Skip to main content

Abstract

The current microscopic understanding of the interface chemistry and structure of Schottky barrier formation is described in this chapter. This chapter builds upon the physics of Schottky barriers presented in Chapter 1 and provides some background to the fabrication of Schottky barriers described in Chapter 3. The more recent investigations are discussed and the current status of the detailed picture we now have for metal-semiconductor barriers on group IV, III–V, and II–VI semiconductors is reviewed. In particular, this chapter emphasizes the pervasive importance of interfacial interdiffusion and interactions in metal-semiconductor systems. As will become apparent from the discussion below, many intrinsic aspects of Schottky barrier formation have been elucidated, but much detail remains to be unraveled in specific metal-semiconductor systems.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Subscribe and save

Springer+ Basic
$34.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or eBook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 89.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 119.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Similar content being viewed by others

References

  1. W. Schottky, Z. Phys. 113, 367 (1939).

    ADS  MATH  Google Scholar 

  2. N.F. Mott, Proc. Cambridge Phil. Soc. 34, 568 (1938).

    ADS  Google Scholar 

  3. J. Bardeen, Phys. Rev. 71, 717 (1947).

    ADS  Google Scholar 

  4. S. Kurtin, T.C. McGill, and C.A. Mead, Phys. Rev. Lett. 22, 1433 (1970).

    ADS  Google Scholar 

  5. S.M. Sze, Physics of Semiconductor Devices, 2nd ed., Wiley-Interscience, New York (1981).

    Google Scholar 

  6. H.K. Henisch, Rectifying Metal Contacts, Clarendon Press, Oxford (1957).

    Google Scholar 

  7. D.R. Frankl, Physics of Semiconductor Devices, Pergamon Press, New York (1967).

    Google Scholar 

  8. E.H. Rhoderick, Metal Semiconductor Contacts, Clarendon Press, Oxford (1980).

    Google Scholar 

  9. L.J. Brillson, Surface Science Reports, Vol 2 (1982). This review contains over 1000 references.

    Google Scholar 

  10. E.H. Nicollian and A.K. Sinha, in Thin FilmsInter diffusion and Reactions, Chap. 13, (J.M. Poate, K.N. Tu, and J.W. Mayer, eds.), John Wiley and Sons, New York (1978).

    Google Scholar 

  11. A.Y. Cho and J.R. Authur, Prog. Solid State Chem. 10, 157 (1975).

    Google Scholar 

  12. R.Z. Bachrach, Crystal Growth, 2nd ed. Chap. 6, (Brian Pamplin, ed.), Pergamon Press, New York (1980).

    Google Scholar 

  13. R. Ludeke, L.L. Chang, and L. Esaki, Appl. Phys. Lett. 23, 202 (1973).

    ADS  Google Scholar 

  14. J.C. Bean and J.M. Poate, Appl Phys. Lett. 37, 643 (1980).

    ADS  Google Scholar 

  15. C.A. Mead, Solid State Electron. 9, 1023 (1966).

    ADS  Google Scholar 

  16. A. Thanailakis, J. Phys. C: Solid State Phys. 8, 655 (1975).

    ADS  Google Scholar 

  17. S.G. Louie, J.R. Chelikowsky, and M.L. Cohen, Phys. Rev. B 15, 2154 (1977).

    ADS  Google Scholar 

  18. J.E. Rowe, J. Vac. Sci. Technol. 13, 798 (1976).

    ADS  Google Scholar 

  19. I. Lindau, P.W. Chye, C.M. Garner, P. Pianetta, C.Y. Su, and W.E. Spicer, J. Vac. Sci. Technol. 15, 1332 (1978).

    ADS  Google Scholar 

  20. J.J. Scheer and J. van Laar, Surf. Sci. 18, 130 (1969).

    ADS  Google Scholar 

  21. A.M. Cowley and S.M. Sze, J. Appl. Phys. 36, 3212 (1965).

    ADS  Google Scholar 

  22. M.L. Cohen, J. Vac. Sci. Technol. 16, 1135 (1979).

    ADS  Google Scholar 

  23. L.J. Brillson, Phys. Rev. Lett. 40, 260 (1978).

    ADS  Google Scholar 

  24. J.M. Andrews and J.C. Phillips, Phys. Rev. Lett. 35, 56 (1975).

    ADS  Google Scholar 

  25. M. Schluter, Phys. Rev. B 15, 5044 (1978).

    ADS  Google Scholar 

  26. G. Ottaviani, J. Vac. Sci. Technol. 18, 924 (1981).

    ADS  Google Scholar 

  27. L.J. Brillson, Phys. Rev. Lett. 40, 260 (1978).

    ADS  Google Scholar 

  28. J.O. McCaldin, T.C. McGill, and C.A. Mead, Phys. Rev. Lett. 36, 56 (1976);

    ADS  Google Scholar 

  29. J.O. McCaldin, T.C. McGill, and C.A. Mead, J. Vac. Sci. Technol. 13, 802 (1976).

    ADS  Google Scholar 

  30. R.Z. Bachrach, J. Vac. Sci. Technol. 15, 1340 (1978).

    ADS  Google Scholar 

  31. J. van Laar and J.J. Scheer, Surf. Sci. 8, 342 (1967).

    ADS  Google Scholar 

  32. M. Henzler, Surf. Sci. 36, 109 (1973).

    ADS  Google Scholar 

  33. P.W. Chye, I.A. Babalola, T. Sukegawa, and W.E. Spicer, Phys. Rev. Lett. 35, 1602 (1975).

    ADS  Google Scholar 

  34. R.H. Williams, R.R. Varma, and A. McKinley, J. Phys. C: Solid State Phys. 10, 4545 (1977).

    ADS  Google Scholar 

  35. L.J. Brillson, Surf. Sci. 69, 62 (1977).

    ADS  Google Scholar 

  36. J.B. Pendry, Low-Energy Electron Diffraction, Academic Press, London (1974);

    Google Scholar 

  37. G.A. Somorjai and M.A. van Hove, in Structure and Bonding, Springer-Verlag, Berlin (1979);

    Google Scholar 

  38. J.J. Lander, Prog. Solid State Chem. 2, 26 (1965).

    Google Scholar 

  39. D.W. Pashley, Epitaxial Growth, Part A (J.W. Mathews, ed.), Academic Press, New York (1975).

    Google Scholar 

  40. A. Bianconi, Appl. Surf. Sci. 6, 392 (1981);

    Google Scholar 

  41. T.H. Hayes and J.B. Boyce, Solid State Physics, pp. 173–351, Academic Press, New York (1982).

    Google Scholar 

  42. See Ref. 9 Section 3.3.2 for a good discussion.

    Google Scholar 

  43. J.W. Mayer and J.M. Poate, Depth profiling techniques, Thin FilmsInterdiffusion and Reactions, Chap 6, (J.M. Poate, K.N. Tu, and J.W. Mayer, eds.), John Wiley and Sons, New York (1978).

    Google Scholar 

  44. L.C. Feldman and P. Eisenberger, Science V 214, N4518, 300 (1981).

    ADS  Google Scholar 

  45. W.C. Marra, P. Eisenberger, and A.Y. Cho, J. Appl. Phys. 50, 6927 (1979).

    ADS  Google Scholar 

  46. P.M. Petroff, J. Vac. Sci. Technol. 14, 973 (1977).

    ADS  Google Scholar 

  47. C.C. Chang, in Characterization of Solid Surfaces (P.F. Kane and G.B. Larabee, eds.), Plenum Press, New York (1974).

    Google Scholar 

  48. H.C. Gatos and J. Lagowski, J. Vac. Sci Technol. 10, 130 (1973). See also Ref. 9, Section 3.3.1;

    ADS  Google Scholar 

  49. J.M. Palau, E. Testemale, and L. Lassabatere, J. Vac. Sci. Technol 19, 192 (1981).

    ADS  Google Scholar 

  50. I. Lindau and W.E. Spicer, in Synchrotron Radiation Research, p. 159, Plenum Press, New York (1980);

    Google Scholar 

  51. L. Ley and M. Cardona, Photoemission in Solids, Topics in Applied Physics, Vol. 27, Springer-Verlag, New York (1979).

    Google Scholar 

  52. F.C. Brown, R.Z. Bachrach, and N. Lien, Nucl. Instr. Methods 152, 73 (1978);

    Google Scholar 

  53. F.C. Brown, R.Z. Bachrach, S.B. hagstrom, N. Lien, and C.H. Pruett, Vacuum Ultraviolet Radiation Physics, p. 785 (E.E. Koch, R. Haensel, and C. Kunz, eds.), Pergamon, Vieweg (1974).

    Google Scholar 

  54. V. Heine, Phys. Rev. 138, A1689 (1965).

    ADS  Google Scholar 

  55. J. van Laar and A. Huijser, J. Vac. Sci. Technol. 13, 769 (1975).

    Google Scholar 

  56. R.Z. Bachrach and B.S. Krusor, J. Vac. Sci. Technol 18, 756 (1981).

    ADS  Google Scholar 

  57. A. Amith and P. Mark, J. Vac. Sci. Technol. 15, 1344 (1978).

    ADS  Google Scholar 

  58. J.M. Palau, E. Testemale, I. Ismail, and L. Lassabatere, Solid State Electron. 25(4), 285 (1981).

    Google Scholar 

  59. C.B. Duke, Crit. Rev. Solid State Mater. Sci. 8, 69 (1978).

    ADS  Google Scholar 

  60. D.J. Chadi, J. Vac. Sci. Technol. 17, 989 (1980).

    ADS  Google Scholar 

  61. D.E. Eastman, J. Vac. Sci. Technol. 17, (1979).

    Google Scholar 

  62. C.B. Duke, R.J. Meyer, and P. Mark, J. Vac. Sci. Technol. 17, 971 (1980).

    ADS  Google Scholar 

  63. A.Y. Cho and P.D. Dernier, J. Appl. Phys. 49, 3328 (1978).

    ADS  Google Scholar 

  64. D.J. Chadi, J. Vac. Sci. Technol. 16, 1290 (1979).

    ADS  Google Scholar 

  65. R. Feder, W. Monch, and P.P. Auer, J. Phys. C 12, 1179 (1979).

    Google Scholar 

  66. D. Haneman, Adv. Phys. 31, 165 (1982).

    ADS  Google Scholar 

  67. K.C. Pandey, Phys. Rev. Lett. 47, 1913 (1981).

    ADS  Google Scholar 

  68. D.J. Chadi, Surf. Sci. 99, 1 (1980);

    ADS  Google Scholar 

  69. D.J. Chadi, Phys. Rev. B 26, 4762 (1982).

    ADS  Google Scholar 

  70. M.J. Cardillo, Phys. Rev. B 23, 4279 (1981).

    ADS  Google Scholar 

  71. D.J. Chadi, Phys. Rev. B 19, 2074 (1979).

    ADS  Google Scholar 

  72. A. Huijser and J. van Laar, Surf. Sci. 52, 202 (1975).

    ADS  Google Scholar 

  73. A.Y. Cho, J. Appl. Phys. 47, 2841 (1976).

    ADS  Google Scholar 

  74. R.Z. Bachrach, Prog. Crys. Growth Charact. 2, 115 (1979).

    Google Scholar 

  75. R.Z. Bachrach, R.S. Bauer, G.V. Hansson, and P. Chiaradia, J. Vac. Sci. Technol. 18, 797 (1981).

    ADS  Google Scholar 

  76. D.J. Chadi, C. Tanner, and J. Ihm, Surf. Sci. 120, 1425 (1982).

    Google Scholar 

  77. G.F. Prinz, J.M. Ferrari, and M. Goldenberg, Appl. Phys. Lett. 40, 155 (1982).

    ADS  Google Scholar 

  78. D.J. Chadi and R.Z. Bachrach, J. Vac. Sci. Technol. 16, 1159 (1979).

    ADS  Google Scholar 

  79. J. Ihm and J.D. Joannopoulos, Phys. Rev. B 26, 4429 (1982).

    ADS  Google Scholar 

  80. J.J. Barton, C.A. Swarts, W.A. Goddard, and T.C. McGill, J. Vac. Sci. Technol. 17, 164 (1980).

    ADS  Google Scholar 

  81. A. Zunger, Phys. Rev. B 24, 4372 (1981). This work provides extensive references to other work on this subject.

    ADS  Google Scholar 

  82. L.J. Brillson, R.Z. Bachrach, R.S. Bauer, and J.C. McMenamin, Phys. Rev. Lett. 42, 397 (1979).

    ADS  Google Scholar 

  83. R.Z. Bachrach and A. Bianconi, J. Vac. Sci. Technol. 15, 525 (1978).

    ADS  Google Scholar 

  84. R.Z. Bachrach and R.S. Bauer, J. Vac. Sci. Technol. 16, 525 (1979).

    Google Scholar 

  85. P.R. Skeath, I. Lindau, P. Pianetta, P.W. Chye, C.Y. Su, and W.E. Spicer, J. Electron. Spectrosc. 17, 259 (1979).

    Google Scholar 

  86. A. Zunger, J. Vac. Sci. Technol. 19, 690 (1981).

    ADS  Google Scholar 

  87. R. Ludeke and Landgren, J. Vac. Sci. and Technol. 19, 667 (1981).

    ADS  Google Scholar 

  88. J.R. Chelikowski, S.G. Louie, and M.L. Cohen, Solid State Commun. 20, 641 (1976).

    ADS  Google Scholar 

  89. H.I. Zhang and M. Schluter, Phys. Rev. B 18, 1923 (1978).

    ADS  Google Scholar 

  90. K. Mednick and L. Kleinman, Phys. Rev. B 22, 5768 (1980);

    ADS  Google Scholar 

  91. E.B. Caruthers, L. Kleinman, and G.P. Alldredge, Phys. Rev. B 9, 3330 (1974).

    ADS  Google Scholar 

  92. I. Batra and Herman, J. Vac. Sci. Technol. (1983).

    Google Scholar 

  93. K.N. Tu and J.W. Mayer, Silicide formation, in Thin FilmsInterdiffusion and Reactions, Chap. 10 (J.M. Poate, K.N. Tu, and J.W. Mayer, eds.), John Wiley and Sons, New York (1978).

    Google Scholar 

  94. A. Christou and H.M. Day, J. Appl. Phys. 47, 4217 (1976).

    ADS  Google Scholar 

  95. R.Z. Baehrach, R.S. Bauer, J.C. McMenamin, and A. Bianconi, AIP Conf. Ser. 43, 1073 (1979).

    Google Scholar 

  96. G.P. Schwartz and A.Y. Cho, J. Vac Sci. Technol. 19, 607 (1981).

    ADS  Google Scholar 

  97. X.F. Zeng and D.D.L. Chung, Thin Solid Films 93, 207 (1982);

    ADS  Google Scholar 

  98. X.F. Zeng and D.D.L. Chung, J. Vac. Sci. Technol. 21, 611 (1982).

    ADS  Google Scholar 

  99. J.M. Vandenberg and R.A. Hamm, J. Vac. Sci. Technol. 19, 84 (1981).

    ADS  Google Scholar 

  100. L.J. Brillson, R.S. Bauer, R.Z. Baehrach, and G.V. Hansson, Phys. Rev. B 23, 6204 (1981).

    ADS  Google Scholar 

  101. L.J. Brillson, C.F. Brucker, N.G. Stoffel, A.D. Katnani, and G. Margaritondo, Phys. Rev. Lett. 46, 838 (1981).

    ADS  Google Scholar 

  102. P.M. Petroff, L.C. Feldman, A.Y. Cho, and R.S. Williams, J. Appl. Phys. 52, 7317 (1981).

    ADS  Google Scholar 

  103. R.S. Nowicki and M.A. Nicolet, Thin Solid Films 96 317 (1982).

    ADS  Google Scholar 

  104. L.J. Brillson, Phys. Rev. Lett. 38, 735 (1977).

    ADS  Google Scholar 

  105. J.C. Phillips, J. Vac. Sci. Technol. 11, 947 (1974).

    ADS  Google Scholar 

  106. J.M. Palau, A. Ismail, E. Testemale, and L. Lassabatere, Proceedings 16th International Conference on the Physics of Semiconductors (1982).

    Google Scholar 

  107. J.M. Rowe, S.B. Christman, and H. Margaritondo, Phys. Rev. Lett. 35, 1471 (1975).

    ADS  Google Scholar 

  108. D.E. Eastman and W.D. Grobman, Phys. Rev. Lett. 28, 1378 (1978);

    ADS  Google Scholar 

  109. L.F. Wagner and W.E. Spicer, Phys. Rev. Lett. 28, 1381 (1972).

    ADS  Google Scholar 

  110. R.H. Williams, R.R. Varma, and A. McKinley, J. Phys. C: Solid State Phys. 10, 4545 (1977).

    ADS  Google Scholar 

  111. A.J. Bennett and C.B. Duke, Phys. Rev. 160, 541 (1967);

    ADS  Google Scholar 

  112. A.J. Bennett and C.B. Duke, Phys. Rev. 162, 578 (1967).

    ADS  Google Scholar 

  113. B. Pellegrini, Phys. Rev. B 7, 5299 (1973).

    ADS  Google Scholar 

  114. J.C. Phillips, J. Vac. Sci. Technol. 11, 947 (1974).

    ADS  Google Scholar 

  115. M.S. Daw and D.L. Smith, Phys. Rev. B 20, 5150 (1979);

    ADS  Google Scholar 

  116. M.S. Daw and D.L. Smith, J. Vac. Sci. Technol. 17, 1028 (1980).

    ADS  Google Scholar 

  117. R.E. Allen and J.D. Dow, Phys. Rev. B 25, 1423 (1982).

    ADS  Google Scholar 

  118. I. Lindau and W.E. Spicer, Electron Spectroscopy: Theory, Techniques, and Applications, Vol. 4, Chap. 4 (C.R. Brundle and A.D. Baker, eds.), Academic Press, New York (1981).

    Google Scholar 

  119. W.E. Spicer, P.W. Chye, P.R. Skeath, C.Y. Su, and I. Lindau, J. Vac. Sci. Technol. 16, 1422 (1979).

    ADS  Google Scholar 

  120. D. Bolmont, P. Chen, V. Mercier, and C.A. Sebenne, Proceedings 16th International Conference on the Physics of Semiconductors (1982).

    Google Scholar 

  121. M.L. Cohen, Adv. Electron. Electron Phys. 51, 1 (1980).

    Google Scholar 

  122. J.J. Lander and J. Morrison, J. Appl. Phys. 36, 1706 (1965).

    ADS  Google Scholar 

  123. G.V. Hansson, R.Z. Baehrach, R.S. Bauer, and P. Chiaradia, Phys. Rev. Lett. 46, 1033 (1981).

    ADS  Google Scholar 

  124. G.V. Hansson, R.Z. Baehrach, R.S. Bauer, and P. Chiaradia, J. Vac. Sci. Technol. 18, 550 (1981).

    ADS  Google Scholar 

  125. S.S. Lau and W.F. van der Weg, Solid phase epitaxy, in Thin FilmsInterdiffusion and Reactions, Chap. 12 (J.M. Poate, K.N. Tu, and J.W. Mayer, eds.), John Wiley and Sons, New York (1978).

    Google Scholar 

  126. D.J. Chadi, R.S. Bauer, R.H. Williams, G.V. Hansson, R.Z. Baehrach, J.C. Mikkelsen, Jr. F. Houzay, G.M. Guichar, R. Pinchaux, and Y. Petroff, Phys. Rev. Lett. 44, 799 (1980).

    ADS  Google Scholar 

  127. N.W. Cheung, P.J. Grunthaner, F.J. Grunthaner, J.W. Mayer, and B.M. Ullrich, J. Vac. Sci. Technol. 18, 917 (1981).

    ADS  Google Scholar 

  128. S.P. Muraka, J. Vac. Sci. Technol. 17, 775 (1980).

    ADS  Google Scholar 

  129. J.L. Freeouf, Solid State Commun. 33, 1059 (1980).

    ADS  Google Scholar 

  130. P.E. Schmid, P.S. Ho, H. Foll, and G.W. Rubloff, J. Vac. Sci. Technol. 18,937 (1981);

    ADS  Google Scholar 

  131. P.E. Schmid, P.S. Ho, H. Foll, and T.Y. Tan, Phys. Rev. B 28, 4593 (1983).

    ADS  Google Scholar 

  132. P.R. Skeath, I. Lindau, P.W. Chye, C.Y. Su, and W.E. Spicer, J. Vac. Sci. Technol. 16, 1143 (1979).

    ADS  Google Scholar 

  133. J.M. Woodall, C. Lanza, and J.L. Freeouf, J. Vac. Sci. Technol. 15, 1436 (1978);

    ADS  Google Scholar 

  134. J.M. Woodall and J.L. Freeouf, J. Vac. Sci. Technol. 19, 794 (1981).

    ADS  Google Scholar 

  135. G.W. Gobelli and F.G. Allen, Semiconductors and Semimetals, Vol.2, Chap. 11 (R.K. Willardson and Albert C. Beer, eds.), Academic Press, New York (1966).

    Google Scholar 

  136. R.H. Williams, J. Vac. Sci. Technol. 18, 929 (1981).

    ADS  Google Scholar 

  137. R.Z. Bachrach, R.S. Bauer, P. Chiaradia, and G.V. Hansson, J. Vac. Sci. Technol. 19, 335 (1981).

    ADS  Google Scholar 

  138. R.S. Bauer, R.Z. Bachrach, G.V. Hansson, and P. Chiaradia, J. Vac. Sci. Technol. 19, 674 (1981).

    ADS  Google Scholar 

  139. C.B. Duke, A. Paton, R.J. Meyer, L.J. Brillson, A. Kahn, D. Kanani, J. Carelli, J.L. Yeh, G. Margaritondo, and A.D. Katnani, Phys. Rev. Lett. 46, 440 (1981).

    ADS  Google Scholar 

  140. P. Skeath, I. Lindau, C.Y. Su, P.W. Chye, and W.E. Spicer, J. Vac. Sci. Technol. 17, 869 (1980).

    ADS  Google Scholar 

  141. R.R. Daniels, A.D. Katnani, Te-Xiu Zhao, G. Margaritondo, and A. Zunger, Phys. Rev. Lett. 49, 899 (1982).

    ADS  Google Scholar 

  142. R. Ludeke and G. Landgren, J. Vac. Sci. Technol. 19, 667 (1981).

    ADS  Google Scholar 

  143. J. Massies, J. Chaplart, and N.T. Linh, Solid State Commun. 32, 707 (1979).

    ADS  Google Scholar 

  144. J. Massies and N.T. Linh, Surf. Sci. 114, 147 (1981).

    Google Scholar 

  145. J.S. Best, Appl. Phys. Lett. 34, 522 (1979).

    ADS  Google Scholar 

  146. P.W. Chye, I. Lindau, P. Pianetta, C.M. Garner, C.Y. Su, and W.E. Spicer, Phys. Rev. B 18, 5545 (1978).

    ADS  Google Scholar 

  147. H.H. Wieder, J. Vac. Sci. Technol. 15, 1498 (1978).

    ADS  Google Scholar 

  148. R.H. Williams, V. Montgomery, R.R. Varma, and A. McKinley, J. Phys. C 11, 1989 (1978).

    ADS  Google Scholar 

  149. L.J. Brillson, C.F. Brucker, A.D. Katnani, and N.G. Stoffel, Appl. Phys. Lett. 37, 917 (1980).

    ADS  Google Scholar 

  150. C.A. Mead, Appl. Phys. Lett. 6, 103 (1965).

    ADS  Google Scholar 

  151. C.F. Brucker and L.J. Brillson, J. Vac. Sci. Technol. 18, 787 (1981).

    ADS  Google Scholar 

  152. L.J. Brillson, J. Vac. Sci. Technol. 16, 1137 (1979).

    ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1984 Plenum Press, New York

About this chapter

Cite this chapter

Bachrach, R.Z. (1984). Interface Chemistry and Structure of Schottky Barrier Formation. In: Sharma, B.L. (eds) Metal-Semiconductor Schottky Barrier Junctions and Their Applications. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-4655-5_2

Download citation

  • DOI: https://doi.org/10.1007/978-1-4684-4655-5_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-4657-9

  • Online ISBN: 978-1-4684-4655-5

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics