. J.; Gutai, L. (Tungsten Other Refract. Met. VLSI Appl. 4 Proc. Work shop, Albuquerque 1988 [1989], pp. 259–68; C.A. 111 [1989] No. 144779).

    Google Scholar 

  227. Bakli, M.; Goltz, G.; Vernet, M.; Torres, J.; Palleau, J.; Bourhila, N.; Oberlin, J. C. (Appl. Surf. Sci. 38 [1989] 441–6).

    Article  CAS  Google Scholar 

  228. Smith, P. M.; Thompson, M. O.; Blewer, R. S. (Tungsten Other Adv. Met. ULSI Appl. 1990 Proc. 7th Workshop, Dallas 1990 [1991], pp. 297–303; C.A. 115 [1991] No. 54658).

    Google Scholar 

  229. Deneuville, A.; Benyahya, M.; Brunei, M.; Canut, B. (J. Less-Common Met. 145 [1988] 197–207).

    Article  CAS  Google Scholar 

  230. Deneuville, A.; Mandeville, P. (Fr. Demande 2578272 [1985–1986] 14 pp.; C.A. 106 [1987] No. 77081).

    Google Scholar 

  231. Kadri, M.; Deneuville, A.; Brunei, M. (Adv. Mater. Telecommun. Pap. Symp. 13 Eur. Mater. Res. Soc. Meet., Strasbourg 1986, pp. 497–501; C.A. 108 [1988] No. 67648).

    Google Scholar 

  232. Deneuville, A.; Kadri, M.; Brunei, M. (Vide Couches Minces 42 No. 236 [1987] 37–9; C.A. 107 [1987] No. 87843).

    CAS  Google Scholar 

  233. Kadri, M.; Deneuville, A.; Brunei, M. (Proc. Conf. Ion Plat. Allied Tech. 1987 366–70).

    Google Scholar 

  234. Deneuville, A.; Kadri, M.; Brunei, M. (Proc. Int. Symp. Trends New Appl. Thin Films, Strasbourg 1987, pp. 126–30).

    Google Scholar 

  235. Canut, J. B.; Kadri, M.; Pivot, J.; Deneuville, A. (Proc. Eur. Mater. Res. Symp. 1987 491–6).

    Google Scholar 

  236. Dubois, C; Deneuville, A.; Kadri, M. (Second. Ion Mass. Spectrom. Proc. 6th Int. Conf., Versailles 1987 [1988], pp. 777–82; C.A. 111 [1989] No. 15924).

    Google Scholar 

  237. Kadri, M.; Deneuville, A.; Brunei, M. (Mater. Sci. Eng. 98 [1988] 79–84; C.A. 109 [1988] No. 97298).

    Article  CAS  Google Scholar 

  238. Houdy, P.; Boher, P.; Schiller, C; Luzeau, P.; Barchewitz, R.; Alehyane, N.; Ouahabi, M. (Proc. SPIE-Int. Soc. Opt. Eng. 984 [1988] 95–103; C.A. 110 [1989] No. 163221).

    Article  CAS  Google Scholar 

  239. Magee, T. J.; Woolhouse, G. R.; Kawayoshi, H. A.; Niemeyer, I. C; Rodrigues, B.; Ormond, R. D.; Bhandia, A. S. (J. Vac. Sci. Technol. [2] B 2 [1984] 756–61; C.A. 102 [1985] No. 37353).

    Article  CAS  Google Scholar 

  240. Jiang, Z.; Jiang, X.; Liu, W.; Wu, Z. (J. Appl. Phys. 65 [1989] 196–200).

    Article  CAS  Google Scholar 

  241. Dupuis, V.; Ravet, M. F.; Tete, C; Piecuch, M.; Vidal, B. (J. Appl. Phys. 68 [1990] 3348–55).

    Article  CAS  Google Scholar 

  242. King, B. V.; Puranik, S. G.; MacDonald, R. J. (Nucl. Instrum. Methods Phys. Res. B 33 [1988] 657–60; C.A. 109 [1988] No. 220466).

    Article  Google Scholar 

  243. Tsaur, B.-Y.; Anderson, C. H. Jr. (Appl. Phys. Lett. 41 [1982] 877–9).

    Article  CAS  Google Scholar 

  244. Tsaur, B.-Y.; Anderson, C. H. Jr. (Thin Solid Films 104 [1983] 383–9).

    Article  CAS  Google Scholar 

  245. Wang, Z.; Ding, X.; Tian, Y. (Nucl. Instrum. Methods Phys. Res. B 33 [1988] 653–6; C. A. 109 [1988] No. 221405).

    Article  Google Scholar 

  246. Ding, X.; Wang, Z.; Qian, Y. (Vacuum 39 [1989] 243–5; C.A. 111 [1989] No. 88152).

    Article  Google Scholar 

  247. Eicher, S.; Bruce, R. A. (Can. J. Phys. 65 [1987] 868–71; C.A. 108 [1988] No. 196504).

    Article  CAS  Google Scholar 

  248. Ding, X.; Wang, Z.; Qian, Y. (Hejishu 10 No. 9 [1987] 15–9 from C.A. 108 [1988] No. 114775).

    CAS  Google Scholar 

  249. Choi, K. W.; Ahn, K. Y. (J. Vac. Sci. Technol. [2] A 3 [1985] 2272–7).

    Article  CAS  Google Scholar 

  250. Blokha, V. B.; Gladkikh, N. T.; Glushko, P. I.; Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S. (Izv. Akad. Náuk SSSR Neorg. Mater. 18 [1982] 805–8;

    CAS  Google Scholar 

  251. Blokha, V. B.; Gladkikh, N. T.; Glushko, P. I.; Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S. Inorg. Mater. [Engl. Transi.] 18 [1982] 677–80).

    Google Scholar 

  252. Lo, J.-S. (Diss. Univ. Utah, Salt Lake City, Utah, 1973, 98 pp.; C.A. 80 [1974] No. 61 575).

    Google Scholar 

  253. Lo, J.-S.; Haskell, R. W.; Byrne, J. G.; Sosin, A. (Chem. Vap. Deposition 4th Int. Conf., Boston 1973, pp. 74–90; C.A. 81 [1974] No. 160230).

    Google Scholar 

  254. Saraswat, K. C; Brors, D. L.; Fair, J. A.; Monnig, K. A.; Beyers, R. (IEEE Trans. Electron Devices 30 [1983] 1497–505; C.A. 100 [1984] No. 60149).

    Article  Google Scholar 

  255. Fang, Y. K.; Hsu, S. L. (J. Appl. Phys. 57 [1985] 2980–2).

    Article  CAS  Google Scholar 

  256. Togei, R. (J. Appl. Phys. 59 [1986] 3582–4).

    Article  CAS  Google Scholar 

  257. Shioya, Y.; Maeda, M. (J. Appl. Phys. 60 [1986] 327–33).

    Article  CAS  Google Scholar 

  258. Le Goues, F. K.; D’Heurle, F. M.; Joshi, R.; Suni, I. (Mater. Res. Soc. Symp. Proc. 54 [1986] 51–6; C.A. 105 [1986] No. 88869).

    Google Scholar 

  259. Nava, F.; Riantino, G.; Galii, E. (J. Non-Cryst. Solids 104 [1988] 195–202).

    Article  CAS  Google Scholar 

  260. Akimoto, K.; Watinabe, K. (Appl. Phys. Lett. 39 [1981] 445–7).

    Article  CAS  Google Scholar 

  261. Akimoto, K. (Appl. Phys. Lett. 41 [1982] 49–51).

    Article  CAS  Google Scholar 

  262. Murarka, S. P.; Read, M. H.; Chang, C. C. (J. Appl. Phys. 52 [1981] 7450–2).

    Article  CAS  Google Scholar 

  263. Jiang, X.; Huang, Y.; Wu, Z.; Li, B. (Chin. Phys. Lett. 3 [1986] 569–72; C.A. 106 [1987] No. 187008).

    Article  CAS  Google Scholar 

  264. Tsai, M. Y.; D’Heurle, F. M.; Petersson, C S.; Johnson, R. W. (J. Appl. Phys. 52 [1981] 5350–5).

    Article  CAS  Google Scholar 

  265. Guo, K. J.; Wiley, J. D.; Perepezko, J. H.; Nordman, J. E.; Aaron, D. B.; Dobisz, E. A.; Madisen, D. E.; Thomas, R. E. (Proc. Conf. High Temp. Electron. Instrumentation, Houston, Tex., 1981, pp. 137–46).

    Google Scholar 

  266. Wiley, J. D.; Perepezko, J. H.; Nordman, J. E.; Guo, K.-J. (IEEE Trans. Ind. Electron. 29 No. 2 [1982] 154–7).

    Article  Google Scholar 

  267. Wiley, J. D.; Perepezko, J. H.; Nordman, J. E. (SAND-82–7156 [1983] 37 pp.; C.A. 99 [1983] No. 162550).

    Google Scholar 

  268. Thomas, R. E.; Perepezko, J. H.; Wiley, J. D. (Appl. Surf. Sci. 26 [1986] 534–41).

    Article  CAS  Google Scholar 

  269. Thomas, R. E.; Perepezko, J. H.; Wiley, J. D. (Mater. Res. Soc. Symp. Proc. 54 [1986] 127–32; C.A. 105 [1986] No. 163890).

    Article  CAS  Google Scholar 

  270. Hara, T.; Takahashi, S. (Nucl. Instrum. Methods Phys. Res. B 39 [1989] 302–5; C. A. 111 [1989] No. 32162).

    Article  Google Scholar 

  271. Sridhar, C. G.; Hodul, D. T.; Chow, R. (Tungsten Other Refract. Met. VLSI Appl. Proc. Workshop, Albuquerque 1984–1985 [1986], pp. 267–80; C.A. 106 [1987] No. 147645).

    Google Scholar 

  272. Du, Y. C; Wang, H.; Huang, W. N.; Sun, D. C; Yu, Z. Q.; Li, F. M. (Tungsten Other Refract. Met. VLSI Appl. 4 Proc. Workshop, Albuquerque 1988 [1989], pp. 307–13; C.A. 111 [1989] No. 202812).

    Google Scholar 

  273. Du, Y. C; Lu, Z.; Yu, Z. Q.; Sun, D. C; Li, F. M.; Collins, G. J. (Chin. Phys. New York 6 No. 1 [1986] 208–14).

    Google Scholar 

  274. Chen C; Zhou, H.; Cao, M.; Jiang, H.; Xu, W. (Tungsten Other Refract. Met. VLSI Appl. 4 Proc. Workshop, Albuquerque 1988 [1989], pp. 363–7; C.A. 111 [1989] No. 164896).

    Google Scholar 

  275. Crowder, B. L; Zirinsky, S. (Eur. Appl. 0317 [1979] 31 pp.; C. A. 91 [1979] No. 203172).

    Google Scholar 

  276. Ahn, K. Y.; Herd, S. R.; Baglin, J. E. E.; Han, J. U. (J. Vac. Sci. Technol. [2] A 3 [1985] 2268–71).

    Article  CAS  Google Scholar 

  277. Lu, J.; Wu, Z. (Wuli Xuebao 38 [1989] 981–6; C.A. 111 [1989] No. 245432).

    CAS  Google Scholar 

  278. Ohnishi, T.; Yokoyama, N.; Onodera, H.; Suzuki, S.; Shibatomi, A. (Appl. Phys. Lett. 43 [1983] 600–2).

    Article  CAS  Google Scholar 

  279. Gage, P. R.; Bartlett, R. W. (Trans. Metall. Soc. AIME 233 [1965] 832–4).

    CAS  Google Scholar 

  280. Takatani, S.; Matsuoka, N.; Shigeta, J.; Hashimoto, N.; Nakashima, H. (J. Appl. Phys. 6 [1987] 220–4).

    Article  Google Scholar 

  281. Lahav, A. G.; Wu, C. S.; Baiocchi, F. A. (J. Vac. Sci. Technol. [2] B 6 [1988] 1785–95).

    Article  CAS  Google Scholar 

  282. Cirillo, N. C, Jr.; Chung, H. K.; Void, P. J.; Hibbs-Brenner, M. K.; Fraasch, A. M. (J. Vac. Sci. Technol. [2] B 3 [1985] 1680–4).

    Article  CAS  Google Scholar 

  283. Lahav, A.; Genut, M. (Mater. Sci. Eng. B 7 [1990] 231–5; C.A. 114 [1991] No. 73055).

    Article  Google Scholar 

  284. Angilello, J.; Baglin, J.; D’Heurle, F.; Petersson, S.; Segmüller, A. (Proc.-Electrochem. Soc. 80–2 [1980] 369–84; C.A. 94 [1981] No. 200987).

    Google Scholar 

  285. Pan, P. J.; Blech, I. (J. Appl. Phys. 55 [1984] 2874–80).

    Article  CAS  Google Scholar 

  286. McLachlan, D. R.; Avins, J. B. (Semicond. Int. 7 [1984] 129–38).

    Google Scholar 

  287. Santiago-Aviles, J. J. (ARO-22681.8-MS-H [AD-A 203428] [1988] 10 pp.; C.A. 111 [1989] No. 200426).

    Google Scholar 

  288. Siegal, M. P.; Santiago, J. J. (J. Appl. Phys. 63 [1988] 525–9).

    Article  CAS  Google Scholar 

  289. Wei, C. S.; Van der Spiegel, J.; Setton, M.; Santiago, J.; Tanielian, M.; Blackstone, S. (Mater. Res. Soc. Symp. Proc. 52 [1986] 297–303; C.A. 105 [1986] No. 126002).

    Article  CAS  Google Scholar 

  290. Wei, C. S.; Setton, M.; Van der Spiegel, J.; Santiago, J. (J. Appl. Phys. 61 [1987] 1429–34).

    Article  CAS  Google Scholar 

  291. Mitsuhashi, K.; Yamazaki, O.; Ohtake, K.; Koba, M. (Jpn. J. Appl. Phys. Pt. 2 27 [1988] L2401–L2403; C.A. 110 [1989] No. 145718).

    Article  CAS  Google Scholar 

  292. Mitsuhashi, K.; Shiozaki, K.; Yamazaki, O.; Ohtake, K.; Koba, M. (VLSI Technol. Symp., San Diego, Calif., 1988, pp. 71–2).

    Google Scholar 

  293. Mitsuhashi, K.; Yamazaki, O.; Ohtake, K.; Koba, M. (Jpn. J. Appl. Phys. Pt. 1 28 [1989] 593–7; C.A. 111 [1989] No. 164963).

    Article  CAS  Google Scholar 

  294. Nakasaki, Y.; Suguro, K.; Shima, S.; Kashiwagi, M. (J. Appl. Phys. 64 [1988] 3263–8).

    Article  CAS  Google Scholar 

  295. Suguro, K.; Nakasaki, Y.; Inoue, T.; Shima, S.; Kashiwagi, M. (Thin Solid Films 166 [1988] 1–14).

    Article  CAS  Google Scholar 

  296. Suguro, K.; Nakasaki, Y.; Yoshii, T.; Itoh, T. (Appl. Surf. Sci. 41–42 [1989] 277–81).

    Article  Google Scholar 

  297. Suguro, K.; Nakasaki, Y.; Katata, T. (Oyo Butsuri 59 [1990] 1474–8; C.A. 115 [1991] No. 219967).

    CAS  Google Scholar 

  298. Suguro, K.; Katata, T.; Nakasaki, Y.; Kunishima, I. (Tungsten Other Adv. Met. VLSI–ULSI Appl. 5 Proc. 6th Workshop, San Mateo, Calif, and Tokyo 1989 [1990], pp. 195–200; C.A. 113 [1990] No. 235606).

    Google Scholar 

  299. Suguro, K.; Nakasaki, Y.; Shima, S.; Yoshii, T.; Moriya, T.; Tango, H. (Ext. Abstr. Conf. Solid State Devices Mater. 18th [1986] 503–6; C.A. 106 [1987] No. 42155).

    Google Scholar 

  300. Yasui, Y.; Ogawa, S.; Yoshida, T.; Terui, Y. (Ext. Abstr. 19th Conf. Solid State Devices Mater., Tokyo 1987, pp. 419–22).

    Google Scholar 

  301. Shen, B. W.; Smith, G. C; Anthony, J. M.; Matyi, R. J. (J. Vac. Sci. Technol. [2] B 4 [1986] 1369–76).

    Article  CAS  Google Scholar 

  302. Sweet, J. N. (SLA-73–1087 [1974] 45 pp.; C.A. 82 [1975] No. 33273).

    Google Scholar 

  303. Olowolafe, J. O.; Tu, K. N.; Angtlello, J. (J. Appl. Phys. 50 [1979] 6316–20).

    Article  CAS  Google Scholar 

  304. Eizenberg, M.; Tu K. N. (J. Appl. Phys. 53 [1982] 1577–85).

    Article  CAS  Google Scholar 

  305. Canali, C; Celotti, G.; Fantini, F.; Zanoni, E. (Thin Solid Films 88 [1982] 9–23).

    Article  CAS  Google Scholar 

  306. Thomas, O.; Finstad, T. G.; D’Heurle, F. M. (J. Appl. Phys. 67 [1990] 2410–4).

    Article  CAS  Google Scholar 

  307. Appelbaum, A.; Eizenberg, M.; Brener, R. (Vacuum 33 No. 4 [1983] 227–30).

    Article  CAS  Google Scholar 

  308. Hashimoto, N.; Koga, Y. (J. Electrochem. Soc. 114 [1967] 1189–91).

    Article  CAS  Google Scholar 

  309. Torres, J.; Perio, A.; Pantel, R.; Campidelli, Y.; Arnaud D’Avitaya, F. (Thin Solid Films 126 [1986] 233–9).

    Article  Google Scholar 

  310. Lin, W. T.; Chen, L. J. (J. Appl. Phys. 58 [1985] 1515–8).

    Article  CAS  Google Scholar 

  311. Lin, W. T.; Chen, L. J. (J. Appl. Phys. 59 [1986] 3481–8).

    Article  CAS  Google Scholar 

  312. Cheng, H. C; Lin, W. T.; Chien, C. J.; Shiau, F. Y.; Chen, L. J. (Appl. Surf. Sci. 22–23 [1985] 512–9).

    Article  Google Scholar 

  313. Chen, L. J.; Cheng, H. C; Lin, W. T.; Chou, L. J.; Fung, M. S. (Mater. Res. Soc. Symp. Proc. 37 [1985] 375–80).

    Article  CAS  Google Scholar 

  314. Ogawa, S.; Yamazaki, K.; Akiyama, S.; Terui, Y. (Tech. Dig. Int. Electron Devices 1986 62–5).

    Google Scholar 

  315. D’Heurle, F. M.; Gas, P. (J. Mater. Res. 1 [1986] 205–21 ; C.A. 104 [1986] No. 213864).

    Article  Google Scholar 

  316. Borders, J. A.; Picraux, S. T. (Proc. IEEE 62 [1974] 1224–31; C.A. 82 [1975] No. 118362).

    Article  CAS  Google Scholar 

  317. Borders, J. A.; Sweet, J. N. (Appl. Ion Beams Met. Int. Conf., Albuquerque 1973 [1974], pp. 179–91; C.A. 82 [1975] No. 103761).

    Book  Google Scholar 

  318. Chang, C. C; Quintana, G. (J. Electron Spectrosc. Relat. Phenom. 2 [1973] 363–76).

    Article  CAS  Google Scholar 

  319. Ottaviani, G. (Thin Solid Films 140 [1986] 3–21).

    Article  CAS  Google Scholar 

  320. Lajzerowicz, J. Jr.; Torres, J.; Goltz, G.; Pantel, R. (Thin Solid Films 140 [1986] 23–8).

    Article  CAS  Google Scholar 

  321. Petersson, C. S.; Baglin, J. E. E.; D’Heurle, F. M.; Dempsey, J. J.; Harper, J. M. E.; Serrano, C. M.; Tsai, M. Y. (Proc.-Electrochem. Soc. 80–2 [1980] 290–310; C.A. 94 [1981] No. 200985).

    Google Scholar 

  322. Baglin, J.; Dempsey, J.; Hammer, W.; D’Heurle, F.; Petersson, S.; Serrano, C. (J. Electron. Mater. 8 [1979] 641–61; C.A. 91 [1979] No. 132191).

    Article  CAS  Google Scholar 

  323. Hara, T.; Ohtsuka, N.; Ishizawa, Y. (Rep. Res. Cent. Ion Beam Technol. Hosei Univ. Suppl. No. 4 [1985] 125–30; C.A. 102 [1985] No. 191969).

    Google Scholar 

  324. Siegal, M.; Santiago, J. J.; Van der Spiegel, J. (Mater. Res. Soc. Symp. Proc. 52 [1986] 289–95; C.A. 105 [1986] No. 125873).

    Article  CAS  Google Scholar 

  325. Bayerl, P.; Eichinger, P. (RS 03–75, Institut für Festkörpertechnologie, München 1975, 14 pp.).

    Google Scholar 

  326. Pantel, R.; Campidelli, Y.; Arnaud D’Avitaya, F. (J. Electrochem. Soc. 131 [1984] 2426–30).

    Article  CAS  Google Scholar 

  327. Badoz, P. A.; Bakli, M.; Berenguer, M.; Morin, C; Oberlin, J. C; Palleau, J.; Pantel, R.; Perret, P.; Straboni, A.; Torres, J.; Vuillermoz, B. (Proc. 2nd Int. Conf. Electron Mater., Newark, N.J., 1990, pp. 527–32; C.A. 115 [1991] No. 219971).

    Google Scholar 

  328. Beck, S. M. (J. Chem. Phys. 87 [1987] 4233–4).

    Article  CAS  Google Scholar 

  329. Beck, S. M. (J. Chem. Phys. 90 [1989] 6306–12).

    Article  CAS  Google Scholar 

  330. Shaw, J. M.; Amick, J. A. (RCA Rev. 31 [1970] 306–16).

    CAS  Google Scholar 

  331. Baglin, J.; D’Heurle, F.; Petersson, S. (Appl. Phys. Lett. 33 [1978] 289–90).

    Article  CAS  Google Scholar 

  332. Baglin, J.; Dempsey, J.; Hammer, W.; D’Heurle, F.; Petersson, S.; Serrano, C. (J. Electron. Mater. 8 [1979] 641–61).

    Article  CAS  Google Scholar 

  333. Diem, M.; Fisk, M.; Goldman, J. (Thin Solid Films 107 [1983] 39–43).

    Article  CAS  Google Scholar 

  334. Foord, J. S.; Jackman, R. B. (J. Opt. Soc. Am. B: Opt. Phys. 3 [1986] 806–11).

    Article  CAS  Google Scholar 

  335. Makhmudov, K.; Kakharov, S. S.; Mamadalimov, A. T. (Izv. Akad. Nauk UzSSR Ser. Fiz.- Mat. Nauk 1984 No. 2, pp. 71–2; C.A. 101 [1984] No. 82319).

    Google Scholar 

  336. Fujisaki, Y.; Ando, T.; Kozuka, H.; Takano, Y. (J. Appl. Phys. 63 [1988] 2304–6).

    Article  CAS  Google Scholar 

  337. Barcz, A. J.; Paine, B. M.; Nicolet, M.-A. (Appl. Phys. Lett. 44 [1984] 45–7).

    Article  CAS  Google Scholar 

  338. Chang, C. C; Quintana, G. (J. Electron. Spectrosc. Relat. Phenom. 2 [1973] 363–76).

    Article  CAS  Google Scholar 

  339. Borders, J. A.; Sweet, J. N. (Appl. Ion Beams Met. Int. Conf., Albuquerque 1973 [1974] pp. 179–91; C.A. 82 [1975] No. 103761).

    Book  Google Scholar 

  340. Bevolo, A. J.; Schmidt, F. A.; Shanks, H. R.; Campisi, G. J. (J. Vac. Sci. Technol. 16 [1979] 13–9).

    Article  CAS  Google Scholar 

  341. Borders, J. A.; Sweet, J. N. (J. Appl. Phys. 43 [1972] 3803–8).

    Article  CAS  Google Scholar 

  342. Pauleau, Y.; Lami, P.; Tissier, A.; Pantel, R.; Oberlin, J. C. (Thin Solid Films 143 [1986] 259–67).

    Article  CAS  Google Scholar 

  343. Bayerl, P.; Eichinger, P. (RS-03–75, Institut f. Festkörpertechnologie München 1975).

    Google Scholar 

  344. Baglin, J. E. E.; D’Heurle, F. M.; Hammer, W. N.; Petersson, S. (Nucl. Instrum. Methods 168 [1980] 491–7).

    Article  CAS  Google Scholar 

  345. Goetzel, C. G.; Landler, P. (WADD-TR-60–825 [AD-258574] [1960] 1–42; N.S.A. 15 [1961] No. 23986).

    Google Scholar 

  346. Garifullin, N. M.; Zubenko, Yu. V. (Vestn. Leningr. Univ. Ser. 4 Fiz. Khim. 1976 No. 2, pp. 59–66; C.A. 85 [1976] No. 135521).

    Google Scholar 

  347. Janssen, A. P.; Jones, J. P. (Surf. Sci. 41 [1974] 257–76).

    Article  CAS  Google Scholar 

  348. Sinha, M. K.; Swenson, O. F. (Appl. Phys. Lett. 19 [1971] 493–4).

    Article  CAS  Google Scholar 

  349. Sinha, M. K.; Swenson, O. F.; Venkatachalam, G. (Surf. Sci. 33 [1972] 414–8).

    Article  CAS  Google Scholar 

  350. Borders, J. A.; Picraux, S. T. (Proc. IEEE 62 [1974] 1224–31; C.A. 82 [1975] No. 118362).

    Article  CAS  Google Scholar 

  351. Petersson, C. S.; Baglin, J. E. E.; D’Heurle, F. M.; Dempsey, J. J.; Harper, J. M. E.; Serrano, C. M.; Tsai, M. Y. (Proc. Electrochem. Soc. 80–2 [1980] 290–310; C.A. 94 [1981] No. 200985).

    Google Scholar 

  352. Silversmith, D. J.; Rathman, D. D.; Mountain, R. W. (Thin Solid Films 93 [1982] 413–9).

    Article  CAS  Google Scholar 

  353. Gelain, C; Cassuto, A.; Le Goff, P. (Bull. Soc. Fr. Ceram. 80 [1968] 23–7).

    Google Scholar 

  354. Samsonov, G. V.; Solonnikova, L. A. (Fiz. Met. Metalloved. 5 [1957] 565–6;

    CAS  Google Scholar 

  355. Samsonov, G. V.; Solonnikova, L. A. Phys. Met. Metallogr. [Engl. Transi.] 5 No. 3 [1957] 177; C.A. 1958 19804).

    Google Scholar 

  356. Weng, S. L. (Phys. Rev. B: Condens. Matter [3] 29 [1984] 2363–5).

    Article  CAS  Google Scholar 

  357. Mitani, E.; Shichi, H.; Yamamoto, N. (Shitsuryo Bunseki 32 [1984] 315–8 from C.A. 102 [1985] No. 53443).

    CAS  Google Scholar 

  358. Zirinsky, S.; Hammer, W.; D’Heurle, F.; Baglin, J. (Appl. Phys. Lett. 33 [1978] 76–8).

    Article  CAS  Google Scholar 

  359. Tonn, D. G.; Sankey, O. F.; Tsong, I. S. T. (Nucl. Instrum. Methods Phys. Res. B 15 [1986] 193–7; C.A. 104 [1986] No. 234599).

    Article  Google Scholar 

  360. Bartlett, R. W.; Gage, P. R. (ASD-TDR-63–753-Pt. II [1964] 136 pp., 1–48, 124–7; N.S.A. 19 [1965] No. 7848).

    Google Scholar 

  361. Gage, P. R.; Bartlett, R. W. (Trans. Metall Soc. AIME 233 [1965] 832–4).

    CAS  Google Scholar 

  362. Kostikov, V. I.; Levin, N. P.; Levin, V. Ya. (Izv. Akad. Nauk SSSR Neorg. Mater. 5 [1969] 152–4;

    CAS  Google Scholar 

  363. Kostikov, V. I.; Levin, N. P.; Levin, V. Ya. Inorg. Mater. [Engl. Transi.] 5 [1969] 123–6).

    Google Scholar 

  364. Oertel, B.; Sperling, R. (Thin Solid Films 37 [1976] 185–94).

    Article  CAS  Google Scholar 

  365. Campisi, G. J.; Bevolo, A. J.; Shanks, H. R.; Schmidt, F. A. (J. Appl. Phys. 53 [1982] 1714–9).

    Article  CAS  Google Scholar 

  366. Bartlett, R. W.; Gage, P. R.; Larssen, P. A. (Trans. Metall. Soc. AIME 230 [1964] 1528–34).

    CAS  Google Scholar 

  367. Mayer, J. W.; Tu, K. N. (J. Vac. Sci. Technol. 11 [1974] 86–93).

    Article  CAS  Google Scholar 

  368. Zmii, V. I.; Seryugina, A. S. (Zashch. Pokrytiya Met. No. 2 [1968] 195–201; Prot. Coat. Met. [Engl. Transi.] 2 [1970] 158–63).

    Google Scholar 

  369. Zmii, V. I. (Zashch. Pokrytiya Met.) No. 11 [1977] 14–8; C.A. 88 [1978] No. 10746).

    Google Scholar 

  370. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. (Izv. Akad. Nauk SSSR Neorg. Mater. 13 [1977] 1896–7;

    CAS  Google Scholar 

  371. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. Inorg. Mater. [Engl. Transi.] 13 [1977] 1525–6; C.A. 88 [1978] No. 27921).

    Google Scholar 

  372. Poltavtsev, N. S.; Zmii, V. I.; Snezhko, I. A. (Izv. Akad Nauk SSSR Neorg. Mater. 16 [1980] 674–7;

    CAS  Google Scholar 

  373. Poltavtsev, N. S.; Zmii, V. I.; Snezhko, I. A. Inorg. Mater. [Engl. Transi.] 16 [1980] 464–6).

    Google Scholar 

  374. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. (Izv. Akad. Nauk SSSR Neorg. Mater. 17 [1981] 644–6;

    CAS  Google Scholar 

  375. Zmii, V. I.; Glushko, P. I.; Trofimov, V. F. Inorg. Mater. [Engl. Transi.] 17 [1981] 427–9).

    Google Scholar 

  376. Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S.; Semenov, N. A. (Izv. Akad. Nauk SSSR Neorg. Mater. 17 [1981] 916–7;

    CAS  Google Scholar 

  377. Zmii, V. I.; Kartmazov, G. N.; Poltavtsev, N. S.; Semenov, N. A. Inorg. Mater. [Engl. Transi.] 17 [1981] 654–5).

    Google Scholar 

  378. Zmii, V. I. (Fiz. Khim. Obrab. Mater. 1986 No. 3, pp. 96–101 ; C.A. 105 [1986] No. 83544).

    Google Scholar 

  379. Zmii, V. I.; Kovtun, N. V.; Matyukhina, L. G. (Poverkhnost 1989 No. 8, pp. 148–53; C.A. 111 [1989] No. 199747).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Forschungsinstitut für Edelmetalle und Metallchemie, Germany

    Hermann Jehn

Authors
  1. Hermann Jehn
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Schwäbisch Gmünd
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Gudrun Bär
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Erich Best
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Ernst Koch
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Jörn von Jouanne Elisabeth Koch Ernst Koch

Rights and permissions

Reprints and permissions

Copyright information

© 1993 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Jehn, H., Gmünd, S., Bär, G., Best, E., Koch, E. (1993). Reactions with Silicon. In: von Jouanne, J., Koch, E., Koch, E. (eds) W Tungsten. Gmelin Handbook of Inorganic and Organometallic Chemistry - 8th Edition, vol W / A-B / A / 5 / b. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-08684-1_9

Download citation

  • DOI: https://doi.org/10.1007/978-3-662-08684-1_9

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-08686-5

  • Online ISBN: 978-3-662-08684-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation