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UV/Ozone Cleaning of Surfaces: A Review

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Surface Contamination

Abstract

The ultraviolet (UV)/ozone cleaning procedure is an effective method of removing a variety of contaminants from surfaces. It is a simple-to-use dry process which is inexpensive to set up and operate. It can rapidly produce clean surfaces, in air, at ambient temperatures. By placing properly precleaned surfaces within a few millimeters of an ozone producing UV source, the process can produce clean surfaces in less than one minute.

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Authors and Affiliations

  1. US Army Electronics Technology and Devices Laboratory, ERADCOM, Fort Monmouth, New Jersey, 07703, USA

    John R. Vig

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  1. John R. Vig
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Editors and Affiliations

  1. East Fishkill Facility, IBM Corporation, Hopewell Junction, New York, USA

    K. L. Mittal

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© 1979 Plenum Press, New York

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Vig, J.R. (1979). UV/Ozone Cleaning of Surfaces: A Review. In: Mittal, K.L. (eds) Surface Contamination. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-3506-1_16

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  • DOI: https://doi.org/10.1007/978-1-4684-3506-1_16

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-3508-5

  • Online ISBN: 978-1-4684-3506-1

  • eBook Packages: Springer Book Archive

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