Abstract
In semiconductor manufacturing enterprises, production equipment is the material basis for semiconductor enterprises to carry out productive business activities. With the rapid development of semiconductor technology in the past 30 years, the industry competition is also increasing rapidly. Therefore, how to manage and use these semiconductor production equipment and improve the management level of production equipment is of great significance to improve the strength of semiconductor production enterprises in the industry competition and promote the progress and development of enterprises. With the continuous development and progress of semiconductor industry, higher requirements are put forward for the research and development of equipment management system. The equipment management system is not only the management of equipment itself, such as equipment asset management, equipment spare parts management, etc., but also needs to be connected with the production and operation of equipment. It is necessary to consider how the management system can improve the utilization rate of equipment in the production and operation process, reduce the occurrence of defective rate, and increase enterprise benefits. And these have gradually become enterprises in the current fierce competition in the semiconductor industry.
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Wang, H. (2021). Research and Semiconductor Production Equipment Operation Management System. In: Abawajy, J., Xu, Z., Atiquzzaman, M., Zhang, X. (eds) 2021 International Conference on Applications and Techniques in Cyber Intelligence. ATCI 2021. Lecture Notes on Data Engineering and Communications Technologies, vol 81. Springer, Cham. https://doi.org/10.1007/978-3-030-79197-1_33
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DOI: https://doi.org/10.1007/978-3-030-79197-1_33
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