Abstract
Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Smith G. The application of microtechnology to sensors for the automotive industry. Microelectron J 1997, 28: 371–379.
Prosser SJ. Advances in sensors for aerospace applications. Sensor Actuat A: Phys 1993, 37–38: 128–134.
Tung TT, Robert C, Castro M, et al. Enhancing the sensitivity of graphene/polyurethane nanocomposite flexible piezo-resistive pressure sensors with magnetite nano-spacers. Carbon 2016, 108: 45CM60.
Park SJ, Kim J, Chu M, et al. Flexible piezoresistive pressure sensor using wrinkled carbon nanotube thin films for human physiological signals. Adv Mater Technol 2018, 3: 1700158.
Liu H, Dong MY, Huang WJ, et al. Lightweight conductive graphene/thermoplastic polyurethane foams with ultrahigh compressibility for piezoresistive sensing. J Mater Chem C 2017, 5: 73–83.
Masheeb F, Stefanescu S, Ned AA, et al. Leadless sensor packaging for high temperature applications. In Technical Digest. MEMS IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. Las Vegas, NV, USA: IEEE, 2002: 392–395.
Li M, Tang HX, Roukes ML. Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications. Nat Nanotech 2007, 2: 114–120.
Zaitsev AM, Burchard M, Meijer J, et al. Diamond pressure and temperature sensors for high-pressure high-temperature applications. Phys Stat Sol (a) 2001, 185: 59–64.
Ned AA, Okojie RS, Kurtz AD. 6H-SiC pressure sensor operation at 600 °C. In 1998 Fourth International High Temperature Electronics Conference. Albuquerque, NM, USA: IEEE, 1998: 257–260.
Kurtz AD, Ned AA. Hermetically sealed ultra high temperature silicon carbide pressure transducers and method for fabricating same. U.S. Patent 6058782, May 2000.
Kervran Y, de Sagazan O, Crand S, et al. Mcrocrystalline silicon: Strain gauge and sensor arrays on flexible substrate for the measurement of high deformations. Sensor Actuat A: Phys 2015, 236: 273–280.
Phan HP, Dao DV, Tanner P, et al. Thickness dependence of the piezoresistive effect in p-type single crystalline 3C-SiC nanothin films. J Mater Chem C 2014, 2: 7176–7179.
Riedel R, Kienzle A, Dressier W, et al. A silicoboron carbonitride ceramic stable to 2000 °C. Nature 1996, 382: 796–798.
Wang YG, An LN, Fan Y, et al. Oxidation of polymer-derived SiAlCN ceramics. J Am Ceram Soc 2005, 88: 3075–3080.
Wang YG, Fei WF, An LN. Oxidation/corrosion of polymer-derived SiAlCN ceramics in water vapor. J Am Ceram Soc 2006, 89: 1079–1082.
Wang YG, Fei WF, Fan Y, et al. Silicoaluminum carbonitride ceramic resist to oxidation/corrosion in water vapor. J Mater Res 2006, 21: 1625–1628.
Zhang LG, Wang YS, Wei Y, et al. A silicon carbonitride ceramic with anomalously high piezoresistivity. J Am Ceram Soc 2008, 91: 1346–1349.
Li N, Cao YJ, Zhao R, et al. Polymer-derived SiA1OC ceramic pressure sensor with potential for high-temperature application. Sensor Actual A: Phys 2017, 263: 174–178.
Cao YJ, Yang XP, Zhao R, et al. Giant piezoresistivity in polymer-derived amorphous SiAICO ceramics. J Mater Sci 2016, 51: 5646–5650.
Colombo P, Mera G, Riedel R, et al. Polymer-derived ceramics: 40 years of research and innovation in advanced ceramics. J Am Ceram Soc 2010, 93: 1805–1837.
Fu SY, Zhu M, Zhu YF. Organosilicon polymer-derived ceramics: An overview. J Adv Ceram 2019, 8: 457–478.
Zhao H, Chen LX, Luan XG, et al. Synthesis, pyrolysis of a novel liquid SiBCN ceramic precursor and its application in ceramic matrix composites. J Eur Ceram Soc 2017, 37: 1321–1329.
Kong J, Wang MJ, Zou JH, et al. Soluble and meltable hyperbranched polyborosilazanes toward high-temperature stable SiBCN ceramics. ACS Appl Mater Interfaces 2015, 7: 6733–6744.
Thiyagarajan GB, Devasia R. Simple and low-cost synthetic route for SiBCN ceramic powder from a boron-modified cyclotrisilazane. J Am Ceram Soc 2019, 102: 476–489.
Sarkar S, Gan ZH, An LN, et al. Structural evolution of polymer-derived amorphous SiBCN ceramics at high temperature. J Phys Chem C 2011, 115: 24993–25000.
Liao N, Jia DC, Yang ZH, et al. Enhanced mechanical properties and thermal shock resistance of Si2BC3N ceramics with SiC coated MWCNTs. J Adv Ceram 2019, 8: 121–132.
Kousaalya AB, Kumar R, Packirisamy S. Characterization of free carbon in the as-thermolyzed Si-B-C-N ceramic from a polyorganoborosilazane precursor. J Adv Ceram 2013, 2: 325–332.
Chen YH, Yang XP, Cao YJ, et al. Effect of pyrolysis temperature on the electric conductivity of polymer-derived silicoboron carbonitride. J Eur Ceram Soc 2014, 34: 2163–2167.
Ramakrishnan PA, Wang YT, Balzar D, et al. Silicoboron-carbonitride ceramics: A class of high-temperature, dopable electronic materials. Appl Phys Lett 2001, 78: 3076–3078.
Ding Q, Ni DW, Wang Z, et al. 3D Cf/SiBCN composites prepared by an improved polymer infiltration and pyrolysis. J Adv Ceram 2018, 7: 266–275.
Kingery WD, Bowen HK, Uhlmann DR. Introduction to Ceramics. New York, U.S.: John Wiley and Sons, 1976.
Wang YS, Zhang LG, Fan Y, et al. Stress-dependent piezoresistivity of tunneling-percolation systems. J Mater Sci 2009, 44: 2814–2819.
Wang YG, Ding J, Feng W, et al. Effect of pyrolysis temperature on the piezoresistivity of polymer-derived ceramics. J Am Ceram Soc 2011, 94: 359–362.
Acknowledgements
The authors appreciate the financial support from the National Natural Science Foundation of China (No. U1904180) and Key Scientific Research Projects of High Education Institutions of Henan province (No. 19A430025).
Author information
Authors and Affiliations
Corresponding authors
Rights and permissions
Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made.
The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder.
To view a copy of this licence, visit http://creativecomm-ons.org/licenses/by/4.0/
About this article
Cite this article
Shao, G., Jiang, J., Jiang, M. et al. Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance. J Adv Ceram 9, 374–379 (2020). https://doi.org/10.1007/s40145-020-0377-6
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40145-020-0377-6