Introduction
Military grade MEMS gyroscopes are critical for navigation in guided munitions. In such applications the sensor must survive extremely harsh launch environments and maintain integrity, often requiring sensitivity to loads many orders of magnitude lower than those experienced during launch. Previous inertial measurement units (IMUs) have proven to remain functional at loads up to 20,000 g’s [1]. In other work, gyroscopes (as well as other MEMS) have proven to survive loading up to 60,000 g’s [2]. In these previous works, performance was examined exclusively by electrical means. The current study aims to monitor the mechanical effects that such loading will have on the die and structure through interferometric shape measurement of the sensors.
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Pryputniewicz, R.J. (2014). Survivability of MEMS Packages at High-g Loads. In: Osten, W. (eds) Fringe 2013. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36359-7_83
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DOI: https://doi.org/10.1007/978-3-642-36359-7_83
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