Abstract
Measurement of micro-dimensions such as length, depth, width and radius of the nanomanufactured micro-structures is an important task for precision nanometrology. Some of the micro-structures are made on the workpiece over a long stroke and the measurement of the micro-dimension must be made over the entire stroke. In such cases, it requires the measurement system to have fast enough measuring speed.
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(2010). Scanning Image-sensor System for Measurement of Micro-dimensions. In: Precision Nanometrology. Springer Series in Advanced Manufacturing, vol 0. Springer, London. https://doi.org/10.1007/978-1-84996-254-4_10
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DOI: https://doi.org/10.1007/978-1-84996-254-4_10
Publisher Name: Springer, London
Print ISBN: 978-1-84996-253-7
Online ISBN: 978-1-84996-254-4
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