Abstract
Angle is one of the most fundamental quantities for precision nanometrology. Angle sensors based on the principle of autocollimation, which are conventionally called autocollimators, can accurately measure small tilt angles of a light-reflecting flat surface [1]. Autocollimators have a long history of being used in metrology laboratories for calibration of angle standards, such as polygons, rotary index tables and angle gage blocks. They are also traditionally used in machine shops for surface profile measurements of straightedges, machine tool guideways, precision surface plates, as well as for measurement of tilt error motions of translational stages [2].
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(2010). Angle Sensor for Measurement of Surface Slope and Tilt Motion. In: Precision Nanometrology. Springer Series in Advanced Manufacturing, vol 0. Springer, London. https://doi.org/10.1007/978-1-84996-254-4_1
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DOI: https://doi.org/10.1007/978-1-84996-254-4_1
Publisher Name: Springer, London
Print ISBN: 978-1-84996-253-7
Online ISBN: 978-1-84996-254-4
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