Skip to main content

Surface Image Measurements

  • Chapter
Computer-Assisted Microscopy
  • 244 Accesses

Abstract

In the preceding chapters, the assumption has been made in most cases that images are planar. Either they result from viewing a cut section through some opaque body, or they are the projection of objects onto a plane. Most of our experience in the real world is, of course, with neither of these restricted types of images. While still stopping well short of the complexity of real-world images, which contain a variety of surfaces and objects with great depth, it can be important and useful to relax the criterion of planar surfaces somewhat. There are many interesting surfaces that are approximately flat on a large scale, but locally quite rough. Examples range from the surface of integrated circuits, where strips of metallization or photoresist produce surface relief, to skin with its folds and wrinkles, to the surfaces of planets, with such relatively minor irregularities as mountains and oceans.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Subscribe and save

Springer+ Basic
$34.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or eBook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  • D.K. Atwood, D.C. Joy (1987) Improved Accuracy for SEM Linewidth Measurements Proc. SPIE 775 159–165

    Google Scholar 

  • W. Beil, I.C. Carlsen, V. Desai, L. Reimer (1989) Three-Dimensional Digital Surface Reconstruction in Scanning Electron Microscopy using Signals of a Multiple Detector System, European Journal of Cell Biology 48 Supplement 25,13–16

    Google Scholar 

  • A.C. Bovik, M. Clark, W.S. Geisler (1987) Computational Texture Analysis using Localized Spatial Filtering IEEE, Proc. of Workshop on Computer Vision, Dec 1987, Miami FL, 201–206

    Google Scholar 

  • R.A. Brooks (1981) Model-based Three Dimensional Interpretations of Two Dimensional Images Proc. 7th DCAI, Vancouver BC, 619-624

    Google Scholar 

  • R.A. Brooks (1983) Model-Based 3-D Interpretation of 2-D Images IEEE Trans. Patt. Recog. Mach. Intell. PAMI- 5#2 140–150

    Article  CAS  Google Scholar 

  • I.C. Carlsen (1985) Reconstruction of True Surface Topographies in Scanning Electron Microscopes Using Backscattered Electrons Scanning 7 169–177

    Google Scholar 

  • B. Carrihill, R. Hummel (1985) Experiments with the Intensity Ratio Depth Sensor Computer Vision, Graphics and Image Processing 32 337–358

    Article  Google Scholar 

  • P. Corcuff, J. deRigal, J.L. Leveque, S. Makki, P. Agache (1983) Skin Relief and Aging J. Soc. Cosmet. Chem. 34 177–190

    Google Scholar 

  • M. Coster, J-L. Chermant (1985) Precis D’Analyse D’lmages CNRS, Paris

    Google Scholar 

  • L.S. Davis, S.A. Johns, J.K. Aggarwal (1979) Texture Analysis using Generalized Co-Occurrence Matrices IEEE Trans Patt. Recog. and Mach. Intell. PAMI- 1 # 3 251

    Article  CAS  Google Scholar 

  • J. Feder (1988) Fractals Plenum Press, New York NY

    Google Scholar 

  • R.L.C. Flemmer, N.N. Clark (1987) Computer-Based Algorithms for Fractal Analysis of Surfaces citation to verbal presentation provided by B.H. Kaye

    Google Scholar 

  • J. Frosien (1986) Digital image processing for micrometrology, J. Vac. Sci. Tech. B, 4 #1, 261–264

    Article  Google Scholar 

  • R.M. Haralick (1978) Statistical and Structural Approaches to Texture Proc 4th Intl Joint Conf Patt Recog, Kyoto, p. 45–69

    Google Scholar 

  • R.M. Haralick, K. Shanmugam, I. Dinstein (1973) Textural Features for Image Classification IEEE Trans. Syst. Man. Cybern., SMC- 3 610–621

    Article  Google Scholar 

  • B.K.P. Horn (1970) Shape from Shading: A method for obntaining the shape of a smooth opaque object from one view (Al Tech Report 79) Mass. Inst. Tech., Project MAC, Cambridge, MA

    Google Scholar 

  • B.K.P. Horn, M.J. Brooks (1986) The Variational Approach to Shape from Shading Computer Vision, Graphics and Image Processing 33 174–208

    Article  Google Scholar 

  • K. Ikeuchi, B.K.P. Horn (1981) Numerical shape from shading and occluding boundaries Artificial Intelligence (special issue on computer vision) 15,141–184

    Google Scholar 

  • M.E. Jernigan, F. D’Astous (1984) Entropy Based Texture Analysis in the Spatial Frequency Domain IEEE Trans. Patt. Anal. Mach. Intell. PAMI- 6. 237

    Article  CAS  Google Scholar 

  • D.C. Joy (1987a) A model for secondary and backscattered electron yields J. Microsc. 147.51

    Article  CAS  Google Scholar 

  • D.C. Joy (1987b) Image simulation for the SEM Microbeam Analysis 1987 (R. Geiss, ed.) San Francisco Press, 105-109

    Google Scholar 

  • A.E. Kayaalp, R.C. Jain (1987a) Model based inspection of integrated circuit patterns using the scanning electron microscope (SEM) Proc. SPIE 775 172–179

    Google Scholar 

  • A.E. Kayaalp, R.C. Jain (1987b) Using SEM stereo to extract semiconductor wafer pattern topography Proc. SPIE 775,18–26

    Google Scholar 

  • B.H. Kaye (1984) Multifractal description of a rugged fineparticle profile Particle Characterization 1 14–21

    Article  Google Scholar 

  • B.H. Kaye (1986) Proc. Particle Technology Conf., Nurnberg

    Google Scholar 

  • J.R. Kender (1979) Shape from Texture: An aggregation transform that maps a class of textures into surface orientation Proceedings of the Sixth International Joint Conference on Artificial Intelligence, Tokyo, Japan

    Google Scholar 

  • R.B. Laibowitz, B.B. Mandelbrot, D.E. Passoja (ed.) (1985) Fractal Aspects of Materials Mat. Res. Soc., Pittsburgh

    Google Scholar 

  • L.I. Larking, P.J. Burt (1983) Multi-Resolution Texture Energy Measures Proc IEEE Comput. Soc. Conf. Vision Patt Recog Wash DC, p. 519

    Google Scholar 

  • H.C. Lee, K.S. Fu (1983) Three-Dimensional Shape from Contour and Selective Confirmation Computer Vision, Graphics and Image Processing 22 177–193

    Article  Google Scholar 

  • B.B. Mandelbrot (1983) The Fractal Geometry of Nature Freeman, New York

    Google Scholar 

  • J.J. Mecholsky, D.E. Passoja (1985) Fractals and Brittle Fracture in Fractal Aspects of Materials. Materials Research Society, Pittsburgh

    Google Scholar 

  • J.J. Mecholsky, T.J. Mackin, D.E. Passoja (1986) Crack Propagation in Brittle Materials as a Fractal Process in Fractal Aspects of Materials II (D.W. Schaefer et al., ed.) Materials Research Society, Pittsburg, PA)

    Google Scholar 

  • J.J. Mecholsky, D.E. Passoja, K.S. Feinberg-Ringel (1989) Quantitative Analysis of Brittle Fracture Surfaces Using Fractal Geometry J. Am. Ceram. Soc. 72 60–65

    Article  CAS  Google Scholar 

  • M. Miyoshi, Y. Yamazaki (1986) Topographic Contrast in Linewidth Measurement with SEM Japanese J. Electr. Microscopy 35, 149

    Google Scholar 

  • M. Miyoshi et al. (1986) A precise and automatic very large scale integrated circuit pattern linewidth measurement method using a scanning electron microscope J. Vac. Sci. Technol. B 4, 493–499

    Article  Google Scholar 

  • K. Monaghan, D. Gates, W. Mah, B. Richardson, J. Wilcox (1984) Effects due to topography and composition, Proc. SPIE 480 (Integrated Circuit Metrology II), 94-100

    Google Scholar 

  • D.E. Newbury (1987) Monte Carlo Electron Trajectory Simulations for Scanning Electron Microscopy and Microanalysis: An Overview Microbeam Analysis 1987 (R.H. Geiss, ed.) San Francisco Press, 110-114

    Google Scholar 

  • D. Nyyssonen, R.A. Larrabee (1987) Submicron Linewidth Metrology in the Optical Microscope J. Res. Nat. Bur. Stds. 92, 187

    CAS  Google Scholar 

  • D. Paumgartner, G. Losa, E.R. Weibel (1981) Resolution effect on the stereological estimation of surface and volume and its interpretation in terms of fractal dimension J. Microscopy 121 51–63

    Article  CAS  Google Scholar 

  • S. Peleg, J. Naor, R. Hartley, D. Avnir (1984) Multiple resolution texture analysis and classification, IEEE Trans Pat Anal Mach Intell PAMI - 6 # 4,518

    Article  CAS  Google Scholar 

  • A.P. Pendand (1983) Fractal-based description of natural scenes, Proc. IEEE Comput. Soc. Conf. Comput. Vision Pat Recog., Wash DC, 201-209; IEEE Trans Patt. Anal. Mach. Intell. PAMI- 6 661

    Google Scholar 

  • A.P. Pentland (1984) Local Shading Analysis IEEE Trans, Patt,Anal Mach. Intell. PAMI-6 #2, reprinted in From Pixels to Predicates (A.P. Pentland, ed.) 1986, Ablex, Norwood NJ, 40–77

    Google Scholar 

  • A.P. Pentland (1986) Shading into Texture in From Pixels to Predicates (A.P. Pentland, ed.) Ablex, Norwood NJ, 253–267

    Google Scholar 

  • M.T. Postek (1987) Submicrometer dimensional metrology in the scanning electron microscope Proc. SPIE775 166-171

    Google Scholar 

  • M. Postek, D.C. Joy (1987) Submicron Linewidth Dimensional Metrology in the SEM J. Res. Nat. Bur. Stds. 92, 205

    CAS  Google Scholar 

  • L. Reimer (1984)Journal of Microscopy 134 # 1. p. 1

    Article  Google Scholar 

  • L. Reimer, M. Riepenhausen, M. Schieijott (1986) Signal of Backscattered Electrons at Edges and Surface Steps in Dependence on Surface Tilt and Takeoff Direction Scanning 8 164–175

    Article  CAS  Google Scholar 

  • M.G. Rosenfield (1987) Analysis of linewidth measurement techniques using the low voltage SEM, Proc. SPIE 775 (Integrated Circuit Metrology, Inspection, and Process Control), 70–79

    Google Scholar 

  • J.C. Russ, J.C. Russ (1986) Shape and surface roughness characterization for particles and surfaces viewed in the SEM in Microbeam Analysis 1986 (A.D. Romig, ed.), San Francisco Press, 509

    Google Scholar 

  • J.C. Russ, J.C. Russ (1987a) Feature-specific measurement of surface roughness in SEM images, Particle Characterization, 4 (1987), 22–25

    Article  Google Scholar 

  • J.C. Russ, J.C. Russ (1987b) The SEM Interpretation of Fractal Surfaces, Proc. EMSA, San Francisco Press, 540-543

    Google Scholar 

  • L.M. Sander (1986) Fractal Growth Processes, Nature 322,789–793

    Article  Google Scholar 

  • H. Schwarz, H.E. Exner (1980) The implementation of the concept of fractal dimensions on a semi-automatic image analyzer Powder Tech. 27 207

    Article  Google Scholar 

  • H.E. Stanley, N. Ostrowsky (1986) On Growth and Form Nijhoff, Dordrecht, Holland

    Google Scholar 

  • C. Sun, W.G. Wee (1983) Neighboring Gray Level Dependence Matrix for Texture Classification CVGIP 23 341–352 more models

    Google Scholar 

  • K.A. Thompson (1987) Surface characterization by use of automated stereo analysis and fractals Microbeam Analysis 1987 (R.H. Geiss, ed.) San Francisco Press, 115-118

    Google Scholar 

  • F. Tomita, Y. Shirai, S. Tsuji (1982) Description of Textures by a Structural Analysis IEEE Trans Patt Anal Mach Intell PAMI- 4 #2,183

    Article  CAS  Google Scholar 

  • E.E. Underwood (1987) Stereological Analysis of Fracture Roughness Parameters Acta Stereologica 6 Suppl II, 169–178

    Google Scholar 

  • E.E. Underwood, K. Baneiji (1986) Fractals in Fractography Materials Science and Engineering 80 (1986) 1–14

    Article  Google Scholar 

  • A.P. Witkin (1981) Recovering surface shape and orientation from texture Artificial Intelligence 17,17–47

    Article  Google Scholar 

  • R.J. Woodham (1980) Photometric method for determining surface orientation from multiple images Optical Engineering 19 139–144

    Google Scholar 

  • R.J. Woodham (1981) Analysing Images of Curved Surfaces in Computer Vision (J.M. Brady, ed.) North Holland, Amsterdam, 117-140

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

Copyright information

© 1990 Plenum Press, New York

About this chapter

Cite this chapter

Russ, J.C. (1990). Surface Image Measurements. In: Computer-Assisted Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0563-7_10

Download citation

  • DOI: https://doi.org/10.1007/978-1-4613-0563-7_10

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4612-7868-9

  • Online ISBN: 978-1-4613-0563-7

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics