Abstract
We review the techniques of in-situ transmission electron microscopy during thin film growth. The method has value because it permits visualization both of surface structure and internal film microstructure. This allows association between these two critical features in thin film growth. Although examples are mainly included from the work of the author, there is a brief review of other work in the past and at present.
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Gibson, J.M. (1997). In-Situ Transmission Electron Microscopy of Thin Film Growth. In: Gai, P.L. (eds) In-Situ Microscopy in Materials Research. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-6215-3_7
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DOI: https://doi.org/10.1007/978-1-4615-6215-3_7
Publisher Name: Springer, Boston, MA
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