Abstract
Silica-based fiber tips are used in a variety of spectroscopic, micro- or nano-scopic optical sensor applications and photonic micro-devices. The miniaturization of optical sensor systems and the technical implementation using optical fibers can provide new sensor designs with improved properties and functionality for new applications. The selective-etching of specifically doped silica fibers is a promising method in order to form complex photonic micro structures at the end or within fibers such as tips and cavities in various shapes useful for the all-fiber sensor and imaging applications. In the present study, we investigated the preparation of geometrically predefined, nanoscaled fiber tips by taking advantage of the dopant concentration profiles of highly doped step-index fibers. For this purpose, a gas phase etching process using hydrofluoric acid (HF) vapor was applied. The shaping of the fiber tips was based on very different etching rates as a result of the doping characteristics of specific optical fibers. Technological studies on the influence of the etching gas atmosphere on the temporal tip shaping and the final geometry were performed using undoped and doped silica fibers. The influence of the doping characteristics was investigated in phosphorus-, germanium-, fluorine- and boron-doped glass fibers. Narrow exposed as well as protected internal fiber tips in various shapes and tip radiuses down to less than 15 nm were achieved and characterized geometrically and topologically. For investigations into surface plasmon resonance effects, the fiber tips were coated with nanometer-sized silver layers by means of vapour deposition and finally subjected to an annealing treatment.
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Q. Zhong and D. Inniss, “Characterization of the lightguiding structure of optical fibers by atomic force microscopy,” Journal of Lightwave Technology, vol. 12, no. 9, pp. 1517–1523, 1994.
A. Lewis, M. Isaacson, A. Harootunian, and A. Murray, “Development of a 500 Å spatial resolution light microscope: I. light is efficiently transmitted through λ/16 diameter apertures,” Ultramicroscopy, vol. 13, no. 3, pp. 227–231, 1984.
D. W. Pohl, W. Denk, and M. Lanz, “Optical stethoscopy: image recording with resolution λ/20,” Applied Physics Letters, vol. 44, no. 7, pp. 651–653, 1984.
F. Zenhausern, Y. Marthin, and H. K. Wickramasinghe, “Scanning interferometric apertureless microscopy: optical imaging at 10 angstrom resolution,” Science, vol. 269, no. 5227, pp. 1083–1085, 1995.
S. Mononobe and M. Ohtsu, “Fabrication of a pencil-shaped fiber probe for near-field optics by selective chemical etching,” Journal of Lightwave Technology, vol. 14, no. 10, pp. 2231–2235, 1996.
X. Zheng, D. Guo, Y. Shao, S. Jia, S. Xu, B. Zhao, et al., “Photochemical modification of an optical fiber tip with a silver nanoparticle film: a SERS chemical sensor,” Langmuir, vol. 24, no. 8, pp. 4394–4398, 2008.
G. Shambat, S. R. Kothapalli, A. Khurana, J. Provine, T. Sarmiento, K. Cheng, et al., “A photonic crystal cavity-optical fiber tip nanoparticle sensor for biomedical applications,” Applied Physics Letters, vol. 100, no. 21 pp. 213702-1–213702-4, 2012.
J. Zhang, X. Qiao, T. Guo, Y. Ma, R. Wang, Y. Weng, et al., “Highly-sensitive temperature sensor using a Hi-Bi fiber tip probe,” IEEE Sensors Journal, vol. 12, no. 6, pp. 2077–2080, 2012.
E. Cibula, S. Pevec, B. Lenardic, E. Pinet, and D. Donlagic, “Miniature all-glass robust pressure sensor,” Optics Express, vol. 17, no 7, pp. 5098–5106, 2009.
X. Chen, F. Shen, Z. Wang, Z. Huang, and A. Wang, “Micro-air-gap based intrinsic Fabry-Perot interferometric fiber-optic sensor,” Applied Optics, vol. 45, no. 30, pp. 7760–7766, 2006.
S. Pevec and D. Donlagic, “All-fiber, long-active-length Fabry-Perot strain sensor,” Optics Express, vol. 19, no 16, pp. 15641–15651, 2011.
S. Pevec and D. Donlagic, “All-fiber micro-machined Fabry-Perot strain sensor,” in Proc. SPIE, Brussels, vol. 8426, pp. 84261D-1–84261D-7, 2012.
D. Donlagic, “All-fiber micromachined microcell,” Optics Letters, vol. 36, no. 16, pp. 3148–3150, 2011.
S. Pevec, E. Cibula, B. Lenardic, and D. Donlagic, “Micromachining of optical fibers using the selective etching of doped silica glass,” in Proc. SPIE, Brussels, vol. 8428, pp. 84280S-1–84280S-7, 2012.
Y. Oshikane, T. Kataoka, M. Okuda, S. Hara, H. Inoue, and M. Nakano, “Observation of nanostructure by scanning near-field optical microscope with small sphere probe,” Science and Technology of Advanced Materials, vol. 8, no. 3, pp. 181–185, 2007.
P. Hoffmann, B. Dutoit, and R. P. Salathé, “Comparison of mechanically drawn and protection layer chemically etched optical fiber tips,” Ultramicroscopy, vol. 61, no. 1–4, pp. 165–170, 1995.
P. Lambelet, A. Sayah, M. Pfeffer, C. Philipona, and F. Marquis-Weible, “Chemically etched fiber tips for near-field optical microscopy: a process for smoother tips,” Applied Optics, vol. 37, no. 31, pp. 7289–7292, 1998.
Y. H. Chuang, K. G. Sun, C. J. Wang, J. Y. Huang, and C. L. Pan, “A simple chemical etching technique for reproducible fabrication of robust scanning near-field fiber probes,” Review of Scientific Instruments, vol. 69, no. 2, pp. 437–439, 1998.
H. Muramatsu, K. Homma, N. Chiba, N. Yamamoto, and A. Egawa, “Dynamic etching method for fabricating a variety of tip shapes in the optical fiber probe of a scanning near-field optical microscope,” Journal of Microscopy, vol. 194, no. 2–3, pp. 383–387, 1999.
L. Wong, T. Suratwala, M. D. Feit, P. E. Miller, and R. Steele, “The effect of HF/NH4F etching on the morphology of surface fractures on fused silica,” Journal of Non-Crystalline Solids, vol. 355, no. 15, pp. 797–810, 2009.
J. Bierlich, J. Kobelke, D. Brand, K. Kirsch, J. Dellith, and H. Bartelt, “Optical fiber tips for nanoscopic applications,” in DGaO-Proc., Ilmenau, http://www.dgao-proceedings.de, ISSN: 1614-8436 - urn:nbn:de:0287-2011-P011-6, 2011.
F. Dürr, G. Kulik, H. G. Limberger, R. P. Salathé, S. L. Semjonov, and E. M. Dianov, “Hydrogen loading and UV-irradiation induced etch rate changes in phosphorus-doped fibers,” Optics Express, vol. 12, no. 23, pp. 5770–5776, 2004.
Z. Yu, G. Collins, B. Harbison, I. Aggawal, D. Reicher, and J. McNeil, “Hermetic coatings on fluoride glass fibers using cylindrical magnetron reactive sputtering,” Japanese Journal of Applied Physics, vol. 31, no. 12R, pp. 3969–3971, 1992.
J. Bierlich, J. Kobelke, K. Schuster, J. Kupis, K. Kirsch, C. Aichele, et al., “Inorganic high temperature coatings for optical fibers by sputtering,” in Proc. ICMAT 2009, Symposium on Optical Fiber Devices and Applications, Singapore, Jun 28–July 3, pp. 182–185, 2009.
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Bierlich, J., Kobelke, J., Brand, D. et al. Nanoscopic tip sensors fabricated by gas phase etching of optical glass fibers. Photonic Sens 2, 331–339 (2012). https://doi.org/10.1007/s13320-012-0085-0
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DOI: https://doi.org/10.1007/s13320-012-0085-0