Abstract
The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.
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Original Russian Text © N.N. Nikitenkov, E.S. Kiselyova, M.E. Konischev, V.S. Sypchenko, A.N. Nikitenkov, V.F. Pichugin, I.A. Shylepov, M. Epple, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 12, pp. 21–25.
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Nikitenkov, N.N., Kiselyova, E.S., Konischev, M.E. et al. Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering. J. Surf. Investig. 8, 1230–1234 (2014). https://doi.org/10.1134/S1027451014060391
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DOI: https://doi.org/10.1134/S1027451014060391