Access this book
Tax calculation will be finalised at checkout
Other ways to access
Keywords
Table of contents (7 chapters)
Bibliographic Information
Book Title: Sputtering by Particle Bombardment II
Book Subtitle: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
Editors: Rainer Behrish
Series Title: Topics in Applied Physics
DOI: https://doi.org/10.1007/3-540-12593-0
Publisher: Springer Berlin, Heidelberg
-
eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1983
Softcover ISBN: 978-3-662-31169-1Published: 23 August 2014
eBook ISBN: 978-3-540-38659-9Published: 11 August 2005
Series ISSN: 0303-4216
Series E-ISSN: 1437-0859
Edition Number: 1
Number of Pages: XIII, 394