Abstract
Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in the chapter on electronbeam-specimen interactions (Chapter 3), which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these signals as well as converting them into a useful form for qualitative and quantitative analysis.
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© 1981 Plenum Press, New York
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Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Fiori, C., Lifshin, E. (1981). X-Ray Spectral Measurement: WDS and EDS. In: Scanning Electron Microscopy and X-Ray Microanalysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-3273-2_5
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DOI: https://doi.org/10.1007/978-1-4613-3273-2_5
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-3275-6
Online ISBN: 978-1-4613-3273-2
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