Overview
- Introduces the MEMS fabrication processes and equipment
- Explains how to take the first steps - where to start and get initial advice and further assistance
- Includes a global list of MEMS facilities and resources with contact information
Buy print copy
About this book
Similar content being viewed by others
Keywords
Table of contents (20 chapters)
Authors and Affiliations
About the author
Bibliographic Information
Book Title: DIY MEMS
Book Subtitle: Fabricating Microelectromechanical Systems in Open Use Labs
Authors: Deborah Munro
DOI: https://doi.org/10.1007/978-3-030-33073-6
Publisher: Springer Cham
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer Nature Switzerland AG 2019
Hardcover ISBN: 978-3-030-33072-9Published: 06 December 2019
Softcover ISBN: 978-3-030-33075-0Published: 06 December 2020
eBook ISBN: 978-3-030-33073-6Published: 25 November 2019
Edition Number: 1
Number of Pages: XVI, 188
Number of Illustrations: 15 b/w illustrations, 4 illustrations in colour
Topics: Electronic Circuits and Devices, Electronics and Microelectronics, Instrumentation, Biomedical Engineering/Biotechnology, Nanotechnology and Microengineering, Industrial and Production Engineering