Abstract
Superconducting YBa2Cu3Ox thin films have been prepared by annealing multilayers deposited by sequential rf diode sputtering of Y2O3, BaF2, and CuO targets. Reactive sputtering of BaF2 in an Ar/O2 atmosphere yields films containing primarily Ba and O. The F concentration in the as-deposited multilayers is so low that wet-O2 annealing, which is necessary to remove F from films deposited from a BaF2 source by other techniques, is not required. The superconducting phase is formed by post-annealing in dry O2 for one hour at 850°C and two hours at 500°C. Films about 1 μm thick on yttria-stabilized zirconia substrates have a zero-resistance transition temperature of 90 K. Pattern definition is accomplished by using a photoresist mask followed by ion milling in an Ar+ beam. Exposure to water is not detrimental to film properties, but some damage due to Ar+ ions is observed after patterning.
This work was supported by the Department of the Air Force and the Defense Advanced Research Projects Agency
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© 1990 Plenum Press, New York
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Bhushan, M., Strauss, A.J. (1990). Preparation and Patterning of YBa2Cu3Ox Thin Films. In: Reed, R.P., Fickett, F.R. (eds) Advances in Cryogenic Engineering Materials . An International Cryogenic Materials Conference Publication, vol 36. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-9880-6_64
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DOI: https://doi.org/10.1007/978-1-4613-9880-6_64
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