Abstract
The backscattering coefficient is the fraction of electrons of the primary beam that emerge from the surface of an electron-irradiated “bulk” target, where the meaning of the word “bulk” is explained in the following equations. The mean path length travelled by an electron in a solid target when its energy reduces from the primary energy E 0 to E is given by
(5.1) This equation allows us to calculate the maximum range of penetration,
(5.2) where E min is the energy at which an electron can be considered absorbed by the target for any practical purpose.
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(2003). Electrons Impinging on Solid Targets. In: Dapor, M. (eds) Electron-Beam Interactions with Solids. Springer Tracts in Modern Physics, vol 186. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-36507-9_5
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DOI: https://doi.org/10.1007/3-540-36507-9_5
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