Abstract
In the previous chapter, we discussed elastic scattering of the electron beam in which the incident electron lost no energy as it interacted with the specimen. Inelastic or energy-loss electrons are equally important and we’ll discuss the processes here, but leave the applications till later. Why are we interested in inelastic scatter? Well, inelastic scattering generates a whole range of signals, each of which can tell us more about the specimen than we can find out from the elastic electrons. The most important signals are the X-rays, inelastic electrons, and secondary electrons, and so we’ll emphasize how these signals arise. We will also discuss why these specific signals are useful to materials scientists.
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References
General References
Inokuti, M. (1971) Rev. Mod. Phys. 43, 297.
Mott, N.F., Massey, H.S.W. (1965) The Theory of Atomic Collisions, Oxford University Press, New York.
Wang, Z.L. (1995) Elastic and Inelastic Scattering in Electron Diffraction and Imaging, Plenum Press, New York. Covers more than inelastically scattered electrons using a more rigorous mathematical approach than in this chapter.
Specific References
Auger, P. (1925) J. Phys. Rad. 6, 20.
Bearden, J.A. (1964) NYO-10586, US Atomic Energy Commission, Oak Ridge, Tennessee.
Bethe, H.A. (1930) Ann. der Phys. (Leipzig) 5, 325.
Butler, E.P., Hale, K.F. (1981) “Dynamic Experiments in the Electron Microscope,” in Practical Methods in Electron Microscopy, 9 (Ed. A.M. Glauert ), Elsevier, Amsterdam.
Dyson, R. (1990) X-rays in Atomic and Nuclear Physics, Cambridge University Press, Cambridge, United Kingdom.
Ferrel, C.R. (1956) Phys. Rev. 101, 554.
Hobbs, L.W. (1979) in Introduction to Analytical Electron Microscopy (Eds. J.J. Hren, J.I. Goldstein, and D.C. Joy), p. 437, Plenum Press, New York.
Joy, D.C. (1984) J. Microsc. 136, 241.
Joy, D.C., Goldstein, J.I., Romig, A.D. Jr., Eds. (1986) Principles of Analytical Electron Microscopy, p. 1, Plenum Press, New York.
Kramers, M.A. (1923) Phil. Mag. 46, 836.
Laidler, J.J., Mastel, B. (1975) in Physical Aspects of Electron Microscopy and Microbeam Analysis (Eds. B.M. Siegel and D.R. Beaman), p. 103, Wiley, New York.
Moseley, H.E.G. (1914) Phil. Mag. 26, 1024.
Powell, C.J. (1976) Rev. Mod. Phys. 48, 33.
Sawyer, L.C., Grubb, D.T. (1987) Polymer Microscopy, Chapman and Hall, New York.
Williams, K.L. (1990) X-ray Spectrometry, Allen and Unwin, London.
Zaluzec, N.J., Mansfield, J.F. (1987) in Intermediate Voltage Microscopy and Its Application to Materials Science (Ed. K. Rajan), p. 9, Philips Electron Optics Publishing Group, Mahwah, New Jersey.
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© 1996 Springer Science+Business Media New York
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Williams, D.B., Carter, C.B. (1996). Inelastic Scattering and Beam Damage. In: Transmission Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2519-3_4
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DOI: https://doi.org/10.1007/978-1-4757-2519-3_4
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