Abstract
A method for the efficient monitoring of the existence and composition of encapsulated nanophases in nanostructured thin films grown using sol-gel technology is suggested. The method is used to study the semiconductor film structures intended for gas-sensitive adsorption sensors. The potential for, and prospects of, studying materials and diagnosing sol-gel processes using this method are considered.
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Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 39, No. 3, 2005, pp. 300–304.
Original Russian Text Copyright © 2005 by Il’in, Maksimov, Moshnikov, Yaroslavtsev.
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Il’in, A.S., Maksimov, A.I., Moshnikov, V.A. et al. Internal friction in semiconductor thin films grown using sol-gel technology. Semiconductors 39, 281–284 (2005). https://doi.org/10.1134/1.1882786
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DOI: https://doi.org/10.1134/1.1882786