Abstract
Macroscopic electromagnetic force compensation (EMFC) balances are well established but were not yet demonstrated within microsystems. Hence, in this paper, the concept and the design of a micro fabricated force compensation balance is presented. The implemented concentrated compliance mechanism in form of flexure hinges enables motion with high precision, which is combined with a force compensation mechanism. The concept of force compensation promises a high measurement range, which is expected to be up to 0.5 mN, while still enabling a high resolution of less than 8 nN. The developed dynamic model of the miniaturized balance is used for the design of a PID-controller strategy. Here, continuous and time-discrete controller approaches are compared. The time-discrete controller with realistic delay times, leads to an accuracy of the controller, which is better than the expected accuracy of the integrated capacitive position sensor.
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Wedrich, K., Darnieder, M., Vierzigmann, E., Barth, A., Theska, R., Strehle, S. (2021). Conceptual Design of a Microscale Balance Based on Force Compensation. In: Zentner, L., Strehle, S. (eds) Microactuators, Microsensors and Micromechanisms. MAMM 2020. Mechanisms and Machine Science, vol 96. Springer, Cham. https://doi.org/10.1007/978-3-030-61652-6_9
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