Overview
- This volume brings together some of the most well-known scientists in each of the topics covered, many of whom have pioneered the development of plasma processing techniques
- Includes supplementary material: sn.pub/extras
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Table of contents (15 chapters)
Editors and Affiliations
Bibliographic Information
Book Title: Handbook of Advanced Plasma Processing Techniques
Editors: Randy J. Shul, Stephen J. Pearton
DOI: https://doi.org/10.1007/978-3-642-56989-0
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 2000
Hardcover ISBN: 978-3-540-66772-8Published: 28 August 2000
Softcover ISBN: 978-3-642-63096-5Published: 01 November 2012
eBook ISBN: 978-3-642-56989-0Published: 28 June 2011
Edition Number: 1
Number of Pages: XVI, 655
Number of Illustrations: 141 b/w illustrations, 10 illustrations in colour
Topics: Surfaces and Interfaces, Thin Films, Atomic, Molecular, Optical and Plasma Physics, Optical and Electronic Materials, Manufacturing, Machines, Tools, Processes, Engineering, general, Characterization and Evaluation of Materials