Abstract
We have developed a real-time dose monitoring system for a low-energy ion-beam facility. Before we developed the monitoring system, the system had given a substantial error of ±23% when we irradiated an ion beam with a dose as much as 3.0 × 1016 cm−2 on the Si substrate. Moreover, a low irradiation dose as small as 1013 cm−2 was scarcely able to be controlled because of a too short irradiation time of several seconds, producing a greater dose error. To develop a real-time dose monitoring system, in this work, we employed a current integrator in conjunction with a beam stopper, by which a dose of 3.0 ×1016 cm−2 can be exactly irradiated on the sample with less than ±6% error, which was ensured by the measurements of Rutherford backscattering spectroscopy.
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Acknowledgments
This work was supported by the Korea Multi-purpose Accelerator Complex (KOMAC) operation fund of Korea Atomic Energy Research Institute (KAERI), which was supported by Ministry of Science ICT and Future Planning of Korean Government and the National Research Foundation of Korea (NRF) grant (No. NRF-2018R1D1A1B07047259). The beam irradiation experiments at the KOMAC are acknowledged.
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Hwang, Y.S., Kim, M., Suk, J. et al. Precision Control for Beam Irradiation Dose by Developing a Real-time Dose Monitoring System. J. Korean Phys. Soc. 77, 395–398 (2020). https://doi.org/10.3938/jkps.77.395
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DOI: https://doi.org/10.3938/jkps.77.395