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Excimer Laser-induced Ablation of Doped Poly(Tetrafluoroethylene)

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Fluoropolymers 2

Part of the book series: Topics in Applied Chemistry ((TAPP))

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References

  1. M. S. Shoichet and T. J. McCarthy, Macromolecules 24(6), 1441–1442 (1991).

    Article  CAS  Google Scholar 

  2. E. M. Liston, Polym. Mat. Sci. Eng. 62, 423–427 (1990).

    CAS  Google Scholar 

  3. L. M. Siperko and R. R. Thomas, J. Adhes. Sci. Technol. 3(3), 157–173 (1989).

    CAS  Google Scholar 

  4. C. A. Costello and T. J. McCarthy, Macromolecules 17(12), 2940–2942 (1984).

    Article  CAS  Google Scholar 

  5. H. Schonhorn and R. H. Hansen, J. Appl. Polym. Sci. 11, 1461–1474 (1967).

    Article  Google Scholar 

  6. J. R. Hollahan, B. B. Stafford, R. D. Falb, and S. T. Payne, J. Appl. Polym. Sci. 13, 807–816 (1969).

    Article  CAS  Google Scholar 

  7. J. R. Hall, C. A. L. Westerdahl, A. T. Devine, and M. J. Bodnar, J. Appl. Polym. Sci. 13, 2085–2096 (1969).

    Article  CAS  Google Scholar 

  8. F. D. Egitto, V. Vukanovic, and G. N. Taylor, in Plasma Deposition, Treatment and Etching of Polymers (R. d’Agostino, ed.),Academic Press, Boston (1990), pp. 321–422.

    Google Scholar 

  9. H. Yasuda, H. C. Marsh, S. Brandt, and C. N. Reilley, J. Polym. Sci.:Polym. Chem. Ed. 15, 991–1019 (1977).

    CAS  Google Scholar 

  10. N. Inagaki, S. Tasaka, and H. J. Kawai, J. Adhes. Sci. Technol., 3(8), 637–649 (1989).

    CAS  Google Scholar 

  11. D. T. Clark and D. R. Hutton, J. Polym. Sci. Pt A:Polym. Chem. 25(10), 2643–2664 (1987).

    CAS  Google Scholar 

  12. C. A. L. Westerdahl, J. R. Hall, E. C. Schramm, and D. W. Levi, J. Colloid and Interface Sci. 47(3), 610–620 (1974).

    Article  CAS  Google Scholar 

  13. B. T. Werner, T. Vreeland,Jr., M. H. Mendenhall, Y. Qui, and T. A. Tombrello, Thin Sol. Films 104(1–2), 163–166 (1983).

    CAS  Google Scholar 

  14. T. L. Cheeks and A. L. Ruoff, Mater. Res. Soc. Symp. Proc. 75, 527–537 (1987).

    CAS  Google Scholar 

  15. T. A. Tombrello, Mater. Res. Soc. Symp. Proc. 25, 173–178 (1984).

    CAS  Google Scholar 

  16. C.-A. Chang, J. E. E. Baglin, A. G. Schrott, and K. C. Lin, Mater Res. Soc. Symp. Proc. 93, 369–373 (1987).

    CAS  Google Scholar 

  17. C.-A. Chang, J. E. E. Baglin, A. G. Schrott and K. C. Lin, Appl. Phys. Lett. 51(2), 103–105 (1987).

    Article  CAS  Google Scholar 

  18. F. D. Egitto and L. J. Matienzo, Polym. Degrad. Stabil. 30, 293–308 (1990).

    CAS  Google Scholar 

  19. D. R. Wheeler and S. V. Pepper, NASA Technical Memorandum # 83413, NASA, Washington D.C. (1983).

    Google Scholar 

  20. D. R. Wheeler and S. V. Pepper, J. Vac. Sci. Technol. 20(2), 226–232 (1982).

    Article  CAS  Google Scholar 

  21. R. R. Rye and N. D. Shinn, Langmuir 6(1), 142–146 (1990).

    Article  CAS  Google Scholar 

  22. G. M. Sessler, J. E. West, F. W. Ryan, and H. Schonhorn, J. Appl. Polym.Sci. 17(10), 3197–3207 (1973).

    Article  CAS  Google Scholar 

  23. M. Nishii, S. Sugimoto, Y. Shimizu, N. Suzuki, S. Kawanishi, T. Nagase, M. Endo, and Y. Eguchi, Chem. Lett. 6, 1063–1066 (1993).

    Google Scholar 

  24. H. Yanaura, H. Kurokawa, T. Fujimoto, F. Baba, and T. Ando, Polym. Mat. Sci. Eng. 69, 357–358 (1993).

    CAS  Google Scholar 

  25. M. Hudis and L. E. Prescott, J. Polym. Sci. Pt B 10(3), 179–183 (1972).

    CAS  Google Scholar 

  26. Y. Momose, Y. Tamura, M. Ogino, and S. Okazaki, J. Vac. Sci. Technol. A 10(1), 229–238 (1992).

    Article  CAS  Google Scholar 

  27. G. A. Takacs, V Vukanovic, F. D. Egitto, L. J. Matienzo, F. Emmi, D. Tracy, and J. X. Chen, in Proc. 10th Intern. Symp. on Plasma Chemistry (U. Ehlemann, H. G. Lergon, and K. Wiesemann, eds.) IUPAC, Bochum, Germany (1991), pp. 14–29.

    Google Scholar 

  28. E. Sutcliffe and R. Srinivasan, J Appl. Phys. 60(9), 3315–3322 (1986).

    Article  CAS  Google Scholar 

  29. O. M. Sorokin and V. A. Blank, Zh. Prikl. Spekrosk. 9(5), 827–829 (1968).

    CAS  Google Scholar 

  30. H. Hiraoka and S. Lazare, Appl. Surf. Sci. 46, 342–347 (1990).

    CAS  Google Scholar 

  31. G. A. Takacs, V Vukanovic, D. Tracy, J. X. Chen, F. D. Egitto, L. J. Matienzo, and F. Emmi, Polym. Degrad. Stabil. 40, 73–81 (1993).

    CAS  Google Scholar 

  32. D. J. LaCombe, Insulation/Circuits, December 1978, 86–88.

    Google Scholar 

  33. K. Lu, MS. Thesis, Rochester Institute of Technology (1991).

    Google Scholar 

  34. T. Wydeven, M. A. Golub, and N. R. Lerner, R., J Appl. Polym. Sci. 37(12), 3343–3355 (1989).

    Article  CAS  Google Scholar 

  35. E. Occhiello, F. Garbassi, and J. W. Coburn, in Proc. 8th Intern. Symp. on Plasma Chemistry (K. Akashi and A. Kinbara, eds.), IUPAC, Tokyo, Japan, (1987), pp. 947–952.

    Google Scholar 

  36. R. d’Agostino, F. Cramarossa, and F. Illuzzi, J. Appl. Phys. 61, 2754–2762 (1987).

    CAS  Google Scholar 

  37. F. D. Egitto, L. J. Matienzo, and H. B. Schreyer, J. Vac. Sci. Technol. A10(5), 3060–3064 (1992).

    Google Scholar 

  38. D. N. Light and J. R. Wilcox, Proc. 44th Electronic Components and Technology Conference, IEEE, (1994), pp. 542–549.

    Google Scholar 

  39. A. L. Kenney and J. W. Dally, Circuit World 14(3), 3l–36 (1988).

    Google Scholar 

  40. K. Ito, M. Inoue, and M. Moriyasu, Kobunshi Ronbunshu 48(11), 725–735 (1991).

    CAS  Google Scholar 

  41. H. Pummer, Photonics Spectra, May, 1985, 73–81.

    Google Scholar 

  42. S. Kuper and M. Stuke, Appl. Phys. Lett. 54(1), 4–6 (1989)

    Google Scholar 

  43. S. Kuper and M. Stuke, Appl. Phys. B44, 199–204 (1987).

    Google Scholar 

  44. Y. Kawamura, K. Toyoda, and S. Namba, Appl. Phys. Lett. 40(5), 374–375 (1982).

    CAS  Google Scholar 

  45. R. Srinivasan and V Mayne-Banton, Appl. Phys. Lett. 41(6), 576–578 (1982).

    Article  CAS  Google Scholar 

  46. G. D. Mahan, H. S. Cole, Y. S. Liu, and H. R. Philipp, Appl. Phys. Lett. 53(24), 2377–2379 (1988).

    Article  CAS  Google Scholar 

  47. R. Sauerbrey and G. H. Pettit, Appl. Phys. Lett. 55(5), 421–423 (1989).

    Article  CAS  Google Scholar 

  48. R. Srinivasan, E. Sutcliffe, and B. Braren, Laser Chem. 9(1–3), 147–154 (1988).

    CAS  Google Scholar 

  49. J. H. Brannon, J. R. Lankard, A. I. Baise, F. Bums, and J. Kaufman, J. Appl. Phys. 58(5), 2036–2043 (1985).

    Article  CAS  Google Scholar 

  50. J. T. C. Yeh, J. Vac. Sci. Technol. A 4(3), 653–658 (1986).

    CAS  Google Scholar 

  51. T. Nakata, F. Kannari, and M. Obara, Optoelectron-Devices Technol. 8(2), 179–190, (1993).

    CAS  Google Scholar 

  52. T. F. Deutsch and M. W. Geis, J. Appl. Phys. 54(12), 7201–7204 (1983)

    Article  CAS  Google Scholar 

  53. J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, Appl. Phys. Lett. 43(8), 717–719 (1983)

    Article  CAS  Google Scholar 

  54. H. H. G. Jellinek and R. Srinivasan, J. Phys. Chem. 88, 3048–3051 (1984).

    Article  CAS  Google Scholar 

  55. Y. S. Liu, H. S. Cole, H. R. Philipp, and R. Guida, Proc. SPIE: Lasers in Microlithography 774, 133–137 (1987).

    Google Scholar 

  56. W. L. McCubbin, Chem. Phys. Lett. 8(6), 507–512 (1971).

    Article  CAS  Google Scholar 

  57. K. Seki, H. Tanaka, T. Ohta, A. Yuriko, A. Imamura, H. Fujimoto, H. Yamamoto, and H. Inokuchi, Phys. Scr. 41(1), 167–171 (1990).

    CAS  Google Scholar 

  58. D. Basting, U. Sowada, F. Voss, and P. Oesterlin, Proc. SPIE: Gas and Metal Lasers and Applications 1412, 80–83 (1991)

    Google Scholar 

  59. A. Costela, I. Garcia-Moreno, F. Florido, J. M. Figuera, R. Sastre, S. M. Hooker, J. S. Cashmore, and C. E. Webb, J. Appl. Phys. 77(6), 2343–2350, 1995.

    Article  CAS  Google Scholar 

  60. P. R. Herman, B. Chen, and D. J. Moore, in Laser Ablation in Materials Processing: Fundamentals and Applications (B. Braren, J. J. Dubowksi, and D. P. Norton, eds.), Materials Research Society, Pittsburgh (1992), Proc. 285.

    Google Scholar 

  61. F. D Egitto and C. R. Davis, Appl. Phys. B55, 488–493 (1992).

    CAS  Google Scholar 

  62. D. L. Singleton, G. Paraskevopoulos, and R. S. Taylor, Chem. Phys. 144, 415–423 (1990).

    Article  CAS  Google Scholar 

  63. R. Taylor, D. L. Singleton, and G. Paraskevopoulos, Appl. Phys. Lett. 50(25), 1779–1781 (1987).

    Article  CAS  Google Scholar 

  64. R. Srinivasan and B. Braren, Chem. Rev. 89(6), 1303–1316 (1989).

    Article  CAS  Google Scholar 

  65. R. Srinivasan, B. Braren, and K. G. Casey, Pure Appl. Chem. 62(8), 1581–1584 (1990).

    CAS  Google Scholar 

  66. R. Linsker, R. Srinivasan, J. J. Wynne, and D. R. Alonso, Lasers Surg. Med. 4, 201–206 (1984).

    CAS  Google Scholar 

  67. S. R. Cain, C. E. Otis, and F. C. Burns, J. Appl. Phys. 71(9), 4107–4117 (1992).

    Article  CAS  Google Scholar 

  68. V. Srinivasan, M. A. Smrtic, and S. V. Babu, J. Appl. Phys. 59(11), 3861–3867 (1986).

    Article  CAS  Google Scholar 

  69. S. V. Babu, G. C. D’Couto, and F. D. Egitto, J. Appl. Phys. 72(2), 692–698 (1992).

    Article  CAS  Google Scholar 

  70. H. Hiraoka, T. J. Chuang, and H. Masuhara, J. Vac. Sci. Technol. B6(1), 463–465 (1988).

    Google Scholar 

  71. R. Srinivasan and B. Braren, Appl. Phys. A45, 289–292 (1988).

    CAS  Google Scholar 

  72. T. J. Chuang, H. Hiraoka, and A. Modl, Appl. Phys. A45(4), 277–288 (1988).

    CAS  Google Scholar 

  73. W. W. Simons (ed.), The Sadtler Handbook of Ultraviolet Spectra, Sadtler Research Laboratories, Philadelphia (1979), p. 36.

    Google Scholar 

  74. F. D. Egitto and C. R. Davis, unpublished results (1993).

    Google Scholar 

  75. R. M. Silverstein, G. C. Bassler, and T. C. Morrill, Spectrometric Identification of Organic Compounds, 4th Ed., John Wiley and Sons, New York (1981), p. 305.

    Google Scholar 

  76. C. R. Davis, F. D. Egitto, and S. L. Buchwalter, Appl. Phys. B54, 227–230 (1992).

    CAS  Google Scholar 

  77. D. H. Napper, Polymeric Stabilization of Colloidal Dispersions, Academic Press, New York (1993).

    Google Scholar 

  78. C. R. Davis and J. A. Zimmerman, J. Appl. Polym. Sci. 54, 153–162 (1994).

    Article  CAS  Google Scholar 

  79. N. J. Turro, Molecular Photochemistry, Benjamin, New York (1965).

    Google Scholar 

  80. H. S. Cole, Y. S. Liu, and H. R. Philipp, Appl. Phys. Lett. 48(1), 76–77 (1986).

    Article  CAS  Google Scholar 

  81. M. Bolle, K. Luther, J. Troe, J. Ihlemann, and H. Gerhardt, Appl. Surf. Sci. 46, 279–283 (1990).

    Article  CAS  Google Scholar 

  82. G. C. D’Couto, S. V. Babu, F. D. Egitto, and C. R. Davis, J. Appl. Phys. 74(10), 5972–5980 (1993).

    CAS  Google Scholar 

  83. N. P. Furzikov, Appl. Phys. Lett. 56(17), 1638–1640 (1990).

    Article  CAS  Google Scholar 

  84. G. C. D’Couto and S. V. Babu, J. Appl. Phys. 76(5), 3052–3058 (1994).

    CAS  Google Scholar 

  85. C. R. Davis, R. W. Snyder, E. D. Egitto, G. C. D’Couto, and S. V. Babu, J. Appl. Phys. 76(5), 3049–3051 (1994).

    Article  CAS  Google Scholar 

  86. C. R. Davis and F. D. Egitto, Polym. Mat. Sci. Eng. 66, 257–258 (1992).

    CAS  Google Scholar 

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Author information

Authors and Affiliations

  1. Microelectronics Division, IBM, Hopewell Junction, New York, 12533

    C. R. Davis

  2. Microelectronics Division, IBM, Endicott, New York, 13760

    F. D. Egitto

  3. Department of Chemical Engineering, Clarkson University, Potsdam, New York, 13699

    S. V. Babu

Authors
  1. C. R. Davis
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  2. F. D. Egitto
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  3. S. V. Babu
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Editor information

Editors and Affiliations

  1. IBM T. J. Watson Research Center, Yorktown Heights, New York

    Gareth Hougham

  2. Southwest Texas State University, San Marcos, Texas

    Patrick E. Cassidy

  3. Chemical and Polymer, Windlesham, Surrey, England

    Ken Johns

  4. Princeton, New Jersey

    Theodore Davidson

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© 2002 Kluwer Academic Publishers

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Davis, C.R., Egitto, F.D., Babu, S.V. (2002). Excimer Laser-induced Ablation of Doped Poly(Tetrafluoroethylene). In: Hougham, G., Cassidy, P.E., Johns, K., Davidson, T. (eds) Fluoropolymers 2. Topics in Applied Chemistry. Springer, Boston, MA. https://doi.org/10.1007/0-306-46919-7_5

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  • DOI: https://doi.org/10.1007/0-306-46919-7_5

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-46061-6

  • Online ISBN: 978-0-306-46919-0

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