Abstract
With the EPMA and the SEM one can obtain quantitative analyses of ~1-µ3 regions of bulk samples using a nondestructive x-ray technique. For samples in the form of thin foils and sections of organic material, the size of the analyzed microvolume is reduced to about one tenth of the value for bulk samples. For metals and alloys the ZAF technique is usually employed. Pure element or alloy standards can be used and the surfaces of the samples and standards must be properly prepared and analyzed under identical operating conditions. For geological samples the a factor or empirical technique is usually employed. For this class of samples secondary x-ray fluorescence is usually not significant and oxide standards of similar atomic number as the sample are used. Biological samples are often adversely affected by the impinging electron beam. It is important to ensure that the standards are in the same form and matrix as the specimen. The purpose of this chapter is to describe in some detail the various methods by which quantitative analyses can be obtained for inorganic, metallic, and biological samples in the form of bulk specimens, small particles, thin films, sections, and fractured surfaces.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 1981 Plenum Press,
About this chapter
Cite this chapter
Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Fiori, C., Lifshin, E. (1981). Quantitative X-Ray Microanalysis. In: Scanning Electron Microscopy and X-Ray Microanalysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-3273-2_7
Download citation
DOI: https://doi.org/10.1007/978-1-4613-3273-2_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-3275-6
Online ISBN: 978-1-4613-3273-2
eBook Packages: Springer Book Archive